step height measurement

Yahong Yao yyao at intpax.com
Sat Aug 11 15:53:37 PDT 2001


Hello All,

I want to measure trench depth between 100 um --- 500 um.  It seems the dektak can only measure step
height less than 60 um.  Does anyone know which tool can meet my needs?  Thank you in advance.

Regards,
Yahong Yao
--
Phone:  (408) 252-6410 x. 407
Mobile:(408) 718-8831
Fax:      (408) 252-6430





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