From mbell at snf.stanford.edu Thu Feb 1 14:06:29 2001 From: mbell at snf.stanford.edu (Mike Bell) Date: Thu, 01 Feb 2001 14:06:29 -0800 Subject: Scheduled Coral downtime Friday 6 AM - 7 AM Message-ID: <3A79DDE5.D1A01806@snf.stanford.edu> Members, The Coral system will be down for minor reconfiguration purposes between 6 AM and 7 AM tomorrow, Friday, February 2nd. Sorry for any inconvenience this causes. Mike Bell SNF Staff 725-9503 From mahnaz at snf.stanford.edu Thu Feb 1 16:41:12 2001 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Thu, 01 Feb 2001 16:41:12 -0800 Subject: [Fwd: Resist presentation] Message-ID: <3A7A0228.CE9421B2@snf.stanford.edu> Kind reminder about the talk tomorrow. See you there mahnaz -------------- next part -------------- An embedded message was scrubbed... From: Mahnaz Mansourpour Subject: Resist presentation Date: Wed, 17 Jan 2001 13:18:50 -0800 Size: 2460 URL: From FYaghmaie at Shipley.com Thu Feb 1 17:20:15 2001 From: FYaghmaie at Shipley.com (FYaghmaie at Shipley.com) Date: Thu, 1 Feb 2001 20:20:15 -0500 Subject: [Fwd: Resist presentation] Message-ID: Of corse, will be there at 1:40 Thanks Mahnaz Mansourpour To: Lab , frank nford.edu> cc: Subject: [Fwd: Resist presentation] 02/01/01 07:41 PM Kind reminder about the talk tomorrow. See you there mahnaz Return-Path: Delivered-To: mahnaz at snf.stanford.edu Received: (qmail 25938 invoked by alias); 17 Jan 2001 21:18:52 -0000 Mailing-List: contact labmembers-help at snf.stanford.edu; run by ezmlm Precedence: bulk X-No-Archive: yes List-Post: List-Help: List-Unsubscribe: List-Subscribe: Delivered-To: mailing list labmembers at snf.stanford.edu Received: (qmail 25927 invoked from network); 17 Jan 2001 21:18:51 -0000 Message-ID: <3A660C3A.7421C8B7 at snf.stanford.edu> Date: Wed, 17 Jan 2001 13:18:50 -0800 From: Mahnaz Mansourpour Organization: Stanford University X-Mailer: Mozilla 4.7 [en] (WinNT; I) X-Accept-Language: en MIME-Version: 1.0 To: Lab , svgcoat at snf.stanford.edu, frank yaghmaie , headway at snf.stanford.edu Subject: Resist presentation Content-Type: multipart/alternative; boundary=" ------------635D081583CF2BC9F30A8CC5" Hello all, I am very pleased to announce that Dr. Frank Yaghmaie of Shiply has accepted to give a talk in the area of i-line resist. I have expressed more and more lab members are using glass and quartz wafers and he will talk about different method like, FSC, face shield coverage and the benefit of dye in the resist. The talk will be on Friday February 2nd. at 2 pm Auditorium 101x mahnaz From Mwalker at k2optronics.com Fri Feb 2 09:52:19 2001 From: Mwalker at k2optronics.com (Mary Walker) Date: Fri, 2 Feb 2001 09:52:19 -0800 Subject: Training for Wire Bonding: Message-ID: <49CEF180383BD41198CA001083FC09561844F9@SERVER> Good Morning, Everyone; I am looking for someone, or a contact who can provide me with some wire bonding training. My company is interested contracting someone or company who can provide this service for me. If you or anyone, or a company you know that will provide this training, please e-mail: mwalker@ k2optronics.com, or call me at ( 408 ) 747-5915, ( 408 ) 543-4527, or ( 408 ) 431-2331. Thanks for you help. Mary Walker K2Optronics E-mail: mwalker at k2optronics.com Phone: 408 747-5915 Phone: 408 543-4527 Phone: 408 431-2331 From donoghue at cis.Stanford.EDU Sun Feb 4 16:24:00 2001 From: donoghue at cis.Stanford.EDU (Mary Donoghue) Date: Sun, 04 Feb 2001 16:24:00 -0800 Subject: I'm leaving the SNF this week. Message-ID: <4.2.0.58.20010204155728.00a5eb80@cis.stanford.edu> Dear labmembers, This coming Wednesday, 2/7/01 is my last day at the lab. I'm leaving to take another job at Stanford. I'll be working for ITSS and will be in the Birch Trailer, not far from CIS. I didn't want to leave without saying goodbye. I wish you all the greatest success in the future. Very sincerely, --Mary ******************************************* Mary Donoghue Stanford Nanofabrication Facility CIS 043 420 Via Palou Mall Stanford University Stanford, CA 94305-4070 Phone: (650) 725-3664 Fax: (650) 725-6278 From mtang at snf.stanford.edu Mon Feb 5 11:21:37 2001 From: mtang at snf.stanford.edu (Mary Tang) Date: Mon, 05 Feb 2001 11:21:37 -0800 Subject: Labmember Survey... Message-ID: <3A7EFD41.16D3DA67@snf.stanford.edu> Fellow Labmembers: This is the last call for Labmember Survey forms! (We're going to start collating the forms tomorrow morning, so please have those filled out survey forms into the labeled box by the lab by the end of today.) Thanks -- Mary From caudillomalik at netscape.net Tue Feb 6 21:13:57 2001 From: caudillomalik at netscape.net (david caudillo) Date: Wed, 07 Feb 2001 00:13:57 -0500 Subject: FYI: 2/6 Lab Is Down Due To Major Power Outage Message-ID: <51B7F2A6.119951CF.0DC3DFDB@netscape.net> I do not know the current facility status there at the lab. If anyone should find out when the lab will be up and running please broadcast a message out to all. Thank You Caudillo -- David Caudillo __________________________________________________________________ Get your own FREE, personal Netscape Webmail account today at http://webmail.netscape.com/ From rcrane at snf.stanford.edu Wed Feb 7 08:17:57 2001 From: rcrane at snf.stanford.edu (Dick Crane) Date: Wed, 07 Feb 2001 08:17:57 -0800 Subject: Neutralizer Down Message-ID: <3A817535.2DEF9925@snf.stanford.edu> The acid waste neutralizer system will be down from 0800 to 1200 this morning. Please contact any of the fab maintenance crew before dumping any hot pot or other acid source to drain. We will operate the neutralizer manually. The wet benches may be operated normally as to quickdump rinsers, HF pots, and SRDs. An outside contractor has installed a new NaOH delivery line and is completing the final hookup. This change will eliminate the problems between the LN2/gasous N2 line and the NaOH line which caused the neutralizer shutdown last month. Thanks for your help, Dick Crane From mahnaz at snf.stanford.edu Wed Feb 7 08:31:42 2001 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Wed, 07 Feb 2001 08:31:42 -0800 Subject: Lab is up Message-ID: <3A81786E.A86261CC@snf.stanford.edu> Hello All, Litho area is up and running. see you mahnaz From rcrane at snf.stanford.edu Wed Feb 7 12:03:43 2001 From: rcrane at snf.stanford.edu (Dick Crane) Date: Wed, 07 Feb 2001 12:03:43 -0800 Subject: Neutralizer is up Message-ID: <3A81AA1F.AB620044@snf.stanford.edu> The acid waste neutralizer is up and running. Fully use of wet benches (acid dumping) may resume. Thanks for your patience, Dick Crane From cheng1 at stanford.edu Wed Feb 7 14:17:02 2001 From: cheng1 at stanford.edu (Ching-Hsiang Cheng) Date: Wed, 7 Feb 2001 14:17:02 -0800 (PST) Subject: In-situ Boron doped polysilicon Message-ID: Dear labmembers, Does anyone know any outsources for the in-situ boron doped polysilicon? Thanks Ching-Hsiang From mahnaz at snf.stanford.edu Wed Feb 7 15:41:13 2001 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Wed, 07 Feb 2001 15:41:13 -0800 Subject: Kind remider Message-ID: <3A81DD19.4CC3452E@snf.stanford.edu> Chad from EV will be here tomorrow , we are planning to do a training on the bonder starting 8:45 in the lab. To all the people whom been waiting patiently please try to attend this session. There has been lots of problem with the bonder that some of them is associated with different users expertise so please do your best to attend this class even though is such a short notice. There will be a training session on the EV aligner as well afterward. The Talk on bonding will be in the afternoon at 2 to 4 in the CIS-101. Mahnaz From mbell at snf.stanford.edu Thu Feb 8 20:10:08 2001 From: mbell at snf.stanford.edu (Mike Bell) Date: Thu, 08 Feb 2001 20:10:08 -0800 Subject: Scheduled Coral downtime 6-7 AM Message-ID: <3A836DA0.81672C10@snf.stanford.edu> Members, Coral is scheduled to down tomorrow, Friday 02/09/2001 from 6-7 AM for maintenance. Thanks, Mike Bell 725-9503 From latta at snf.stanford.edu Fri Feb 9 13:47:52 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Fri, 9 Feb 2001 13:47:52 -0800 (PST) Subject: Solvent tranfer cart? Message-ID: Folks, Both stainless steel solvent transfer carts are missing. If you have them or know where they are, will you please make every effort to return them? In their absence other labmembers are