Comment kscoat SNF 2012-04-27 15:50:04: Cleaned Ctr Cup, Bake, & System
lindaohara at snf.stanford.edu
lindaohara at snf.stanford.edu
Fri May 11 13:14:46 PDT 2012
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Problem kscoat SNF 2012-05-04 13:19:39: wafer not returning to cassette
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Comment kscoat SNF 2012-05-11 13:15:06: Cleaned Ctr Cup & System
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Problem kscoat SNF 2012-05-04 13:19:39: wafer not returning to cassette
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Comment kscoat SNF 2012-05-11 13:15:06: Cleaned Ctr Cup & System
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