From crichter at protogene.com Sun Jul 1 23:00:15 2001 From: crichter at protogene.com (Claudia Richter) Date: Sun, 1 Jul 2001 23:00:15 -0700 Subject: Reservation Cancellation- evalign Message-ID: I will not be able to make it to my reserved time from 10-11:30am Monday. -Claudia From phimmer at yahoo.com Thu Jul 5 15:12:12 2001 From: phimmer at yahoo.com (phillip himmer) Date: Thu, 5 Jul 2001 15:12:12 -0700 (PDT) Subject: sapphire dicing Message-ID: <20010705221212.75088.qmail@web13305.mail.yahoo.com> Does anyone know how a person could get a 1mm thick sapphire wafer diced? The dynatex c3060 blades don't hold up. any info is appreciated phil __________________________________________________ Do You Yahoo!? Get personalized email addresses from Yahoo! Mail http://personal.mail.yahoo.com/ From pelton at stanford.edu Thu Jul 5 18:01:14 2001 From: pelton at stanford.edu (Matthew A Pelton) Date: Thu, 5 Jul 2001 18:01:14 -0700 (PDT) Subject: Etching dielectrics Message-ID: I have a sample with layers of zirconium oxide and silicon dioxide that I would like to etch through. If anybody has any information or contacts on this, please let me know. I would be most interested in a dry etch that let me do a deep, anisotropic etch with sub-micron features. Thanks, -- Matt Pelton From mahnaz at snf.stanford.edu Fri Jul 6 08:49:28 2001 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Fri, 06 Jul 2001 08:49:28 -0700 Subject: [Fwd: MEMS/MOEMS Packaging Engineer] Message-ID: <3B45DE08.125DA1B8@snf.stanford.edu> -------------- next part -------------- An embedded message was scrubbed... From: Babak.Khamsehpour at ReadRite.com Subject: MEMS/MOEMS Packaging Engineer Date: Thu, 5 Jul 2001 14:42:00 -0700 Size: 30004 URL: From hopcroft at snf.stanford.edu Mon Jul 9 09:31:39 2001 From: hopcroft at snf.stanford.edu (Matt Hopcroft) Date: Mon, 9 Jul 2001 09:31:39 -0700 (PDT) Subject: Thick PMMA Message-ID: Hello, Does anyone have any experience depositing thick PMMA layers at SNF? Any information on methods, formulas, suppliers, etc. would be appreciated. Thank you, -Matt Matt Hopcroft hopcroft at snf.stanford.edu 650.736.2380 From txx1905 at hotmail.com Mon Jul 9 16:57:55 2001 From: txx1905 at hotmail.com (David Xu) Date: Mon, 09 Jul 2001 16:57:55 -0700 Subject: Process Engineer and Technician Message-ID: An HTML attachment was scrubbed... URL: From rcrane at snf.stanford.edu Tue Jul 10 11:11:37 2001 From: rcrane at snf.stanford.edu (Dick Crane) Date: Tue, 10 Jul 2001 11:11:37 -0700 Subject: Labmember's Meeting 7/12 @ 10:00 Message-ID: <3B4B4559.F7E593B@snf.stanford.edu> It is time for our monthly, labmember's meeting on Thursday, July 12, at 10:00 in CISX101. The agenda will include: - Dean Plummer presenting new SNF org chart. - Mary Tang will address processing and outreach activities. - Jim McVittie will cover the installation of the Hitachi 4160 SEM. - Dick Crane will review the Thermco furnace installation strategy. Also, we will cover: - General equipment issues. - Review of recent work interruptions. - General discussion. Please attend and make your voice heard. Thanks Dick Crane From rcrane at snf.stanford.edu Wed Jul 11 17:41:46 2001 From: rcrane at snf.stanford.edu (Dick Crane) Date: Wed, 11 Jul 2001 17:41:46 -0700 Subject: Reminder Message-ID: <3B4CF24A.BB74891A@snf.stanford.edu> Kind reminder that it is time for our monthly, labmember's meeting on Thursday, July 12, at 10:00 in CISX101. The agenda will include: - Dean Plummer presenting new SNF org chart. - Mary Tang will address processing and outreach activities. - Jim McVittie will cover the installation of the Hitachi 4160 SEM. - Dick Crane will review the Thermco furnace installation strategy. Also, we will cover: - General equipment issues. - Review of recent work interruptions. - General discussion. See you