From sylviajs at stanford.edu Wed Nov 1 13:39:06 2000 From: sylviajs at stanford.edu (S. J. Smullin) Date: Wed, 1 Nov 2000 13:39:06 -0800 (PST) Subject: dry film photoresist (Riston?) Message-ID: hi. Does anyone have experience using Riston (a dry film photoresist from Dupont) or something similar? In particular, do you know the whereabouts of a laminator and do you have tips on how to develop the resist? Thanks! Sylvia Smullin From mcvittie at cis.Stanford.EDU Wed Nov 1 14:36:42 2000 From: mcvittie at cis.Stanford.EDU (Jim McVittie) Date: Wed, 1 Nov 2000 14:36:42 -0800 (PST) Subject: How Much HF is in 50:1? Message-ID: Lab Members, Since my note went out concerning users confusing 49% HF with H2O2, I got a number of replies saying that the bigger problem is users filling the 50:1 HF tanks with 49% HF. Apparently, there is some confusion about what 50:1 HF means. It means 50 parts DI water to 1 part 49% HF. This means that 50:1 is about 1 % HF. Dipping one's wafers in 49% HF instead of 1% HF makes a very big difference in device fabrication. Most devices would be dead after such a mistake. Please be very careful and read all labels before filling hot pots and acid tanks. Thanks, Jim -------------------------------------------------------------- James P. McVittie Senior Research Scientist Allen Center for Integrated Systems jmcvittie at stanford.edu Stanford University Tel: (650) 725-3640 Rm. 336, 330 Serra Mall Fax: (650) 723-4659 Stanford, CA 94305-4075 From grupp at snow.stanford.edu Sun Nov 5 23:22:53 2000 From: grupp at snow.stanford.edu (Dan Grupp) Date: Sun, 5 Nov 2000 23:22:53 -0800 (PST) Subject: Cell phone survey results Message-ID: Below is a listing of phones that work, and ones that don't. Best: Pacbell with Ericsson T28 World, VERY small, fits in pocket, good service plans. Worst: anything Sprint. Works Company Tech Model y n ----- ------- ---- ----- x Sprint PCS SAmsung SCH-2000 x " " " " -3500 x CellOne TDMA Nokia 5160 NOTE: marginal x " TDMA (800 or 1900) " 6160 x " CMDA LG-SP110 x PacBell GSM Mitsubishi G-100 x " GSM1900 Ericsson CF788 (may no longer be available) x " " Ericsson T28 World x " " Nokia 5190 x MCI TDMA " 5120i x " CDMA LG-SP110 (great tiny phone, NO signal). --------------------------------------------------------------------------- Dr. Daniel Grupp, Visiting Scholar Center for Integrated Systems Stanford University Stanford, CA 94305 (650) 724-6911 FAX: 723-4659 --------------------------------------------------------------------------- From rcrane at snf.stanford.edu Mon Nov 6 15:09:53 2000 From: rcrane at snf.stanford.edu (Dick Crane) Date: Mon, 06 Nov 2000 15:09:53 -0800 Subject: Chem Mix Error Message-ID: <3A073A41.8472A21C@snf.stanford.edu> WBdiff WBnonmetal It has come to my attention that there is a strong possibility that 49% HF was accidentally substituted for 50:1 HF in the WBdiff 50:1 HF pot sometime around 10/16/00. There is a lessor possibility that the error occurred at the WBnonmetal H2SO4/H2O2 hot pots with 49% HF being accidentally substituted for H2O2 sometime around 10/15/00 to 10/16/00. If you have experienced an unusual loss of SiO2 during your processing in these two benches please e-mail me. We are a community of members/users and it is up to all of us to read the bottle labels before dispensing chemicals. This is both a safety concern and a process concern. Be careful, be healthy and process well. Dick Crane From king at snf.stanford.edu Tue Nov 7 10:15:47 2000 From: king at snf.stanford.edu (Robin King) Date: Tue, 7 Nov 2000 10:15:47 -0800 (PST) Subject: GaAs wetbench training Message-ID: I can train two more people on the GaAs acid wetbench at 3pm Wednesday, Nov 8. Please respond if you're interested in that or the general purpose acid wetbench. We will meet at the GaAs wetbench but before then, please carefully read the information about chemical use which is posted on the side of Wetbench General. Sharleen Beckwith wrote a very good summary which all lab users should know before working in this lab. Robin King 5-3660 From sjlee at snf.stanford.edu Tue Nov 7 10:28:12 2000 From: sjlee at snf.stanford.edu (sjlee at snf.stanford.edu) Date: 7 Nov 2000 10:28:12 -0800 Subject: guest speaker - plasma etching application to fuel cells Message-ID: <20001107182812.20417.cpmta@c004.sfo.cp.net> An