From mahnaz at snf.stanford.edu  Fri Jun  1 15:20:27 2001
From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour)
Date: Fri, 01 Jun 2001 15:20:27 -0700
Subject: Lab is back up
Message-ID: <3B18152B.D00A444E@snf.stanford.edu>


Hello all,

I just got a note that is ok to go back in the lab, we will send out
another email to let you know exactly what happened. The bad news is
that we are totally out of clean garments. Tony is trying very hard to
see if our vendor is willing to deliver some garments on Monday but so
far the result is " they do not do emergency delivery."
Your choice is either use the garment we collected and are in the
plastic bags or plan to use the lab on Tuesday morning ( mandatory time
off some times can be nice).

thank you for your cooperation

mahnaz



From dton at santurcorp.com  Fri Jun  1 19:48:08 2001
From: dton at santurcorp.com (Dinh Ton)
Date: Fri, 1 Jun 2001 19:48:08 -0700
Subject: Metalica Targets
In-Reply-To: <3B18152B.D00A444E@snf.stanford.edu>
Message-ID: <MGEHKLLAGOIKEINBOIKPCENDCBAA.dton@santurcorp.com>



Hi,

I misplaced a gold and a platinum targets near the Metalica on
Thursday 05/31.  If you found them, could you please let me know
as soon as possible.  Thank you very much.

Regards,

Dinh Ton
(510) 656-7130 ext 221
(510) 656-7563 (FAX)




From mahnaz at snf.stanford.edu  Mon Jun  4 09:40:27 2001
From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour)
Date: Mon, 04 Jun 2001 09:40:27 -0700
Subject: Shadow masking
Message-ID: <3B1BB9FB.6114AB9@snf.stanford.edu>


Hello all,

I like to invite all of you to join me on Thursday 6/7 at 9 in the
morning in the lab by our famous EV aligner. Chad Brubaker the staff
engineer from Electronic Vision will be here and we will go over the
Shadow masking tools and cover any other questions you have regarding
the bonder and aligner. We will concentrate on  shadow masking fixture
so I encourage all the interested members try to join the session to see
how the alignment works and get a general idea. Beth Pruitt has invited
Roger Horstmann of photo Science and she has kindly put some information
together which is attached to this email. Please review the info and
bring all your questions and suggestion.

   Mahnaz

From mahnaz at snf.stanford.edu  Mon Jun  4 10:33:08 2001
From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour)
Date: Mon, 04 Jun 2001 10:33:08 -0700
Subject: [Fwd: shadowmask info]
Message-ID: <3B1BC654.3DBDD3C2@snf.stanford.edu>

Here is the attachment, I tried to send earlier. Sorry for the
inconvenient, I am not sure what happened. I did get a copy of the email
and mine was in there.

mahnaz
-------------- next part --------------
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Subject: shadowmask info
Date: Fri, 01 Jun 2001 16:11:27 -0700
Size: 44838
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From rcrane at snf.stanford.edu  Wed Jun  6 09:27:02 2001
From: rcrane at snf.stanford.edu (Dick Crane)
Date: Wed, 06 Jun 2001 09:27:02 -0700
Subject: Lab meeting June 7
Message-ID: <3B1E59D6.E347B27C@snf.stanford.edu>

I wish to invite the members of the SNF community to the Labmember's
meeting tomorrow, June 7, at 10:00. The meeting will be brief. The
agenda
will include:

1.) Outline of the Thermco, 6", furnaces installation.
2.) A review of fab work interruption events.
3.) Open discussion.

Thanks, see you tomorrow.

Dick Crane


From vsabnis at snow.stanford.edu  Wed Jun  6 15:41:29 2001
From: vsabnis at snow.stanford.edu (Vijit Sabnis)
Date: Wed, 6 Jun 2001 15:41:29 -0700 (PDT)
Subject: polymide planarization 
Message-ID: <200106062241.PAA08733@snowmass.Stanford.EDU>

Hi,

I am wondering if anyone has experience using polymide
for planarization purposes.  My mesas are stripes (optical
waveguides) about 2-3 um wide with an etch depth of 2-5um.  
I am looking for a way to planarize my substrate using polymide 
so that I can later deposit metal on top of the polymide to
create bonds pads and electrically contact the top of my 
device.  