there, Thanks Dick Crane From mtang at snf.stanford.edu Thu Jul 12 15:01:50 2001 From: mtang at snf.stanford.edu (Mary Tang) Date: Thu, 12 Jul 2001 15:01:50 -0700 Subject: IR Source for Karl Suss Message-ID: <3B4E1E4E.DE02B4BE@snf.stanford.edu> Hi everyone -- I'm writing on behalf of Mahnaz, who is on vacation for the next couple of days. Upon request of a couple of labmembers, she is exploring the possibility of getting an IR lamp source for backside illumination on the Karl Suss machine. This would enable users to do alignment on IR-sensitive features that may be covered or otherwise not visible under normal illumination. The lamp source can be switched between IR and normal illumination, so alignment precision would be unaffected in normal use. This should be a relatively straightforward modification. If you are interested in this, would like to learn more about this, or can offer compelling reasons why we should get this, please contact Mahnaz (mahnaz at snf.stanford.edu). Thanks, Mary -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu From mahnaz at snf.stanford.edu Mon Jul 16 11:02:18 2001 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Mon, 16 Jul 2001 11:02:18 -0700 Subject: Clean up Message-ID: <3B532C2A.4AA75777@snf.stanford.edu> Hello all, I need the table next to the head way get clean by end of today, There is a part from Kovacs group left on that and also some wafers and a run sheet and a box from Bio processors. Please clean up by this afternoon 7/16 as I am planning to use the table for hot plates. please be clean and courteous and do not leave your personal belonging all over the lab. mahnaz -------------- next part -------------- An HTML attachment was scrubbed... URL: From vinodgb at stanford.edu Mon Jul 16 12:06:36 2001 From: vinodgb at stanford.edu (Vinod Bhat) Date: Mon, 16 Jul 2001 12:06:36 -0700 Subject: liftoff of ZEP 520 Message-ID: <002301c10e2a$6f9781e0$1c6040ab@stanford.edu> If anyone has done a liftoff of ZEP 520, I'd appreciate any pointers that he/she could give me about it. Thanks, Vinod. -------------- next part -------------- An HTML attachment was scrubbed... URL: From grupp at snow.stanford.edu Mon Jul 16 12:22:06 2001 From: grupp at snow.stanford.edu (Dan Grupp) Date: Mon, 16 Jul 2001 12:22:06 -0700 (PDT) Subject: liftoff of ZEP 520 In-Reply-To: <002301c10e2a$6f9781e0$1c6040ab@stanford.edu> Message-ID: > If anyone has done a liftoff of ZEP 520, I'd appreciate any pointers that he/she could give me about it. > Thanks, > Vinod. > > Use bilayer (we have PMGI): Spin PMGI (typical 3K Angstroms) BAKE Hot Plate 200 C 120 s Spin PMMA or ZEP (typical 1K Anstroms) Bake Hot Plate 180 C 90 s Expose & Develop as per usual for PMMA or ZEP Dip in LDD26W (TMAH is the key factor, so other will work too) 30 s for 3000 A undercut. -Dan --------------------------------------------------------------------------- Dr. Daniel Grupp, Visiting Scholar Center for Integrated Systems Stanford University Stanford, CA 94305 (650) 724-6911 FAX: 723-4659 --------------------------------------------------------------------------- From mrolandi at stanford.edu Tue Jul 17 11:57:53 2001 From: mrolandi at stanford.edu (Marco Rolandi) Date: Tue, 17 Jul 2001 11:57:53 -0700 (PDT) Subject: pmma spin Message-ID: Hi does anybody know the conditions for spinning a layer of PMMA 50nm in thickness? thanks marco ------------------------------------------------------------------------------- Marco Rolandi Graduate Student Department of Applied Physics Dai Group Department of Chemistry Stanford University Stanford, 94305 phone: (650) 725-9156 fax : (650) 725-9793 From shott at snf.stanford.edu Wed Jul 18 15:10:44 2001 From: shott at snf.stanford.edu (John Shott) Date: Wed, 18 Jul 2001 15:10:44 -0700 Subject: Return those SunRay smartcards .... Message-ID: <3B560964.6C947CFB@snf.stanford.edu> SNF Labmembers: We seem to be out of SunRay smartcards at the lab entrance. We have a total of 250 of them ... and it seems rare when there are more than 30 people in the lab at one time. So, where are the remaining 220 smartcards? Remember .... they are common, shared cards. They are not yours! Moreover, even when you are using one of the cards, it contains no information about who you are, your login name, or anything like that ... it merely contains the Session ID number that was assigned to your login session. So, return those cards when you are done with them .... other people need them!!! Thanks for you cooperation, John From shott at snf.stanford.edu Thu Jul 19 17:43:08 2001 From: shott at snf.stanford.edu (John Shott) Date: Thu, 19 Jul 2001 17:43:08 -0700 Subject: Errors on June Statements .... Message-ID: <3B577E9C.B55935C1@snf.stanford.edu> SNF Lab Members: I screwed up!!! The file that we upload into the univesity accounting system contained 2 copies of the supplies charges (wafers, etc.) instead of 1 copy of the supplies charges and 1 copy of the direct-use staff charges (when one of our staff members does some work for you). As a result, your June statements will show a double billing for recharged stockroom supplies. I have uploaded a journal today that should correct this situation by issuing a credit for the proper amount of supplies and will also charge you for any June staff charges. These corrections for June activity will show up as a part of your July statement. If there are financial folks in your organization who should be aware of this, I'd appreciate it if you could forward this to me. Thanks for you cooperation and understanding, John From hphan at snf.stanford.edu Thu Jul 19 17:50:49 2001 From: hphan at snf.stanford.edu (Henry Phan) Date: Thu, 19 Jul 2001 17:50:49 -0700 Subject: AMTecher Message-ID: <3B578069.7AC0AC77@snf.stanford.edu> AMT Etcher has been cleaned. I replaced all the dummy wefer, and ran thirty minutes seasoning. Chamber is working ok now. From mahnaz at snf.stanford.edu Fri Jul 20 15:43:38 2001 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Fri, 20 Jul 2001 15:43:38 -0700 Subject: Hot plates Message-ID: <3B58B419.511610AD@snf.stanford.edu> Hello all, The hot plates on the table next to the Head way are calibrated and ready for use, now you do not need to move your sample all the way to other isle in order to bake it. Please keep the place tidy and clean and if your wafer /sample has thick resist on it use foil to cover the hot plate. mahnaz From beckwith at snf.stanford.edu Tue Jul 24 13:06:54 2001 From: beckwith at snf.stanford.edu (Sharleen Beckwith) Date: Tue, 24 Jul 2001 13:06:54 -0700 (PDT) Subject: lifting photoresist from svgcoat Message-ID: Over the past two weeks we have had several problems with lifting photoresist. At least two other users have told me they are also having the same problem. Are other people having problems too? Are we using a different prime solution? Is the prime station actually working properly? Sharleen From shott at snf.stanford.edu Wed Jul 25 14:42:35 2001 From: shott at snf.stanford.edu (John Shott) Date: Wed, 25 Jul 2001 14:42:35 -0700 Subject: Lost Pager ... Message-ID: <3B5F3D4B.1A42C1F4@snf.stanford.edu> CIS Building Occupants and SNF Lab Members: A pager was lost in (or near) the CIS building this morning. If you have seen or found it, can you please contact me ... and I will contact the person who lost it. It is a black pager (aren't they all ...) with a silver trim ring and a green button. Thanks for your help, John From mahnaz at snf.stanford.edu Thu Jul 26 16:53:10 2001 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Thu, 26 Jul 2001 16:53:10 -0700 Subject: singe oven Message-ID: <3B60AD66.C871DED3@snf.stanford.edu> Hello