Low stress PECVD nitride film.

venkat cvraman at aero.ufl.edu
Fri Apr 6 16:55:53 PDT 2001


I need to deposit a LOW STRESS (~50 - 70 MPa) PECVD nitride film of around 3300 A. The STS deposition tool in our lab is broken. If anyone knows of any outside source it would be greatly appreciated.

thanks
Venkat.
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