Critical Point Drying

Mary Tang mtang at
Tue Aug 28 13:29:18 PDT 2001

Hi all --

Yianni Tousimis from Tousimis, Inc. will be giving a short, informal
presentation on critical point drying in MEMS technologies.  This will
be held on Thursday, Aug. 30, at 2 pm in CIS room 101 (the conference
room) and you are all invited.

In critical point dryers, CO2 is introduced into a chamber under
controlled temperature and high pressure to its triple point
(supercritical stage), where there's no clear phase change between gas
and liquid. This is a nifty way to dry and clean devices without
worrying about stiction or surface tension of liquids.  Several groups
have asked that SNF acquire a critical point dryer -- here's an
opportunity to learn about these systems and what they can do.


Mary X. Tang, Ph.D.
National Nanofabrication Users' Network
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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