all, we are in short supply of teflon cassette, and some of you have been using the singe oven for storage. Please clean up and remove your wafers from the singe oven and free the teflon cassettes or I will clean it up. As you know I have limited amount of Teflon cassettes so after your processing is done, your wafers should go in to your own box. mahnaz From mtang at snf.stanford.edu Mon Jul 30 19:41:58 2001 From: mtang at snf.stanford.edu (Mary Tang) Date: Mon, 30 Jul 2001 19:41:58 -0700 Subject: Reservations Policies Message-ID: <3B661AF6.BBED978D@snf.stanford.edu> Greetings -- Just a couple of clarifications on equipment reservation policies (with more to come...) First: Please do not ask SNF process staff to schedule equipment reservations on any of the "busy" tools (we all know which ones they are!) -- unless you are travelling to work here (ie, from out-of-state, not from San Jose). Some have discovered that SNF staff have certain scheduling privileges -- and are putting staff on the spot by asking them to exercise these privileges. If you have extenuating circumstances (other than scheduling for travel) that you feel warrant special consideration, direct your request to John or me. Second: Just to reiterate standing policies - 1. SNF staff does not uphold or guarantee equipment reservations after 15 minutes (however, please make a reasonable attempt to get in touch with the reservation holder before taking his/her time slot.) 2. If you decide not to use your reservation, you should cancel your reservation and send an email to the equipment list. This is particularly important for the "busy" tools. 3. If you finish early or plan on doing so, you should send email to the equipment list (again, especially important for "busy" tools.) We are seeing a bit of less-than-considerate behavior, where people are doing their best to circumvent the letter, if not the intent, of these policies. Please understand that the aim of these policies is, as fairly as possible, to allocate scarce resources (ie. equipment time), not to annoy labmembers. Please take a little extra time to be considerate in your dealings with each other and with SNF staff, as a little extra courtesy goes a long way. Mary -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu From mtang at snf.stanford.edu Tue Jul 31 17:02:07 2001 From: mtang at snf.stanford.edu (Mary Tang) Date: Tue, 31 Jul 2001 17:02:07 -0700 Subject: Welcome Jeannie! Message-ID: <3B6746FF.EDC7DC52@snf.stanford.edu> We have a new addition to the Staff! Jeannie Perez comes to us from HP with many years of experience as a process tech and as a trainer specializing in diffusion, deposition and process integration. Jeannie's primary responsibilities at SNF will be the Metallica and Innotec systems. She will be working here on Mondays, Wednesdays, and Fridays and can be reached at X3-7997 or jperez at snf.stanford.edu. Please join me in welcoming Jeannie Perez to the SNF staff! Mary -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu From uli at snf.stanford.edu Tue Jul 31 18:06:10 2001 From: uli at snf.stanford.edu (Uli Thumser) Date: Tue, 31 Jul 2001 18:06:10 -0700 Subject: wbgaascl clean up Message-ID: <3B675602.554015BA@snf.stanford.edu> SNF lab members, I am going to clean up the area around the Wet Bench GaAs. There should be no wafers or boxes left at the bench or on nearby tables. For example, there are some single wafer boxes containing pieces ( I assume GaAs) sitting on top of the "Harris Group" storage containers. Please remove your wafer boxes and put them in your storage containers. Anything unclaimed will be removed by the end of this week, 8/3. Thank you for your help, Uli ************** Uli Thumser Stanford Nanofabrication Facility CIS Room 146 Stanford, CA 94305 (650)725-3694 uli at snf.stanford.edu