Loss of building vacuum

Dick Crane rcrane at snf.stanford.edu
Tue Apr 10 11:09:42 PDT 2001

The house process vacuum system for CIS and CISX will be down for 30
minutes on Thursday, April 12, from 0730 to 0800. A new vacuum pump has
been installed and is currently in use. The old pump needs to be
disconnected from the chilled water line. This operation should take
about a half hour. The loss of house process vacuum affects
vacuum wands throughout the fab, vacuum chucks in the coaters,
developers, and aligners in the photolith area. Other tools may be

Sorry for the inconvenience,

Dick Crane

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