If anyone has any experience using polymide for this type
of application or a related application, I would really
appreciate any advice or suggestions you could give me.
I am currently considering using polymide products from
MicroChem (PMGI SF15), Dow (cyclotene BCB series 3000 or 4000),
or Vantico (Probimide series).  

Thanks for your help.

- Vijit Sabnis




Vijit Sabnis
vsabnis at snow.stanford.edu
Stanford University
Department of Electrical Engineering
Solid State and Photonics Laboratory
CISX B113-23
650/725-2774 office
    723-4659 fax


From mahnaz at snf.stanford.edu  Wed Jun  6 16:22:19 2001
From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour)
Date: Wed, 06 Jun 2001 16:22:19 -0700
Subject: Up date
Message-ID: <3B1EBB2B.90E73215@snf.stanford.edu>

Hello all,

Kyle form KS fixed the system and back side alignment is fixed and ready
to be used. actually I did some training this afternoon and I was
impressed with no change and shift after going to contact.

On the SVG coater the technical support from AIO finally found the
problem, he will be back with the part tomorrow at 7 in the morning.  I
am hoping that the system will be up tomorrow. I will like to see no
reservation on the SVG coater. After is up first come first serve.

mahnaz



From mahnaz at snf.stanford.edu  Wed Jun  6 16:24:08 2001
From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour)
Date: Wed, 06 Jun 2001 16:24:08 -0700
Subject: reminder EV
Message-ID: <3B1EBB98.5B950A6C@snf.stanford.edu>


hello all,

Kind reminder that Electronic Vision will be here for Shadow masking and
any other question tomorrow. We will be in the lab at 8:45.

see you then
mahnaz



From volkan at stanford.edu  Thu Jun  7 09:13:03 2001
From: volkan at stanford.edu (Hilmi Volkan Demir)
Date: Thu, 7 Jun 2001 09:13:03 -0700 (PDT)
Subject: Thin film resistor
In-Reply-To: <200106062241.PAA08733@snowmass.Stanford.EDU>
Message-ID: <Pine.GSO.4.31.0106070904450.2108-100000@epic5.Stanford.EDU>

Hi,

I am wondering if anyone has experience with thin film resistors.
I would like to get a thin layer of resistive metal (TaN, NiCr or any
other choice) deposited on my polymide-planarized wafer, and then  to
pattern this metal layer into resistors next to my devices.

I would really appreciate any advice or suggestions you could give me.

Thanks for your help.

-Volkan

_______________________________________________________________________
Hilmi Volkan DEMIR			    volkan at stanford.edu
					    www-miller.stanford.edu

Electrical Engineering Department           Solid State & Photonics Lab
Stanford University 			    Ginzton Lab AP-227
Stanford, CA 94305                          (650) 725-2291 (office)
					    (650) 725-7509 (fax)

100B Escondido Village, Stanford, CA 94305-7444  (650) 497-9302 (home)
_______________________________________________________________________




From mahnaz at snf.stanford.edu  Fri Jun  8 09:20:58 2001
From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour)
Date: Fri, 08 Jun 2001 09:20:58 -0700
Subject: generosity
Message-ID: <3B20FB6A.5E4C62C1@snf.stanford.edu>


Hello all,

I am pleased to let you know that Electronic Vision Group has donated
the pieces chuck for both Top and Bottom  side alignment plus the  Flat
objective at 10X to Stanford. The other chuck that we were using
actually was a 2" chuck and was on loan to us. With this new chuck and
the new objective users with pieces should be able to do exposure very
easily, come and see me if you have any question and concern.

mahnaz




From shung at cvd.Stanford.EDU  Fri Jun  8 10:12:54 2001
From: shung at cvd.Stanford.EDU (Steven Hung)
Date: Fri, 08 Jun 2001 10:12:54 -0700
Subject: oral
Message-ID: <3B210796.B11FBF69@cvd.stanford.edu>

