step height measurement

Yahong Yao yyao at
Sat Aug 11 15:53:37 PDT 2001

Hello All,

I want to measure trench depth between 100 um --- 500 um.  It seems the dektak can only measure step
height less than 60 um.  Does anyone know which tool can meet my needs?  Thank you in advance.

Yahong Yao
Phone:  (408) 252-6410 x. 407
Mobile:(408) 718-8831
Fax:      (408) 252-6430

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