From lindaohara at snf.stanford.edu Fri Jun 1 11:19:34 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 1 Jun 2012 11:19:34 -0700 Subject: Comment kscoat SNF 2012-05-11 13:15:06: Cleaned Ctr Cup & System Message-ID: archive From lindaohara at snf.stanford.edu Fri Jun 1 11:19:55 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 1 Jun 2012 11:19:55 -0700 Subject: Comment kscoat SNF 2012-06-01 11:19:54: Cleaned Ctr Cup, Bake, & System Message-ID: From lindaohara at snf.stanford.edu Wed Jun 6 10:50:25 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 6 Jun 2012 10:50:25 -0700 Subject: Comment kscoat SNF 2012-06-06 10:50:25: JB Tech PM & Repair Message-ID: From lindaohara at snf.stanford.edu Thu Jun 7 15:41:56 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 7 Jun 2012 15:41:56 -0700 Subject: Problem kscoat SNF 2011-09-09 09:28:35: Hotplate 1 Message-ID: JB repaired sensor on door From lindaohara at snf.stanford.edu Thu Jun 7 15:42:29 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 7 Jun 2012 15:42:29 -0700 Subject: Problem kscoat SNF 2011-11-18 11:04:49: Left Cassette Message-ID: JB calibrated robot to cassette From lindaohara at snf.stanford.edu Thu Jun 7 15:42:58 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 7 Jun 2012 15:42:58 -0700 Subject: Problem kscoat SNF 2011-11-23 09:18:41: Both Cassettes Prob Message-ID: JB calibrated all wafer sizes with robot From lindaohara at snf.stanford.edu Thu Jun 7 15:43:18 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 7 Jun 2012 15:43:18 -0700 Subject: Problem kscoat SNF 2011-11-23 09:19:31: Cool Plate door Open Message-ID: JB repaird chiller and pump From lindaohara at snf.stanford.edu Thu Jun 7 15:43:39 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 7 Jun 2012 15:43:39 -0700 Subject: Problem kscoat SNF 2012-02-22 15:15:26: Loss of Coolant flow on Cool Plate Message-ID: JB repaired chiller and pump From lindaohara at snf.stanford.edu Thu Jun 7 15:44:45 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 7 Jun 2012 15:44:45 -0700 Subject: Problem kscoat SNF 2012-04-27 09:45:17: Develop prob Message-ID: SNF flushed developer line with wafer and refilled developer. ok From lindaohara at snf.stanford.edu Thu Jun 7 15:45:41 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 7 Jun 2012 15:45:41 -0700 Subject: Comment kscoat SNF 2012-06-06 10:50:25: JB Tech PM & Repair Message-ID: JB repaired hotplate1, cool plate, and did a pm on the robot. From lindaohara at snf.stanford.edu Fri Jun 8 13:18:07 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 8 Jun 2012 13:18:07 -0700 Subject: Problem kscoat SNF 2012-06-08 13:18:06: Hotplate1 Message-ID: When robot retrieves wafers from hotplate 1, it doesn't put wafers seated in casette and scratcfhes the lower wafer. One time the robot pulled the lower wafer out of the cassette when putting the wafer above in cassette. From lindaohara at snf.stanford.edu Fri Jun 8 13:43:56 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 8 Jun 2012 13:43:56 -0700 Subject: Comment kscoat SNF 2012-05-18 15:39:05: Cleaned Ctr Cup & System Message-ID: archive From lindaohara at snf.stanford.edu Fri Jun 8 13:44:04 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 8 Jun 2012 13:44:04 -0700 Subject: Comment kscoat SNF 2012-06-08 13:44:03: Cleaned Ctr Cup & System Message-ID: From lindaohara at snf.stanford.edu Tue Jun 12 12:03:00 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 12 Jun 2012 12:03:00 -0700 Subject: Problem kscoat SNF 2012-06-08 13:18:06: Hotplate1 Message-ID: JB found pins inside not level.ok ok to use load and unload to cassette From lindaohara at snf.stanford.edu Tue Jun 12 13:22:24 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 12 Jun 2012 13:22:24 -0700 Subject: Problem kscoat SNF 2012-06-12 13:22:24: Hotplates needs to be recalibrated Message-ID: From lindaohara at snf.stanford.edu Fri Jun 15 12:22:08 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 15 Jun 2012 12:22:08 -0700 Subject: Problem kscoat SNF 2012-06-12 13:22:24: Hotplates needs to be recalibrated Message-ID: Gary found Hotplate 1 off -10C and Hotplate 2 off -12C. He calibrated both hotplates, in spec. From lindaohara at snf.stanford.edu Fri Jun 15 12:22:27 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 15 Jun 2012 12:22:27 -0700 Subject: Comment kscoat SNF 2012-06-01 11:19:54: Cleaned Ctr Cup, Bake, & System Message-ID: archive From lindaohara at snf.stanford.edu Fri Jun 15 12:22:43 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 15 Jun 2012 12:22:43 -0700 Subject: Comment kscoat SNF 2012-06-15 12:22:42: Cleaned Ctr Cup & System Message-ID: From lindaohara at snf.stanford.edu Fri Jun 22 12:33:01 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 22 Jun 2012 12:33:01 -0700 Subject: Comment kscoat SNF 2012-06-08 13:44:03: Cleaned Ctr Cup & System Message-ID: archive From lindaohara at snf.stanford.edu Fri Jun 22 12:33:26 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 22 Jun 2012 12:33:26 -0700 Subject: Comment kscoat SNF 2012-06-22 12:33:25: Cleaned Ctr Cup, Bake, & System Message-ID: From lindaohara at snf.stanford.edu Wed Jun 27 09:57:22 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 27 Jun 2012 09:57:22 -0700 Subject: Shutdown kscoat SNF 2012-06-27 09:57:21: No Vacuum Message-ID: