CMP needed

Chi On Chui chion at
Tue Sep 19 10:56:38 PDT 2000


I also need some information on where would people have the capability of
doing CMP aluminum on 4" wafer?

Thank you very much for your kind attention!

Chi On

> Can someone please tell me any academic or commercial resources for
> CMP (chemical mechanical polishing)?
> Thanks.  I appreciate your help.
> --chongwu

Chi On Chui
Research Assistant, Department of Electrical Engineering
Center for Integrated Systems 014, Stanford University
Stanford, CA 94305
Tel:  (650)725-3612(o), (650)703-1910(c)

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