Problem kscoat SNF 2012-07-19 07:52:56: Update 7/19

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Jul 19 07:52:57 PDT 2012


Troubleshot and replaced vacuum solinoid for end-effercor vacuum. Also had to reteach the Z height positions to pick up and place  4" wafers at the load stations. Still need to check/teach positions for 3",5",6" and 8" wafers.




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