rack for electroplating wafers

S. J. Smullin sylviajs at stanford.edu
Wed Dec 13 11:20:47 PST 2000


Hi all. 

I am going to be electroplating some 4" wafers. I was told that
people usually have a rack that they use to provide electrical contact
between the wafer and the plating current source. Does anyone know more
about the design of such a thing or have something useful on hand?

Sylvia

KGB Group
Physics Dept
x5-2264






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