forced to use the incorrect polypro transfer carts. This is a potential hazard. Thanks for your help in returning the metal carts, Nancy From shott at snf.stanford.edu Sat Feb 10 11:38:17 2001 From: shott at snf.stanford.edu (John Shott) Date: Sat, 10 Feb 2001 11:38:17 -0800 Subject: Common courtesy in a shared environment .... Message-ID: <3A8598A9.60A30E12@snf.stanford.edu> SNF Lab Members: There have been a recent set of messages related to problems created by people making reservations on equipment and then not showing up to use them, people leaving messes at various pieces of equipment and then failing to clean up after themselves, etc. To that list, I'll add people who leave equipment enabled in their name for extended periods of time which either confuses people who may need to use that equipment, allows others to use it for free, or makes it impossible to track down people who carelessly use equipment. Note: Not all of these messages have been widely disseminated. Nonetheless, it is clear that there are a number of people in the lab who are observing behavior that seems to point to a lack of common courtesy in living and working in a shared laboratory. Please remember that in an average month we have over 150 individuals working in the lab. It is a challenge to keep this place operational under the best conditions ... all of these inconsiderate actions make it more difficult for all of us. Please remember to: 1. Clean up after yourself! Many of the chemicals and materials we use are potentially very hazardous and put others at risk if not handled and disposed of properly. 2. If you can't use a reservation ... cancel it! 3. When you are done with equipment, disable it! We've heard the excuse too many times: "Gee, someone must have used the equipment after I did ... it was fine when I finished ..." (Of course, the corollary to this is "Enable equipment in your name when you are using it"). If people can't voluntarily comply with these rules and guidelines, I'm sure that we can find ways to "encourage" greater compliance. For example, charging a fee for unused equipment reservations or eliminating the monthly equipment cap completely would probably get a number of people's attention ... Thanks for your cooperation, John From shott at snf.stanford.edu Tue Feb 13 09:08:24 2001 From: shott at snf.stanford.edu (John Shott) Date: Tue, 13 Feb 2001 09:08:24 -0800 Subject: Keys found ... Message-ID: <3A896A08.D3BBC555@snf.stanford.edu> CIS Building Occupants and SNF Lab Members: A set of keys was found in the CIS kitchen late Monday and turned in to me overnight. If you are missing a set of keys please let me know ... Thanks, John From shott at snf.stanford.edu Wed Feb 14 14:01:20 2001 From: shott at snf.stanford.edu (John Shott) Date: Wed, 14 Feb 2001 14:01:20 -0800 Subject: Unauthorized use of equipment, sharing of passwords, etc. Message-ID: <3A8B0030.ED39EDB7@snf.stanford.edu> SNF Lab Members: Earlier this week we found an instance of an unauthorized user operating a piece of equipment that they had enabled by logging in as someone else (who was authorized to use that piece of equipment). The first person has been banned from using SNF until early April and the person who gave away their password will not be allowed to use the lab for the next month. Lest there be any possible confusion as to our policies, let me clarify: Under no circumstances it is OK to log in as someone else to use equipment in their name!!! Nor is it acceptable for someone to enable equipment that you use "in their name". Anyone found acting in this way will be banned from the lab for a similar period ... as will the person who gave away their password or enabled the equipment. Why is this our policy? 