Etching dielectrics

Matthew A Pelton pelton at stanford.edu
Thu Jul 5 18:01:14 PDT 2001


  I have a sample with layers of zirconium oxide and silicon dioxide that
I would like to etch through.  If anybody has any information or contacts
on this, please let me know.  I would be most interested in a dry etch
that let me do a deep, anisotropic etch with sub-micron features.
  Thanks,

					-- Matt Pelton





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