Shutdown kscoat SNF 2012-06-27 09:57:21: No Vacuum

gsosa at gsosa at
Thu Jul 19 07:52:37 PDT 2012

Troubleshot and replaced vacuum solinoid for end-effercor vacuum. Also had to reteach the Z height positions to pick up and place  4" wafers at the load stations. Still need to check/teach positions for 3",5",6" and 8" wafers.

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