1. We expend a great deal of effort in training individuals to use each piece of equipment in the lab because many pieces of equipment are complex, use hazardous chemicals, have high voltages, etc. While I'm sure than many will point out that our existing training could be improved or more rigorous ... there are plenty of good reasons (including the welfare of the equipment, the health and safety of all in the lab, and liability issues) that we go to such lengths to keep specific track of who is authorized to use each piece of equipment. Unauthorized use of equipment undermines all of that and greatly increases our collective risk of facing serious problems in the SNF. 2. Our charging algorithm is based on the individual user. Enabling equipment in someone else's name, in effect, allows two people to work for the cost of one ... assuming that one of them reaches the monthly cap. The current policy is that each individual is subject to their own cap ... as long as that is the policy, we expect that all lab members will follow that policy. Because we are contrained to operate on a break-even basis, anybody who "underpays" by charging their equipment time to someone who is going to reach their cap effectively increases the costs born by the vast majority of folks who play by the rules. That unfairly punishes those who follow the rules. If these policies are unclear in any way, please do not hesitate to contact me. Thanks for your cooperation and continued support, John p.s. If there are any of you out there who feel a sudden urge to change your password, you can do so by issuing the command "passwd" to a window with a sunray prompt. This will prompt for your old password, and then (twice) for your new password. Note: you actually have an account on snf as well (which typically has the same password). Accordingly, you will probably also want to go to snf.stanford.edu (using "ssh snf" which will prompt you for your old password there ...). Once on snf, you can issue the "passwd" command there and go through the same exercise to change your password there. p.p.s.: Because of different encryption methods, any of you using remote coral have also set your "Remote Coral" password ... this may be changed with the "Set Remote Coral Password" on the LOCAL Coral client. From shott at snf.stanford.edu Wed Feb 14 18:49:40 2001 From: shott at snf.stanford.edu (John Shott) Date: Wed, 14 Feb 2001 18:49:40 -0800 Subject: Welcome, Marilu Serrano Message-ID: <3A8B43C4.612F8108@snf.stanford.edu> SNF Lab Members: I'm pleased to announce that Ms. Marilu Serrano has joined us to handle many of the administrative duties previously handled by Mary Donoghue. You should be able to find Marilu in Carrel 044 or should be able to reach her electronically at mserrano at snf.stanford.edu or by phone at x5-3664. Marilu has a good deal of experience at Stanford that she brings to this position and I'm confident that she will contrbute very quickly to the smooth operation of our enterprise. Please remember, however, that there are a lot of new things that she is facing ... Please join me in welcoming Marilu to the Stanford Nanofabrication Facility. Thanks, John From gymclean at alum.mit.edu Fri Feb 16 12:43:13 2001 From: gymclean at alum.mit.edu (George Y. McLean) Date: Fri, 16 Feb 2001 12:43:13 -0800 Subject: 12:00-14:00 drytek2 reservation cancelled Message-ID: <2.2.32.20010216204313.006834a0@netmail.home.com> Sorry for the past-last-minute notice. From rcrane at snf.stanford.edu Fri Feb 16 17:47:35 2001 From: rcrane at snf.stanford.edu (Dick Crane) Date: Fri, 16 Feb 2001 17:47:35 -0800 Subject: Regarding Gas Supplies Message-ID: <3A8DD837.3484DECA@snf.stanford.edu> As some of you are aware, in the past two weeks we have run out of three process gases. This is simply unacceptable and quite embarrassing to me. Measures taken last year have proven to be inadequate. To prevent future interruptions I have taken the following measures: 1. All gas pressures and/or weight will be recorded daily. 2. Use trends plotted weekly. 3. Inaccurate scales will be replaced. 4. Where allowable by space and permit restrictions, spare bottles will be ordered ahead and placed in stock. 