embedded and charset-unspecified text was scrubbed... Name: not available URL: From donoghue at cis.Stanford.EDU Tue Nov 7 13:48:05 2000 From: donoghue at cis.Stanford.EDU (Mary Donoghue) Date: Tue, 07 Nov 2000 13:48:05 -0800 Subject: Locker Cleanup November 29 Message-ID: <4.2.0.58.20001107134231.00b7fbc0@cis.stanford.edu> Please let me know by Monday, 11/2700 if you want to keep your SNF lab locker. We are trying to free up locker space for our lab users. If I don't hear from you by 11/27, your locker will be cleaned out and we will dispose of its contents. Thanks for your help. --Mary ******************************************* Mary Donoghue Stanford Nanofabrication Facility CIS 043 420 Via Palou Mall Stanford University Stanford, CA 94305-4070 Phone: (650) 725-3664 Fax: (650) 725-6278 From mbell at snf.stanford.edu Wed Nov 8 17:17:31 2000 From: mbell at snf.stanford.edu (Mike Bell) Date: Wed, 08 Nov 2000 17:17:31 -0800 Subject: Scheduled Coral Downtime, Disk Utilization Message-ID: <3A09FB2B.4952388A@snf.stanford.edu> The Coral system will be down from 8 AM to 9 AM tomorrow, November 9th, for testing of remote access. Please enable the equipment you need prior to this. It is critical that lab members store only essential SNF related files on the server. Disk space is limited and use is monitored on a per member basis. All "recreational" and "non-SNF" files should be removed as soon as possible. Thank you for your prompt attention to this. SNF Staff From cmpark7 at stanford.edu Thu Nov 9 09:51:50 2000 From: cmpark7 at stanford.edu (Changman Park) Date: Fri, 10 Nov 2000 02:51:50 +0900 Subject: Shadow mask making Message-ID: <010501c04a75$bde1e120$8e6a40ab@stanford.edu> Hi all I want to make a shadow mask(metal or Si) for electrodes. It'll be a great help to me if someone tell me where I can get the information. Thanks! From ; Chang-Man Park Research Associate Dept.of Materials Science & Engineering McCullough Building, Room 205, 476 Lomita Mall, Stanford University, Stanford, CA 94305-4045 650-724-4581(Office), 650-725-4034(Fax) cmpark7 at stanford.edu cmpark7 at hotmail.com From millera at stanford.edu Thu Nov 9 13:48:42 2000 From: millera at stanford.edu (Aaron Miller) Date: Thu, 09 Nov 2000 13:48:42 -0800 Subject: Source for low-stress Silicon Nitride on Si? Message-ID: <3A0B1BBA.89F1699@stanford.edu> Hello everyone, I heard a rumor that someone at Stanford is supplying silicon wafers with low-stress nitride already deposited on them (low enough stress to allow back-etching the Si to make membranes--MEMS stuff). Does anyone know if such a source exists? If not, do you know of a good source in the area? Thanks for any assistance. -Aaron Miller amiller at snf millera at stanford ------------------------------------------------------------------------------- Aaron J. Miller Email: millera at stanford.edu Physics Grad Student Web : http://www.stanford.edu/~millera Stanford University Lab : (650) 725-2332 Office: 723-4307 ------------------------------------------------------------------------------- From amol at stanford.edu Fri Nov 10 09:41:22 2000 From: amol at stanford.edu (Amol Ramesh Joshi) Date: Fri, 10 Nov 2000 09:41:22 -0800 (PST) Subject: Possible contamination of wbdiff and wbnonmetal Message-ID: Hi, Today I found a user doing nonstandard 'cleaning' on wbdiff and wbnonmtal. He was etching oxide in 20:1 BOE and 6:1 BOE on wbnonmetal and H2SO4 dip and HCl dip on wbdiff. He was holding just one wafer with teflon tipped METAL tweezers, no cassette! As most users know, teflon on green tipped tweezers tends to wear out after some use. So there is a very high chance that metal may have entered the pots I mentioned above. I do not need to mention safety issue, no matter how careful one is. I have shutdown wbdiff and wbnonmetal. - Amol From rcrane at snf.stanford.edu Mon Nov 13 17:42:05 2000 From: rcrane at snf.stanford.edu (Dick Crane) Date: Mon, 13 Nov 2000 17:42:05 -0800 Subject: Christmas shutdown 12/22 Message-ID: <3A10986D.48B45EAC@snf.stanford.edu> The Stanford Nanofabrication Facility will be shutting down during the Christmas break on Friday, December 22 at 6:00 AM. After this time the fab will not be available for processing. Much needed machine and physical plant maintenance will occur during the shut down. The