Loss of House Process Vacuum

Dick Crane rcrane at snf.stanford.edu
Mon Apr 2 13:40:50 PDT 2001


The house process vacuum pump for CIS and CISX will be down for 30
minutes on Tuesday, April 4, from 0700 to 0730. A new vacuum pump is
being electrically connected. The loss of house process vacuum affects
vacuum wands throughout the fab, vacuum chucks in the coaters,
developers, and aligners in the photolith area. Other tools may be
affected.

Sorry for the inconvenience,

Dick Crane



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