>
>
>Special University Ph.D. Seminar
>
>Exploration of Novel Gate Materials and Structures
>for MOS Applications
>
>
>Steven C.H. Hung
>Solid Sate Electronics Laboratory
>Stanford University
>
>
>June 8th    2pm
>CISX Auditorium, Room 101-X
>
>
>Heavily-doped polysilicon has long been the industry standard for the
>gate material in CMOS technology. However, several issues limit its
>performance as devices are scaled below 100 nm.  For example,
>limitations on carrier density (~ 1E20 cm-3) cause gate depletion
>effects which significantly degrade current drive improvements as gate
>oxide thickness is scaled.  In addition to such limitations, the
>polysilicon workfunction is essentially fixed, while an adjustable
>workfunction would provide device design flexibility and benefits for
>CMOS technology. The goal of this work is to explore alternative gate
>materials and structures that address the issues faced by polysilicon
>gates, specifically reducing gate depletion and enabling adjustment of
>the effective gate workfunction.
>
>The first portion of the talk will cover experimental work on a novel
>gate material, polycrystalline graphite (polycarbon). Polycarbon is a
>semimetallic substance with high carrier concentration (? 1021 cm-3).
>Analysis of polycarbon?s physical and electrical properties will be
>discussed.  The ability to tune the bulk polycarbon workfunction over a

>range of roughly +/- 0.3V around Si mid-gap, by adjusting deposition
>conditions, is demonstrated.  The second portion of the talk will cover

>a novel gate structure, which enables a wide range of effective
>workfunctions to be achieved for metallic gates, while suppressing gate

>depletion effects.



From rcrane at snf.stanford.edu  Tue Jun 12 18:51:51 2001
From: rcrane at snf.stanford.edu (Dick Crane)
Date: Tue, 12 Jun 2001 18:51:51 -0700
Subject: Nano Seminar
Message-ID: <3B26C737.AE2460EA@snf.stanford.edu>

-----------------------------------------
From: Tom Kenny, Associate Professor, Mechanical Engineering

You are invited to attend the School of Engineering's Nanotechnology
Symposium:

Thursday, July 19,2001
4:00 to 7:00 pm
Teaching Center, SEQ

Professors Calvin Quate and Thomas Kenny will co-host a panel of 
distinguished Stanford faculty in a discussion of the emerging 
interdisciplinary field of nanoscale engineering. Don Eigler, PhD, and
IBM 
Fellow at IBM's Almaden Research Center in San Jose, CA will be the
keynote 
speaker. This program is intended for industrial researchers, venture 
capitalists, engineering and science faculty, alumni and their guests.

If you would like to attend, please register at the web site: 
http://soe.stanford.edu/alumni/nanotechnology_symposium/index.html

Space is limited...registration is required.

Please feel free to forward this message to people whom you think
would like to attend.

Thank you


From ntikho at megasenseinc.com  Fri Jun 15 13:54:10 2001
From: ntikho at megasenseinc.com (ntikho at megasenseinc.com)
Date: 15 Jun 2001 13:54:10 -0700
Subject: Job opportunity
Message-ID: <20010615205410.14873.cpmta@c001.snv.cp.net>

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From shott at snf.stanford.edu  Tue Jun 19 15:29:44 2001
From: shott at snf.stanford.edu (John Shott)
Date: Tue, 19 Jun 2001 15:29:44 -0700
Subject: Stockroom usage ...
Message-ID: <3B2FD258.7793E46C@snf.stanford.edu>

SNF Labmembers:

This message is to clarify the use of materials taken from the SNF stockroom:
This stockroom and the materials in it are ONLY for use in the SNF!!!

We are not a "campus-wide stockroom" in the sense that Physics Stores, Biology
Stores, and Chemistry Stores are.  They charge you for everything ...

We only charge you for silicon wafers and the expensive tweezers.  We don't
actually recharge for any other supplies taken from that stockroom ...
ultimately all lab members pay for it out of their monthly usage fees.  That
system, however, only works to the degree that supplies taken from our
stockroom are used in our laboratory.

Even if you are a bona-fide member of SNF, you may NOT check out materials
such as gloves, KimWipes, etc. for use in your non-SNF laboratories.  Why?
That is effectively asking all the other members of SNF (and often their
federal research contracts ...) to subsidize your own private laboratory.

So ... the SNF stockroom should be used ONLY for supplies that will be used in
the SNF cleanroom.

