thick oxide

Erhan Yenilmez yenilmez at stanford.edu
Mon Apr 9 14:04:08 PDT 2001


I want to have a very thick oxide (>2micrometers) layer on silicon.
I'm worried about stress effects.
Is there anyone who has experimented with such oxide thickness?
Thank you,
Erhan



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Erhan Yenilmez
Ph.D. student, Dept. of Applied Physics,
Stanford University

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e-mail: yenilmez at stanford.edu
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