facility will reopen at 12:00 noon on Tuesday, January 2, 2001. Please note: not all equipment will be operational immediately upon turn on. The staff at SNF wishes you a happy holiday. From wong at ee.stanford.edu Wed Nov 15 12:23:06 2000 From: wong at ee.stanford.edu (Simon Wong) Date: Wed, 15 Nov 2000 12:23:06 -0800 Subject: opportunity at LSI Logic Message-ID: <4.2.0.58.20001115122137.00ae2270@holst.stanford.edu> A non-text attachment was scrubbed... Name: Job_ECP Plating.doc Type: application/msword Size: 24576 bytes Desc: not available URL: From mtang at snf.stanford.edu Fri Nov 17 15:22:12 2000 From: mtang at snf.stanford.edu (Mary Tang) Date: Fri, 17 Nov 2000 15:22:12 -0800 Subject: New SNF Website Message-ID: <3A15BDA4.CC4ABCFE@snf.stanford.edu> Greetings everyone! The SNF website has a new look, and is now located at: http://snf.stanford.edu It has most all the important information from the old website, but with a few new features, including: 1. Updated forms and procedures for labmembership. 2. Updated & revised Materials policies. 3. Job postings (under "News"). 4. NSF/NNUN Evaluation/Feedback forms (perhaps not a "feature" per se -- NSF requires labmember statistics and we'll periodically ask for this info.) Remote Coral access is imminent and we hope to continue to update equipment and process links to make this a flexible and useful website for the SNF community. Any comments, questions, and suggestions will be greatly appreciated -- please direct them to webmaster at snf.stanford.edu Mary -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu From rcrane at snf.stanford.edu Fri Nov 17 17:52:22 2000 From: rcrane at snf.stanford.edu (Dick Crane) Date: Fri, 17 Nov 2000 17:52:22 -0800 Subject: Poor Choices Message-ID: <3A15E0D6.7198F9FC@snf.stanford.edu> Community of Users There was an incident last week which caused a major piece of equipment to be shutdown for most of this week. A metal source was incorrectly placed in an e-gun hearth pocket. The source jammed under the hearth cover. In an attempt to rescue the source, the user inappropriately loosed the hearth cover mounting screws causing the gun cooling water to flood the vacuum chamber. The tool required many hours of disassembly, cleaning, drying, and assembly work to make it operational again. Putting the source into the wrong pocket was simply a mistake. Attempting to repair the equipment by one's self (remove the gun cover) caused the major problem. Please, users are not authorized to attempt repairs on their own unless authorized by staff. If a procedure was not covered by training, do not attempt to do it. Anyone violating this rule may lose their lab privileges for an appropriate period of time. We are all members of our fab community. Your action can affect other users. Let's keep working together. I would like to thank Chris Storment for helping to get this tool operational again. Have a nice weekend, Dick Crane Technical Director SNF From shott at snf.stanford.edu Sat Nov 18 08:25:12 2000 From: shott at snf.stanford.edu (John Shott) Date: Sat, 18 Nov 2000 08:25:12 -0800 Subject: New SNF web site .... Message-ID: <3A16AD68.4A044FA2@snf.stanford.edu> SNF Lab Members: First of all, I'd like to publically thank Mary Tang for all of her efforts in updating the new SNF web site at snf.stanford.edu. In addition to the fact that it, in my opinion, simply looks better, she has worked long and hard to update much of the information that is contained there. We and everyone accessing this site will benefit from those changes. One other feature has been added that will, I believe, improve equipment-related communication greatly. Specifically, on the "Equipment" page, there is now a link to all of the e-mail archives including the labmembers mailing list as well as 2 lists for each piece of equipment. For the equipment-specific list, there is an archive of any discussion of technical matters related to that piece of equipment. Secondly, there is the archive of the Problems/Comments/Shutdowns for each piece of equipment. I am hopeful that each of these new archives will be of broad use to the SNF community by allowing: 1. More detailed reporting of problems/shutdowns including observed behavior. 