conductive polymer for charge dissipation in e-beam lithography

Yun Li yunli at
Wed Aug 8 08:39:41 PDT 2001


I used one polymer called PASA suitable for your purpose. Email me
back then I can dig more information for you.


On Tue, 7 Aug 2001, David Xu wrote:

> Does anyone have information about commercially available conductive
> polymers that can be used with resist for e-beam lithography on quartz
> wafer.
> Thanks.
> Tianzong Xu
> Lightwaves2020, Inc.
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Yun Li
Material Science and Engineering
Stanford University

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