dektak question

Evan Thrush ethrush at
Thu Aug 9 10:04:58 PDT 2001

Hello All,

I want to use the dektak or some other surface profilometer to measure a 
film thickness to great precision.  The film thickness or step height will 
be about 1 micron thick and I hope to measure within 10nm resolution.  Is 
this possible?  Is there some type of calibration method I can use to make 
this possible?  Any advice or help would be appreciated.


Evan Thrush
Stanford University; E.E. PhD Candidate
CIS-X Rm. B113-21, Stanford, CA 94305-4075
Phone:  (650)725-2774    E-mail:  ethrush at
Fax:    (650)723-4659    Homepage: 

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