2. More detailed reporting of what was done to repair a problem ... both for the general edification of the SNF community and so that, over time, this archive can become a useful resource when we know that we've seen an equipment problem before but can't remember what was done to fix it. Additionally, this will become an important resource when we have new staff coming on line or when someone inherits a new piece of equipment. 3. A repository of useful "How To" and related information for each piece of equipment. To get this ball rolling, I'd like to ask lab members and staff members alike to begin to populate this set of archives with more illuminating messages than "Down" and "Fixed" ... I know that the previous inability to readily view these things cause folks to say everything they had to say on the subject line. However, we can now do better. I know that people will want searchability of these archives as well ... and that is on the list of things to be added ... but, for now, please realize that we now have archives of all mailing lists and use them accordingly. Oh yes, related to the equipment discussion lists: I'm hopeful that these will also become a richer source of updated process and equipment information. So, if you've just completed characterizing a new etch recipe, for example, please share that information with the rest of the interested community by sending the details to machine_name at snf.stanford.edu. Thank you for your continued support, John From ranji at stanford.edu Mon Nov 20 11:29:42 2000 From: ranji at stanford.edu (Ranjana Saha) Date: Mon, 20 Nov 2000 11:29:42 -0800 (PST) Subject: ASME Symposium on Cu interconnects & low k dielectrics June 27-29 2001 (fwd) Message-ID: A non-text attachment was scrubbed... Name: not available Type: text/enriched Size: 1375 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Call_for_papers.pdf Type: application/pdf Size: 14891 bytes Desc: URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: ConferenceFlyer.doc_1.doc Type: application/msword Size: 341504 bytes Desc: URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: text/enriched Size: 295 bytes Desc: URL: From shott at snf.stanford.edu Wed Nov 22 10:54:16 2000 From: shott at snf.stanford.edu (John Shott) Date: Wed, 22 Nov 2000 10:54:16 -0800 Subject: Coral hardware problems ... Message-ID: <3A1C1658.25B047B1@snf.stanford.edu> Lab members: As you know ... Coral has been up and down this morning. Sun is coming out for a board replacement and will be here near noon. We will give you a verbal warning so that you can enable anny equipment needed ... and then coral will be down for a hardware change for about 45 minutes. Thanks for your support, John From shott at snf.stanford.edu Wed Nov 22 13:36:50 2000 From: shott at snf.stanford.edu (John Shott) Date: Wed, 22 Nov 2000 13:36:50 -0800 Subject: Coral status this afternoon .... Message-ID: <3A1C3C72.BCDD057C@snf.stanford.edu> SNF Lab Members: Sun came in and resolved a hardware problem on Sunray during the noon hour. We are also in the process of testing some of the elements of the remote access system ... which requires the installation of a new version of Java. This afternoon, we will be occasionally re-starting the Coral servers with the new version of Java to see how it performs under load ... earlier today, the servers would start and operate for a while, but would then appear to die without leaving much evidence. At this point, we don't know whether that was related to the hardware failure or to a Java problem. So, please bear with us ... If you notice that Coral is dead ... call me in my office x5-3715. We will make sure to leave the most stable version running over the long weekend. If, however, you experience problems this weekend you may call me at home at 650 365-8853. (While I may not be there, I am at least planning on being in town). Thanks for your patience ... John From shott at snf.stanford.edu Mon Nov 27 10:49:08 2000 From: shott at snf.stanford.edu (John Shott) Date: Mon, 27 Nov 2000 10:49:08 -0800 Subject: Additional Coral Testing Today ... Message-ID: <3A22ACA4.A59E4964@snf.stanford.edu> SNF Labmembers: We are going to be doing some additional testing of a new version of the Coral application as a part of getting remote Coral access to work. Part of this activity involves installation and use of a new version of Java. In