Low stress PECVD nitride film.

[venkat]

I need to deposit a LOW STRESS (~50 - 70 MPa) PECVD nitride film of around 3300 A. The STS deposition tool in our lab is broken. If anyone knows of any outside source it would be greatly appreciated.

thanks
Venkat.
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/labmembers/attachments/20010406/a89f8f3a/attachment.html>