Thank you for your cooperation,

John


From beckwith at snf.stanford.edu  Tue Jun 19 19:19:14 2001
From: beckwith at snf.stanford.edu (Sharleen Beckwith)
Date: Tue, 19 Jun 2001 19:19:14 -0700
Subject: Fwd: If you were considering upgrading to a Handspring Visor
 Edge, read on...
Message-ID: <p04330100b755b853e26b@[171.64.99.54]>

>Delivered-To: beckwith at snf.stanford.edu
>X-Sender: mcclish at mcclish.pobox.stanford.edu
>Date: Tue, 19 Jun 2001 15:59:51 -0700
>To: partners at lists.Stanford.EDU
>From: "Robin L. McClish" <mcclish at stanford.edu>
>Subject: If you were considering upgrading to a Handspring Visor Edge,
>  read on...
>Sender: owner-partners at lists.Stanford.EDU
>
>Hi Partners,
>
>Thought you might be interested in this.  Thanks to Partner Tom 
>Goodrich for bringing it to my attention.
>
>Cheers,
>Robin
>
>From: TidBITS#583/11-Jun-01
>>  >>>**Handspring Offers $100 Rebate For Old PDAs** -- On 07-Jun-01,
>>>>>   Palm OS-compatible handheld vendor Handspring announced a trade-up
>>>>>   program that offers users a $100 rebate on the thin Visor Edge
>>>>>   handheld in exchange for nearly any old PDA, whether or not it
>>>>>   works. The company will send Visor Edge purchasers a $100 rebate
>>>>>   check upon receipt of the rebate form, original product code from
>>>>>   the Visor Edge's box, and a qualifying old handheld. Acceptable
>>>>>   trade-ins include Palm OS handhelds; Pocket PC and Windows CE
>>>>>   handhelds; Symbian, Casio, Psion, or Sharp handhelds, and even old
>>>>>   Apple Newtons, if you still have one of those around that you
>>>>>   don't use. (Current Handspring Visor owners can send in their
>>>>>   serial numbers to get a $100 discount on a Visor Edge and keep
>>>>>   their current Visor.) Handspring says it has made arrangements to
>>>>>   recycle the old devices. The offer is open only through 01-Jul-01
>>>>>   to residents of the U.S. and Canada, and all mail requesting the
>>>>>   rebate or packages containing the old handhelds must be postmarked
>>>  >  by 31-Jul-01. [MHA]
>--
>
>end
>=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=
>      "Anxiety is misuse of imagination" - author unknown
>=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=
>Robin L. McClish                          Expert Partners 
>Program              
>ITSS, Customer Assistance                      Phone 650.723.3244
>Stanford University                              Fax 650.725.0995
>215 Panama St, Bldg A (Birch 101)     mailto:mcclish at stanford.edu
>Stanford, CA 94305-4128    http://www.stanford.edu/group/partners
>=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=
><A href="http://www.zapworld.com/cgi-bin/zap/af/b.cgi/1354/">
>Help Stop the Smog - Check out the Zappy - an ultra portable, fun 
>electric scooter</a>
>
>-++**==--++**==--++**==--++**==--++**==--++**==--++**==
>This message was posted through the Stanford campus mailing list
>server.  If you wish to unsubscribe from this mailing list, send the
>message body of "unsubscribe partners" to majordomo at lists.stanford.edu.
>
>If you wish to learn more about the Expert Partners Program,
>please visit our web site at http://www.stanford.edu/group/partners



From sbabin at softsrv.com  Wed Jun 20 11:40:56 2001
From: sbabin at softsrv.com (Sergey Babin)
Date: Wed, 20 Jun 2001 11:40:56 -0700
Subject: help wanted
References: <3B2FD258.7793E46C@snf.stanford.edu>
Message-ID: <002b01c0f9b8$93846540$7a68f4d1@pavilion>

We are looking for someone who can help us a few hours a week. We have money
to pay for your job.

The work involves

film deposition:  Metallica, Balzers
dry etch:  STS, P-5000
photolithography: Karl Suss; SVG coater and developer
Matrix, etc.

Ideally, if you can also run E-beam, however, it is not necessary.