5. The ordering process will be streamlined. (Some gases have taken ten weeks to arrive.) As members of the fab community, I need you to notify me, Ray, or Mike Dickey of any anticipated change in gas use rate least you surprise us. Thanks for your help. Dick Crane From litteken at stanford.edu Mon Feb 19 21:59:48 2001 From: litteken at stanford.edu (Christopher S. Litteken) Date: Mon, 19 Feb 2001 21:59:48 -0800 Subject: Custom Copper Micro-fabrication Message-ID: Does anyone have experience with or knowledge of a custom micro-fabrication facility with either copper etch or damascene capabilities. I need to pattern structures with only copper and low-k layers that have features less than 1 micron. Your input is appreciated. Chris -------------- next part -------------- An HTML attachment was scrubbed... URL: From mahnaz at snf.stanford.edu Tue Feb 20 17:36:30 2001 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Tue, 20 Feb 2001 17:36:30 -0800 Subject: UP Message-ID: <3A931B9E.7F0FB7B8@snf.stanford.edu> Hello all, I like to let everyone know that the bonder is up and I ran one anodic bond and looked ok. I have to ask every one to take the time and review your recipe very carefully. No more than 1500 N force should be applied to the system at any point of time. No resist or epoxy should go in to the system. Remember the system is very much material dependent. Take the time and review your recipe as many damages is done by running the wrong recipe. If your recipe does not have the comment in that with your name and I see something is wrong I will delete that unless I hear from you. We have to take responsibility toward that, there are many of you and only one of me ( I am looking in to cloning) . We can not afford ( financially and time wise) to go down again or any time soon. I will arrange a training for early next week. mahnaz From bmurray at snf.stanford.edu Wed Feb 21 15:07:16 2001 From: bmurray at snf.stanford.edu (Bill Murray) Date: Wed, 21 Feb 2001 15:07:16 -0800 (PST) Subject: Scheduled Coral Downtime Message-ID: Lab members, In preparation for tomorrow's power outage from 7:00am to 8:00am, we will be bringing Coral down at 11:30pm tonight, Wednesday, February 21, for one hour. Please enable any equipment that you will be using during this time before 11:30pm. Thanks, The Coral Development Team From jerabek at snf.stanford.edu Thu Feb 22 14:43:00 2001 From: jerabek at snf.stanford.edu (Paul Jerabek) Date: Thu, 22 Feb 2001 14:43:00 -0800 (PST) Subject: failure notice (fwd) Message-ID: ---------- Forwarded message ---------- Date: 22 Feb 2001 22:06:37 -0000 From: MAILER-DAEMON at snf.stanford.edu To: jerabek at snf.stanford.edu Subject: failure notice Hi. This is the qmail-send program at snf.stanford.edu. I'm afraid I wasn't able to deliver your message to the following addresses. This is a permanent error; I've given up. Sorry it didn't work out. : Sorry, no mailbox here by that name. (#5.1.1) --- Below this line is a copy of the message. Return-Path: Received: (qmail 6397 invoked by uid 20233); 22 Feb 2001 22:06:37 -0000 Received: from localhost (sendmail-bs at 127.0.0.1) by localhost with SMTP; 22 Feb 2001 22:06:37 -0000 Date: Thu, 22 Feb 2001 14:06:37 -0800 (PST) From: Paul Jerabek To: members at snf.stanford.edu Subject: Micronic laser writer Message-ID: MIME-Version: 1.0 Content-Type: TEXT/PLAIN; charset=US-ASCII As many of you who need masks already know Laser writer is down.However what we thought was a case of burned out terminal turned out to be a burned out computer board.Micronic service doesn't have a replacement here in US.They have to get it from Sweden (it's a Swedish machine) so it might take some time.There is somebody coming here from Sweden this Friday evening so I hope that person will be able to bring in new board. Those people who need masks right away, please let me know and I can send your mask request to out industrial vendor Compugraphics.The price per mask is however quite higher (about $750.