conductive polymer for charge dissipation in e-beam lithograp hy

Yun Li yunli at stanford.edu
Wed Aug 8 16:25:41 PDT 2001


David,


PASA stands for Poly Aniline Sulfonic Acid
A comapny in Japan is selling this product.
Email is kyg00375 at niftyserve.or.jp
Tel 81-45-504-1130
fax 81-45-504-6602

Hope this work. I used PASA for a long time and it is perfect for
nonconductive substrate. Once you get this product, please let me know
also.

Good Luck.

Yun


On Wed, 8 Aug 2001, Jeiwei Chang wrote:

> Yun,
> We are also interested in PASA. We like to know compatibility to our E-beam
> resist. Can you help us. Thank you so much.
> Jeiwei
>
> -----Original Message-----
> From: Yun Li [mailto:yunli at stanford.edu]
> Sent: Wednesday, August 08, 2001 8:40 AM
> To: David Xu
> Cc: labmembers at snf.stanford.edu
> Subject: Re: conductive polymer for charge dissipation in e-beam
> lithography
>
>
> David,
>
> I used one polymer called PASA suitable for your purpose. Email me
> back then I can dig more information for you.
>
> Yun
>
>
> On Tue, 7 Aug 2001, David Xu wrote:
>
> > Does anyone have information about commercially available conductive
> > polymers that can be used with resist for e-beam lithography on quartz
> > wafer.
> >  
> > Thanks.
> >  
> > Tianzong Xu
> > Lightwaves2020, Inc.
> >
> >
> ____________________________________________________________________________
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> ---------------------------------------------------------
> Yun Li
> Material Science and Engineering
> Stanford University
>
> Office:  218 A  Mccullough    Lab: Mccullough X basement.
> Tel: 650-723-2939
>
>
> Residence:
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> home page: http://www.stanford.edu/~yunli
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> ----------------------------------------------------
>

---------------------------------------------------------
Yun Li
Material Science and Engineering
Stanford University

Office:  218 A  Mccullough    Lab: Mccullough X basement.
Tel: 650-723-2939


Residence:
21E Escondido Village
Palo Alto CA 94305
Tel: 650-497-9321

home page: http://www.stanford.edu/~yunli
Machine:   http://nine.stanford.edu
----------------------------------------------------




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