Problem kscoat SNF 2012-05-04 13:19:39: wafer not returning to cassette

pding at snf.stanford.edu pding at snf.stanford.edu
Fri May 4 13:19:39 PDT 2012


Wafer got developed properly. But at the end, wafer got left on the robot rather than being returned to cassette. Manually retrieved the wafer.




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