- per 5" contact mask). -Paul From footer at leland.stanford.edu Fri Feb 23 13:19:48 2001 From: footer at leland.stanford.edu (Matthew Footer) Date: Fri, 23 Feb 2001 13:19:48 -0800 Subject: Sapphire wafers Message-ID: Hi, I am looking for suppliers of Sapphire wafers, ND 1.78. I will need custom cut pieces approximately 0.15mm thick. Any information would be greatly appreciated. Thanks. Matt _________________________ Matthew J. Footer Department of Biochemistry Beckman, B477 279 Campus Drive West Stanford, CA 94305-5307 650-725-6376 650-723-6220 650-725-6044 fax From lgx at stanford.edu Sun Feb 25 21:10:19 2001 From: lgx at stanford.edu (Guanxiong Li) Date: Sun, 25 Feb 2001 21:10:19 -0800 Subject: Photoresists Message-ID: <003001c09fb2$699a7860$966a40ab@stanford.edu> Hi, Does anybody know whether the photoresist 3612 or SPR220-7 after hard cure would dissolve in methylene chloride? Your input is much appreciated. Thanks! Regards, Guanxiong Li ================================ Materials Science and Engineering Stanford University Phone: (650)723-2939 (O) Office: McCullough 208 =============================== -------------- next part -------------- An HTML attachment was scrubbed... URL: From king at snf.stanford.edu Mon Feb 26 10:32:26 2001 From: king at snf.stanford.edu (Robin King) Date: Mon, 26 Feb 2001 10:32:26 -0800 (PST) Subject: Sapphire wafers In-Reply-To: Message-ID: As always, it is appreciated when the answers to these kinds questions are summarized and posted to the same mail list. Thanks in advance, Robin King On Fri, 23 Feb 2001, Matthew Footer wrote: > Hi, > > I am looking for suppliers of Sapphire wafers, ND 1.78. I will need > custom cut pieces approximately 0.15mm thick. Any information would > be greatly appreciated. Thanks. > > Matt > _________________________ > Matthew J. Footer > Department of Biochemistry > Beckman, B477 > 279 Campus Drive West > Stanford, CA 94305-5307 > 650-725-6376 > 650-723-6220 > 650-725-6044 fax > From aaronp at leland.stanford.edu Tue Feb 27 15:59:44 2001 From: aaronp at leland.stanford.edu (Aaron Partridge) Date: Tue, 27 Feb 2001 15:59:44 -0800 Subject: Presentation this Thursday: A new direct write alignment tool. Message-ID: Lab Members: At a recent conference in Switzerland I was introduced to a company, Heidelberg Instruments, that makes a direct-to-wafer laser exposure tool. I was told that it can draw 0.5um features over a 4" wafer, aligned to global marks, in only 5 minutes per wafer. Alexander Forozan, the Manager of Technical Sales & Marketing at Heidelberg Instruments, will be here to present an overview of his equipment, describe how it can be used with our work and answer our questions. The presentation will be this Thursday, March 1st, at 10:30 AM in the CISX Auditorium. Aaron From mcvittie at cis.Stanford.EDU Tue Feb 27 18:12:57 2001 From: mcvittie at cis.Stanford.EDU (Jim McVittie) Date: Tue, 27 Feb 2001 18:12:57 -0800 (PST) Subject: Use of Gloved Hand to Transfer Wafers is NOT Allowed Message-ID: Lab Users, On Sunday I got the following note from one of the senior grad students in the lab: > I wonder if certain lab practices have changed recently. Today I >found a person trying to transfer wafers from nonmetal cassette to wbdiff >cassette with just a pair of vinyl gloves. I stopped him from going into >wbdiff and asked him why wasn't he using plastic tweezers. He said he did >not want to scratch the wafers which he intended to bond. I suggested >cassette to cassette dump transfer and he claimed it to be a dirty method >and thought vinyl gloves out of bag are very clean! It is very easy for >the clean gloves to touch several dirty surfaces without user knowing >about it. Apart from that, I observed his method of adding chemicals and >didn't find it particularly clean either. Please explain to me and >entire lab if there are new wbdiff policies in place (which I didn't see >in last 4 years of my lab work). There is long standing lab policy to never touch wafers during processing with your hands with or with gloves on. Without gloves one contaminates the wafers with finger oils which are loaded sodium and impossible to completely remove. With gloves one still contaminates the wafers with glove residues and particles picked up from previous surfaces touched the gloves. Please follow the lab rules in processing your wafers. There are good reasons for the rules and are consequences for not following them. Thanks, Jim -------------------------------------------------------------- James P. McVittie Senior Research Scientist Allen Center for Integrated Systems jmcvittie at stanford.edu Stanford University Tel: (650) 725-3640 Rm. 336, 330 Serra Mall Fax: (650) 723-4659 Stanford, CA 94305-4075