thick oxide

Erhan Yenilmez yenilmez at
Mon Apr 9 14:04:08 PDT 2001

I want to have a very thick oxide (>2micrometers) layer on silicon.
I'm worried about stress effects.
Is there anyone who has experimented with such oxide thickness?
Thank you,

Erhan Yenilmez
Ph.D. student, Dept. of Applied Physics,
Stanford University

voice:   (650) 725-9156 (office)
         (650) 497-3412 (home)
fax:     (650) 725-9793

mail: Dept. of Applied Physics
      Stanford University,
      Stanford, CA 94305-4090

e-mail: yenilmez at

More information about the labmembers mailing list