order to test this, we need to install and run the new version or Coral, identify any problems, and then fix them. As a result, there may be periods during the day when Coral (or at least parts of it) appears to be broken. If you notice that Coral is dead or behaving erratically, please call us ... once we have some log files related to what has broken, we can quickly (~5-10 minutes) switch back to the old, stable version of Coral. Thanks for your support ... The Coral Development Team To report Coral outages call John Shott x5-3715 From alissa.fitzgerald at sensant.com Tue Nov 28 11:25:36 2000 From: alissa.fitzgerald at sensant.com (Alissa M. Fitzgerald) Date: Tue, 28 Nov 2000 11:25:36 -0800 Subject: Job Opening: Process Engineering Technician Message-ID: <006901c05971$06a0c570$83117bc6@Sensant12> We have an opening at Sensant Corp. (founded by Stanford grads) for Process Engineering Technician: Your primary task will be to assist in wafer fab process engineering of silicon based transducers. The job will involve hands-on silicon wafer processing, semiconductor equipment operation, wafer inspection, and device metrology in a clean room semiconductor fab. Growth in the position will include the ability to independently design various wafer processing experiments to optimize performance of Sensant devices and design new process flows for new Sensant prototypes. Based on initiative, the potential to get involved in all aspects of the Sensant's process engineering and/or manufacturing operations is likely. This job leads to the position of senior process engineering technician. Required Qualifications: - Semiconductor silicon wafer processing experience. - Hands on experience in operating silicon wafer fabrication equipment and working in a clean room environment. - Hands on expertise in using computers. - Good verbal and written communication skills. Compensation: Base salary + Stock options + Full health benefits About Sensant: Sensant Corporation designs and manufactures next-generation silicon micro-machined sensors used in bio-medical, industrial, and consumer markets. Sensant's vision is to enable electronic devices to interact intelligently with the physical world through Micro-Electro Mechanical Systems (MEMS). The company's first products, Silicon UltrasoundTM Transducers, are a family of microfabricated ultrasonic sensors. These sensors will soon be found in leading-edge medical devices, advanced medical imaging equipment, and flow measurement devices. Sensant owns a solid intellectual property portfolio and continues to work on promising new sensor applications. We seek motivated, bright people to grow with us and to help define how this emerging technology will impact our markets and our society in general. Sensant emphasizes a culture where individuals are encouraged to take initiative. A sense of humor and the ability to take oneself less seriously on occasion are also valued. For more information and to apply for this position, contact: Kirti Patel, VP Operations, Sensant Corp. 650 Saratoga Ave., San Jose, CA 95129 (408) 557-6861, FAX: (408) 557-6780 jobs at sensant.com http://www.sensant.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From cheng1 at stanford.edu Thu Nov 30 12:17:07 2000 From: cheng1 at stanford.edu (Ching-Hsiang Cheng) Date: Thu, 30 Nov 2000 12:17:07 -0800 (PST) Subject: Outsources Message-ID: Dear lab members, Since some of our equipments have been up and down frequently, some of you probably have some oursources for doing these processes. Could you please share these informations with me? Thanks :) Ching-Hsiang From cheng1 at stanford.edu Thu Nov 30 15:11:56 2000 From: cheng1 at stanford.edu (Ching-Hsiang Cheng) Date: Thu, 30 Nov 2000 15:11:56 -0800 (PST) Subject: Outsources Message-ID: Dear lab members, I have received replies from Betty, Randy, Farhat, and Carolyn regarding to the information about outsources. Thanks for their sharing. They have asked me about what do I need for the outsources. I will need thin film deposition (nitride, lto, polysilicon), and thin film etching (oxide, silicon). Actually, more inputs are welcome since I am going to collect them and send out the information to the mailing list so everybody will have a list of outsources available. Thank you for your inputs Ching-Hsiang