From hgross at etec.com Fri Dec 1 07:36:59 2000 From: hgross at etec.com (Harald Gross) Date: Fri, 1 Dec 2000 07:36:59 -0800 Subject: need info for wet etching of glass Message-ID: Hello, Who has experience in wet etching of 50-100um deep microchannels (e.g. 50, 100 and 250 micron wide) in glas substrates (e.g. Pyrex)? -Etchant / Concentration? -Glas type? -Etch rates? -Mask materials? -Cross section profile of the trench? -Etch rates dependance on trenchwidth? -Impact of agitation (etch rate, profile)? -Reproducible? Who knows anything about Electrochemical Isotropic Silicon Etching -Beside for the fabrication of porous silicon, is this technique also suitable to etch trenches in silicon (to replace the difficult to control isotropic silicon etching with HF-HNO3) and for wafer polishing (e.g. to remove DRIE sidewall scalloping)? -If so, how well can the process be controlled? -Surface roughness improvement (Ra)? -Etchant / concentration? -Applied voltage/current? -Silicon wafer dopant type and concentration? -Etch rates? -Mask materials? Thanks very much in advance for any feedback! Dr. Harald Gross (m/s 144270) Multi E-Beam Technology ETEC Systems, APPLIED MATERIALS Inc. 26460 Corporate Avenue Hayward, CA 94545 USA Phone: 510-780-3744 Fax: 510-786-9438 URL: http://www.etec.com URL: http://www.appliedmaterials.com From cheng1 at stanford.edu Fri Dec 1 12:35:34 2000 From: cheng1 at stanford.edu (Ching-Hsiang Cheng) Date: Fri, 1 Dec 2000 12:35:34 -0800 (PST) Subject: Outsources Message-ID: Dear lab members, I have received many informations from our lab members. Thanks for their inputs. Here are all I got. ----------------------------------------------------------------------------- A GREAT place to get ion implants done locally is Core Systems (ask for Chuck). They are in Santa Clara at (408) 919-1949 They do great work, and can implant almost anything (not radioisotopes). They can implant at ion energies below 1 keV and above several 100 keV. I've used them a lot, and have had every sample work exactly as designed. Hope that helps Betty Young ----------------------------------------------------------------------------- I just sent out wafers to process specialties for 0.5 um of LTO ($650/lot). Their web site is procosspecialties.com Randy True ----------------------------------------------------------------------------- Tom Carver (carver at ee) in the Ginzton Microfab has evaporation and sputtering facilities and can do some of the depositions for you. Krishnan Parameswaran ----------------------------------------------------------------------------- Have you looked at the MEMS exchange? http://www.mems-exchange.org/ Stanford is a member and so is Berkeley. Several labmembers here have used Berkeley through the MEMS exchange. Mary Tang ----------------------------------------------------------------------------- Try the MEMS-Exchange... its a "virtual" fab that utilizes many different fab facilities (university and commercial), maybe they can help: www.mems-exchange.org Carolyn Tull ----------------------------------------------------------------------------- Actually, they have process staff who handle the MEMS exchange material. Only standard processes, as they appear on the website, are available. Cornell and MIT are also members. I am not sure what the turnaround time is, but I've sent stuff that's been processed through an LPCVD furnace at Berkeley in just a couple of days (the film was good, but the wafers got slightly warped, so perhaps it wasn't all that useful...) Mary Tang ----------------------------------------------------------------------------- Nu Ions in San Jose will do an implant for $125/25 wafers. Turn around is a day or two. Very reliable. Also: I use ASAP delivery service to send them there. It's $30 one-way, 2 hr delivery. If time is more valuable than money, this is the way to go (not to mention not having the stress of driving on 101!). Dan Grupp ----------------------------------------------------------------------------- I buy wafers for very high resistivity (>1000 ohm-cm) from Silicon Quest International Inc. http://www.siliconquest.com/ There is a very good wafer polishing service with quick turnaround time (around 4 days) and resonable prices ($150.00/lot, 1 lot = 4 wafers) in San Jose http://www.aptekindustries.com/ Ching-Hsiang Cheng From cheng1 at stanford.edu Fri Dec 1 14:35:04 2000 From: cheng1 at stanford.edu (Ching-Hsiang Cheng) Date: Fri, 1 Dec 2000 14:35:04 -0800 (PST) Subject: In-situ doped polysilicon Message-ID: Dear lab members, Has anyone used the doped polysilicon in our lab? Do you know what is the status of the equipment? Ching-Hsiang From mcvittie at cis.Stanford.EDU Fri Dec 1 15:46:06 2000 From: mcvittie at cis.Stanford.EDU (Jim McVittie) Date: Fri, 1 Dec 2000 15:46:06 -0800 (PST) Subject: In-situ doped polysilicon In-Reply-To: Message-ID: Chinh-Hsiang, The old in-situ doped poly has been down for some time due to temperature controller problems. I am going to put some time into trouble shooting it over the next month however I would not expect it to be back up before Febuary. It is an old furnace and it is not supported anymore by Tylan. In the mean time, users have been using the Tystar1 for in-situ doped poly. The one downside of this tube is that it was set up for deposition for metal containing layer, such as Ti silicide. There have not been any metal containing layers put into the tube for a while. However, we are talking about doing some metal containing runs in January. If we do these runs, contamination tests and tube clean-up (if needed will be done following these runs. Jim -------------------------------------------------------------- James P. McVittie Senior Research Scientist Allen Center for Integrated Systems jmcvittie at stanford.edu Stanford University Tel: (650) 725-3640 Rm. 336, 330 Serra Mall Fax: (650) 723-4659 Stanford, CA 94305-4075 On Fri, 1 Dec 2000, Ching-Hsiang Cheng wrote: > Dear lab members, > > Has anyone used the doped polysilicon in our lab? Do you know what > is the status of the equipment? > > Ching-Hsiang > > From mcvittie at cis.Stanford.EDU Fri Dec 1 17:50:55 2000 From: mcvittie at cis.Stanford.EDU (Jim McVittie) Date: Fri, 1 Dec 2000 17:50:55 -0800 (PST) Subject: Qualifying Outside Sources for Processing In-Reply-To: Message-ID: Ching-Hsiang, To be consistent with the contamination control done in our lab, outside processing sources really need to be qualified before allowing wafers back into the lab. Most important are wafers going into the furaces with higher temperature processes being of most concern. So far the only qualification we have done for outside processing has been to look at a sputtered oxide deposited on campus and at a new thick PECVD oxide process done by a company. In both cases we did TXRF (about $100 per wfer at Charles Evans). In the case of the sputtered oxide, we found a large amount of metals including Fe, Mg and Cr. This was due to a previous dep done in the sputter tool. For the PECVD oxide, we found high Na contanination. This was probably due to poor handling and cleaning procedures. Although there are more sensitive methods than TXRF, from a cross contamination view TXRF ( about 2E10 per cm 2) is probably good enough. Deposition is not the only concern for concern for sources of contamination. For instant, an improperly setup ion implanter can lead to sputtered metal contamination. In addition, poorly cleaned wafers after polishing can be a problem. Overall contamination from established processing services is most likely not a big problem. I expect that many offer a contamination specification that we may be able to live with. I am most concern is with wafers coming from university labs and new industrial processes. The bottom line is that wafers with outside processing need approval to come back into lab. In he past, we have let ion implanted wafers into the lab without any speacial approval. Other than implanted wafers, I would like to see, TXRF results for wafers processed on the outside. An exception may be given for vendors who supply contamination specifications or do complete (CMOS) device fabrication. If there is a lot of concern about this issue, I am willing to have a meeting to discuss what we should be doing. Jim -------------------------------------------------------------- James P. McVittie Senior Research Scientist Allen Center for Integrated Systems jmcvittie at stanford.edu Stanford University Tel: (650) 725-3640 Rm. 336, 330 Serra Mall Fax: (650) 723-4659 Stanford, CA 94305-4075 From shott at snf.stanford.edu Mon Dec 4 11:52:00 2000 From: shott at snf.stanford.edu (John Shott) Date: Mon, 04 Dec 2000 11:52:00 -0800 Subject: Computer shutdown Tuesday 8-10 a.m. ... Message-ID: <3A2BF5E0.D06FE22B@snf.stanford.edu> SNF Lab members: As you are likely well aware, we have been experiencing some computer ups and downs over the past week or so. Sun will be out tomorrow morning (Tuesday) starting at 8 a.m. to change one of the processors and to do some extensive testing. Although this should not take the full time, we are plannng for a maximum shutdown period extending until 10 a.m. tomorrow morning. During the shutdown time, Coral will not be available. Also, those of you who access e-mail on snf will be unable to do so during that time. Thanks for your support ... we hope that these changes will result in improved avialability in the near future. John From shott at snf.stanford.edu Tue Dec 5 08:00:05 2000 From: shott at snf.stanford.edu (John Shott) Date: Tue, 05 Dec 2000 08:00:05 -0800 Subject: Coral shutdown ... equipment enabled Message-ID: <3A2D1105.A2A3B79A@snf.stanford.edu> SNF lab members: As requested, I have enabled all non-shutdown equipment in my name prior to the Coral outage ... I will send e-mail or make an annoucement once Coral is back up and ask that you each re-enable (well, I think you have to disable me and then enable in your own name ....) once we are back on the air. Then, 30-60 minutes after that announcement, I will plan to disable everything still enabled in my name. Thanks for your support ... and happy processing, John From shott at snf.stanford.edu Tue Dec 5 10:15:05 2000 From: shott at snf.stanford.edu (John Shott) Date: Tue, 05 Dec 2000 10:15:05 -0800 Subject: Coral Up ... Message-ID: <3A2D30A9.5CB69A65@snf.stanford.edu> SNF Lab Members: Coral is back up! Please enable any equipment in use in your name ... I will disable anything still enabled in my name at 11 a.m. Thanks for your continued support, John From PIndermu at zyomyx.com Tue Dec 5 12:02:42 2000 From: PIndermu at zyomyx.com (Pierre-F. Indermuhle) Date: Tue, 05 Dec 2000 12:02:42 -0800 Subject: Carts for spin-dryers References: <3A1C3C72.BCDD057C@snf.stanford.edu> Message-ID: <3A2D49E2.408E1AD4@zyomyx.com> Does anybody know about a local provider for spin-dryers (Semitool) carts? We would greatly appreciate any help!! Thanks Pierre -- _____________________________________________________ Pierre-F. Indermuhle Research Scientist Zyomyx Inc. 3911 Trust Way Hayward, CA. 94545 Phone: (510) 266-7509 Fax (510) 786-3832 http://www.zyomyx.com From Chan at RDL.com Thu Dec 7 10:24:32 2000 From: Chan at RDL.com (James Chan) Date: Thu, 7 Dec 2000 10:24:32 -0800 Subject: CMP machine Message-ID: <44661D3A708AD411B74D00A0C9D7EAE508476A@HERMES> Does anyone know CMP work on 4" Silicon wafer with accuracy and uniformity better than .1 um ? Thanks James Chan From jonkurz at stanford.edu Thu Dec 7 14:58:59 2000 From: jonkurz at stanford.edu (Jonathan Kurz) Date: Thu, 7 Dec 2000 14:58:59 -0800 (PST) Subject: Shipley AR coatings In-Reply-To: <44661D3A708AD411B74D00A0C9D7EAE508476A@HERMES> Message-ID: Hello, Has anyone ever used Shipley's AR (DUV Anti-Reflectant Layer) coatings or similar products? Thanks, Jonathan 5-2284 From yoshie at cis.Stanford.EDU Fri Dec 8 14:05:20 2000 From: yoshie at cis.Stanford.EDU (Keizaburo Yoshie) Date: Fri, 8 Dec 2000 14:05:20 -0800 Subject: Announcement of technical seminar from Fujitu Message-ID: <003e01c06162$f4f107a0$d76440ab@stanford.edu> Date&time:Dec.14th (Thursday) 16:30-17:30 Place: CIS 101 Title: "A 0.11?m CMOS Technology with Copper and Very-low-k Interconnects for High-Performance System-On-a Chip" Presenter: Mr. Yoshihiro Takao ( Fujitsu limited , Japan) Mr Yoshihiro Takao from Fujitu Japan will present Fujitsu's latest CMOS technology with Cu/VLK interconnects. He will present this topics at iedm conference at San Francisco,too. However he will give us more details , especally for fabrication process of Cu/Low interconnect and some other Key Processes on their technology at this seminar as follows, 16:30 to 17:10 (40 min presentation ) 17:10 to 17:30 ( Q&A ) Mr Yoshihiko Takao has worked for CMOS technology at least for 8 years as leader of integration team in Fujitsu. He accomplished CMOS technology for 0.18um generation ( this technology has been used for fujitsu's production. In this technology , Cu (6 layers ) with