In-situ doped polysilicon

Ching-Hsiang Cheng cheng1 at stanford.edu
Fri Dec 1 14:35:04 PST 2000


Dear lab members,

  Has anyone used the doped polysilicon in our lab?  Do you know what
is the status of the equipment?

Ching-Hsiang




More information about the labmembers mailing list