Lithography over a 2 micron topography

venkat cvraman at aero.ufl.edu
Fri Apr 6 17:03:55 PDT 2001


I need to pattern 2 micron Aluminum lines (with 2 micron spacing) down a 2 micron recess.
One approach is to use SPR 220 after thinning it down a little using a solvent. If anyone has done this procedure before or has any ideas of pattering fine lines over a 2 micron topography, kindly let me know.

thanks,
Venkat.
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