FSG is used for interconnects. ) . After accomplishing of 0.18um generation, He has started for the development of 0.11um to 0.13um generation with his team. In the generation, 8 layers metallization with Low-K material ( SOG type) are used in order to improved perfomance. If you are interested in this seminar, Please come and join it. Keizaburo Yoshie ( Visiting Scholar from Fujitsu ) -------------- next part -------------- An HTML attachment was scrubbed... URL: From jlngau at plumb.Stanford.EDU Fri Dec 8 16:35:07 2000 From: jlngau at plumb.Stanford.EDU (Julie Ngau) Date: Fri, 8 Dec 2000 16:35:07 -0800 (PST) Subject: <110> Si wafers Message-ID: Hello, Does anyone have a few (<5) <110> Si wafers that you would be willing to sell to me? I have found a few wafer brokers who have <110> wafers but they are only sold in cassettes of 25 wafers. Thank you, Julie Ngau x5-0419 From ug-s at rpl.stanford.edu Mon Dec 11 14:16:22 2000 From: ug-s at rpl.stanford.edu (Yuji Saito) Date: Mon, 11 Dec 2000 14:16:22 -0800 Subject: Need info about a Excimer Laser shop Message-ID: <4.3.2-J.20001208171912.00c5a518@smtp.stanford.edu> Hello, Does anyone know a process company which has Excimer Laser equipment around Bay Area? I want to make tiny grooves on polyimide membrane. Thanks, -Yuji _/_/_/_/_/_/_/_/_/_/_/_/_/_/_/_/_/_/_/_/_/_/_/_/_/ _/ Yuji SAITOH _/ e-mail: ug-s at rpl.stanford.edu _/ Phone: (650)736-0275 Fax:(650)723-5034 _/ Pager: (650)205-3744? _/_/_/_/_/_/_/_/_/_/_/_/_/_/_/_/_/_/_/_/_/_/_/_/_/ From jonkurz at stanford.edu Mon Dec 11 16:02:06 2000 From: jonkurz at stanford.edu (Jonathan Kurz) Date: Mon, 11 Dec 2000 16:02:06 -0800 (PST) Subject: 3" silicon wafer In-Reply-To: <4.3.2-J.20001208171912.00c5a518@smtp.stanford.edu> Message-ID: Hello, Does anyone have an extra 3" silicon wafer? Jonathan 5-2284 From king at snf.stanford.edu Tue Dec 12 16:37:16 2000 From: king at snf.stanford.edu (Robin King) Date: Tue, 12 Dec 2000 16:37:16 -0800 (PST) Subject: LAB CLEANUP DEC 21-- PLEASE READ Message-ID: Dear Lab Users, ACTION ITEM! Before the lab shutdown please take a moment to remove wafers and other items which are no longer in use. Wafers which need to be kept in the cleanroom should be marked with your name and date, as usual. I will be cleaning up my areas*** on Thursday, Dec 21. Non-current or unlabeled items will be removed from the machines, tables, and shelves, and taken to the basement per standard lab cleanup procedure (I won't be going through anyone's large storage bins, of course). You'll be free to retrieve items from the basement but we cannot be responsible for loss or damage. By the way, there will be a lot of work going on overhead in the cleanroom during the shutdown so you're well advised to put critical items in plastic bags to protect them from dust. Best wishes, Robin King ***My areas include the RTAs, Gryphon, Balzers, Innotec, Metallica, ASM epi reactor, STS PECVD, GaAs furnace/PECVD aisle, GaAs solvent bench, ellipsometers, measurement room, Dektak area, ion implantation (temporary) and general purpose wetbench (temporary). Other staff may have different cleanup schedules for their areas. From mahnaz at snf.stanford.edu Wed Dec 13 09:27:53 2000 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Wed, 13 Dec 2000 09:27:53 -0800 Subject: Lab Clean up Message-ID: <3A37B199.F5C04569@snf.stanford.edu> Hello all, Starting Thursday 12/114 there will be a blue bin in the gowning room. We need you to put your hanger (only) in the bin and your garment in the dirty bin on the last day in the lab which should be on the Thursday 12/21 afternoon or which ever day is your last day ( could be earlier for some people). This will give us the opportunity to clean up the rack from extra hangers and get rid of the hangers that the owners have long gone. It is important to do this on your last day before the holiday so Rafeal has enough time to send the garment out and we will get them back on January 2nd. I also like to encourage you to please remove wafers and boxes which are not in use and mark the ones you are planing to keep with the new date. I am strongly suggesting the clean up of the area behind the singe oven. This will be the first area I will clean up if I do not see any improvement. I will do the major clean up on January 2nd when we are back from holiday