Custom Copper Micro-fabrication

Christopher S. Litteken litteken at stanford.edu
Mon Feb 19 21:59:48 PST 2001


Does anyone have experience with or knowledge of a custom micro-fabrication
facility with either copper etch or damascene capabilities.  I need to
pattern structures with only copper and low-k layers that have features less
than 1 micron.

Your input is appreciated.
Chris
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