thick oxide

[Erhan Yenilmez]

I want to have a very thick oxide (>2micrometers) layer on silicon.
I'm worried about stress effects.
Is there anyone who has experimented with such oxide thickness?
Thank you,
Erhan



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Erhan Yenilmez
Ph.D. student, Dept. of Applied Physics,
Stanford University

voice:   (650) 725-9156 (office)
         (650) 497-3412 (home)
fax:     (650) 725-9793

mail: Dept. of Applied Physics
      Stanford University,
      Stanford, CA 94305-4090

e-mail: yenilmez at stanford.edu
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