so your items better be up dated by then. Warning: there will be some work done in the clean room, people who do devices should bag their wafer boxes for extra protection. Plastic bags are available at solvent bench, where hot plates are and by the Head way manual spinner. I am open to suggestion and new ideas as usual. I wish every one a nice holiday and hope all your wishes come true. mahnaz -------------- next part -------------- An HTML attachment was scrubbed... URL: From sylviajs at stanford.edu Wed Dec 13 11:20:47 2000 From: sylviajs at stanford.edu (S. J. Smullin) Date: Wed, 13 Dec 2000 11:20:47 -0800 (PST) Subject: rack for electroplating wafers Message-ID: Hi all. I am going to be electroplating some 4" wafers. I was told that people usually have a rack that they use to provide electrical contact between the wafer and the plating current source. Does anyone know more about the design of such a thing or have something useful on hand? Sylvia KGB Group Physics Dept x5-2264 From shott at snf.stanford.edu Thu Dec 14 12:34:15 2000 From: shott at snf.stanford.edu (John Shott) Date: Thu, 14 Dec 2000 12:34:15 -0800 Subject: Remote Coral is now available! Message-ID: <3A392EC7.226F34DD@snf.stanford.edu> SNF Lab Members: Your Coral development team is pleased to announce the release of our first version of Remote Coral. We believe this will provide fully functional Coral access from areas outside the lab including: desktop machines on campus, machines at your home institution/organization for non-Stanford lab members, from your home, or from your laptop. Moreover, we believe that this will run on a wide variety of platforms including Windows (95/98/NT/2000), Solaris (SPARC and x86), and Linux (RedHat 6.1 or higher). At this point it is not yet clear that this will run on Macintosh platforms as they appear to be lagging in their support of Java ... but that may change. Deployment of the remote version of Coral relies on the 1.0 Beta Release Candidate of a product from Sun Microsystems called Java Web Start. Java will allow you to download and run an application from our web site (in fact, on Windows machines it will optionally place a shortcut to Remote Coral on your desktop and a Remote Coral entry on your start menu). Java Web Start will also make sure that you have an appropriate Java Runtime Environment (JRE). Finally, when there is an new version of Remote Coral, Java Web Start will download it automatically for you. How to download and run Remote Coral: Follow these three easy (we hope) steps ... 1. The first thing that you have to do is run the on-site version of Coral, pull down the "Window" menu and select "Remote Password". This will give you the opportunity to set (or change) the password that you will use for remote access. A window will pop up that asks you to type in (and confirm) the password that you intend to use for your remote coral password. You may choose to use the same password that you use for on-site Coral ... or you may choose to use a different password. Remote Coral will not work, however, unless you have first set a Remote Password! Why do we make you set your remote password for Coral using the on-site system? 1. This will help to insure that only legitimate SNF users can run Coral remotely. 2. Remote Coral uses a different form of password encryption than the standard Unix/Solaris password encryption that you use when you log into on-site Coral ... there is no way to "copy" your on-site password so that Remote Coral can use it as well. 2. Go to the SNF web site (http://snf.stanford.edu), click on the "Labmembers" link on the left of the page, and then click on the "Remote Coral Access" link found on that page. This will take you to the page where you will ultimately download and launch Coral Remote. However, you first need to click the link that says: "Download Java Web Start". This will take you to a Sun page where you will be able to ... well, download Java Web Start. If you will be downloading to a Windows machine, life should be easy: downloading Java Webstart also downloads and installs the appropriate JRE at the same time. If you are downloading for Solaris or Linux, you will have to download an appropriate JRE (at least version 1.2.2 ...) first, install that, and then download the appropriate platform-specific version of Java Web Start. The instructions for doing any and all of these things are available on this page. Note: If you are downloading Java Web Start and the JRE (the package that you get included with the Widnows download of Java Web Start) the total download is about 6 MB of data which will take on the order of 20 minutes of download time should you be using a 56 kb modem. 3. Once you have installed Java Web Start, go back to the SNF web site and click on the Remote Coral Access page listed above. You should see a link that says "Launch Remote Coral". (Note: there will also be a link that says Launch Development Version of Remote Coral ... don't click this link, it is virtually guaranteed to fail.) If you only see a link that says something like: "You have to install Java Web Start first", this is an indication that Java Web Start is not properly installed on your machine and that will need to be addressed. Clicking "Launch Remote Coral" should begin to download the Remote Coral application onto your machine. It will then pop up a window asking if you wish to launch Remote Coral at that time ... if you do, click "Launch". The next thing that you should see is a window asking for your username and password. These should be your Coral login name and your REMOTE password, respectively. If you type these in successfully, Coral should start shortly. Once installed on your machine, you won't have to go to our Website to launch Remote Coral. In particualar, you can start Java Webstart, click the Remote Coral icon and then click "Launch". Alternatively, on Windows machines, the second time that you launch Remote Coral, it will ask you if you would like a desktop shortcut and/or Start Menu item added for Remote Coral. (Note: if you are connected via a 56 kb modem, download of Remote Coral either the first time or if there has been an update may take up to 2 minutes. Once it is downloaded, it should only take a few seconds to start up. Higher bandwidth network connections will, of course, experience proportionally shorter download times.) Best of luck ... we hope that downloading and launching Remote Coral goes smoothly for you. If you have comments or suggestions related to Remote Coral, please send them to coral at snf.stanford.edu. While we are certainly hopeful that most of you will find the downloading and launching of Remote Coral a painless process, there are so many different platforms, OS versions, network configurations, etc. that we fear that some of you will encounter difficulties. We will do our best to help you to resolve these problems ... but we stop short of doing major debugging or system configuration on your machine. Thanks for your continued support, The Coral Development Team p.s. Please don't leave Remote Coral running for extended periods of time when not in use. Everyone (including on-site users) should get in the habit of cleanly terminating Coral by clicking "Exit" on the "Window" pulldown menu when they are done with their Coral session. Why? Each time ANYONE makes a reservation, deletes a reservation, enables equipment, shutsdown equipment, etc. an appropriate event is posted that must be communicated to each and every Coral client that is running at that time. In other words, when you reserve karlsuss, for example, from 8 a.m. to 10 a.m. on Tuesday not only is this recorded in the database, but all running clients are explicitly notified of that fact by the reservation server ... well, in truth, there is something called the event server that handles this communication. In fact, even if you are the person who made the reservation, you are treated no differently than anyone else ... your confirmation of that reservation (when you name shows up in the time block) is coming from the event server. If there are a bunch of idle versions of Remote Coral ... everyone's response time will go down. Also (and this is true in the lab as well) please try to get in the habit of using the proper Exit pulldown menu item .... that way, the computer won't waste resources trying to notify Coral clients that are no longer there. One other note: even though you originally went to a Web page to download Remote Coral ... this is not a Java Applet and doesn't have to be run from the web page. In fact, you have downloaded a fully-functional client application onto your machine. As a result, we believe that you will find that screen re-painting, for example, will happen quite quickly. Moreover, since the communciation between each client and our server is rather terse and limited, we believe that you will find that the response of Remote Coral is adequate even over a 56 kb modem connection. One final note: while we have done our best to test the functionality of Remote Coral before releasing it, there may be some bugs and/or improvements to the code over the coming few weeks. Each time there is a new version of the client software, Java Web Start will download this for you. However, particularly if you are using a low-bandwidth network connection, this will increase the startup time of Remote Coral. We apologize in advance for any inconvenience this may cause ... but felt that it was important to get Remote Coral in broad use as quickly as possible. Good luck with Remote Coral ... comments, feedback, and suggestions should be sent to coral at snf.stanford.edu SNF Coral Development Team From shott at snf.stanford.edu Fri Dec 15 16:13:37 2000 From: shott at snf.stanford.edu (John Shott) Date: Fri, 15 Dec 2000 16:13:37 -0800 Subject: Remote Coral Update .... Message-ID: <3A3AB3B1.91138F99@snf.stanford.edu> SNF Lab Members: I know that a handful of you have been having problems getting access to remote Coral. Here are a few added notes: 1. Since the time that I sent out the message, Sun has released the official "production" version of Java Web Start. For those of you who tried to download the "Release Candidate" and got the "You must be a member of Java Developer Connection" message ... this should no longer be the case. However, if you did get the Release Candidate version downloaded, you should go back and download the "production" release. The Release Candidate will not work now! 2. When the application fires up, it will (before you see anything related to Coral) it will tell you that this application has asked for privileges on your machine ... and then probably warns that giving these privileges to this application is a bad idea. Here you have a choice: If you want to run Remote Coral, we need to have Java Web Start be able to write a log file on your disk ... otherwise we have no means of recording what goes wrong with a session. So, if you want to run Remote Coral, you have to trust the Remote Coral application to write its log file. 3. There have been some problems related to setting and changing passwords ... we are getting those shaken down, but it may take us a day or so, so please bear with us. Thanks for your cooperation, The Coral Development Team ... From rcrane at snf.stanford.edu Tue Dec 19 16:15:08 2000 From: rcrane at snf.stanford.edu (Dick Crane) Date: Tue, 19 Dec 2000 16:15:08 -0800 Subject: Christmas Shutdown 12/22 Message-ID: <3A3FFA0C.51D4A5A2@snf.stanford.edu> Just a reminder, The Stanford Nanofabrication Facility will be shutting down during the Christmas break on Friday, December 22 at 6:00 AM. After this time the fab will not be available for processing. Much needed machine and physical plant maintenance will occur during the shut down. The facility will reopen at 12:00 noon on Tuesday, January 2, 2001. Please note: not all equipment will be operational immediately upon turn on. The staff at SNF wishes you a happy holiday. From rcrane at snf.stanford.edu Thu Dec 28 10:38:01 2000 From: rcrane at snf.stanford.edu (Dick Crane) Date: Thu, 28 Dec 2000 10:38:01 -0800 Subject: All Spin Dryers Are Dedicated To Specific Wet Benches Message-ID: <3A4B8889.268A7D26@snf.stanford.edu> Lab Members, Apparently there is some confusion among same users about the use of the Spin Rinser/Dryers (SRD) in the lab. SRDs are only to be used with wafers/cassettes coming out of the dump rinsers from the adjacent wet bench. In Litho, the two SRDs are considered gold contaminated. Users should use Teflon cassettes that belong to Litho area only in litho rinse and dryer. These cassettes are marked with a brown dot and can not go to another area. You can only use a different SRD from one adjacent to a wet bench when a staff member gives you permission such as when a SRD is down for repair. If there is no SRD next to a bench, see a staff member who will assist you in identifying the proper SRD. Jim McVittie Dick Crane