Sergey Babin


sbabin at softsrv.com
510/889 6704





From f_shi at hotmail.com  Wed Jun 20 14:30:49 2001
From: f_shi at hotmail.com (frank shi)
Date: Wed, 20 Jun 2001 14:30:49 -0700
Subject: SECCO & WRIGHT
Message-ID: <F41rzvsTDWWcuZcGwM00000af29@hotmail.com>

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From jing.ni at am.apbiotech.com  Wed Jun 20 16:01:28 2001
From: jing.ni at am.apbiotech.com (Jing Ni)
Date: Wed, 20 Jun 2001 16:01:28 -0700
Subject: LPCVD on 8" wafers
Message-ID: <OF254F5D78.45A67E10-ON88256A71.007DEA99@apbiotech.com>

Hello!

Does anyone happen to know any resource who can deposit amorphous silicon
on glass?  I used to go to Strataglass for my 6" wafers with their LPCVD
system.  But they won't be able to do it on 8" wafers.  If you know any
place who can LPCVD silicon on glass, please drop me a line!

Any information will be appreciated.  Thanks ahead!

Jing Ni




From rcrane at snf.stanford.edu  Wed Jun 20 16:24:39 2001
From: rcrane at snf.stanford.edu (Dick Crane)
Date: Wed, 20 Jun 2001 16:24:39 -0700
Subject: LPCVD on 8" wafers
References: <OF254F5D78.45A67E10-ON88256A71.007DEA99@apbiotech.com>
Message-ID: <3B3130B7.DC07E232@snf.stanford.edu>

You might try TFI in Fremont at www.tfiwafer.com, (510) 770-8700. They
have 8" LPCVD processes.

Dick

Jing Ni wrote:
> 
> Hello!
> 
> Does anyone happen to know any resource who can deposit amorphous silicon
> on glass?  I used to go to Strataglass for my 6" wafers with their LPCVD
> system.  But they won't be able to do it on 8" wafers.  If you know any
> place who can LPCVD silicon on glass, please drop me a line!
> 
> Any information will be appreciated.  Thanks ahead!
> 
> Jing Ni


From mahnaz at snf.stanford.edu  Mon Jun 25 17:02:41 2001
From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour)
Date: Mon, 25 Jun 2001 17:02:41 -0700
Subject: Air conditioning
Message-ID: <3B37D120.EA88758B@snf.stanford.edu>


Hello all,

We will loose the air conditioning in the Litho area on 6/26 at about 7
to 8:30 in the morning. Please do your resist spin prior to this time or
I strongly suggest  hold off on resist spin (only) till after the air
conditioning comes back up.

mahnaz



From kliu at molecularreflections.com  Mon Jun 25 22:50:09 2001
From: kliu at molecularreflections.com (Kelvin Liu)
Date: Mon, 25 Jun 2001 22:50:09 -0700
Subject: Won't be needing tylan2 reservation 6/26
In-Reply-To: <p04330102b6e5a1b69a4d@[171.64.99.54]>
Message-ID: <000201c0fe03$dcd0c3c0$a4c7fea9@lapkl>

I won't be needing my tylan2 reservation on Tues.

Kelvin Liu
Staff Engineer
Molecular Reflections
6330 Nancy Ridge Drive Suite 107
San Diego, CA 92121
Ph: (858) 623-0259
Fax: (858) 623-0331
kliu at molecularreflections.com




From vilanova at snf.stanford.edu  Tue Jun 26 08:58:19 2001
From: vilanova at snf.stanford.edu (Mario Vilanova)
Date: Tue, 26 Jun 2001 08:58:19 -0700 (PDT)
Subject: Air conditioning
Message-ID: <Pine.LNX.4.04.10106260857420.22189-100000@snf.stanford.edu>

Air Conditioning it's up and Running .



From mahnaz at snf.stanford.edu  Wed Jun 27 16:47:31 2001
From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour)
Date: Wed, 27 Jun 2001 16:47:31 -0700
Subject: Air Conditioning
Message-ID: <3B3A7093.C8F7D015@snf.stanford.edu>


Hello all,

The facility needs to work on the air condition to tomorrow morning 6/28
from 7 in the morning till 8:30. The temp. might vary in the litho area
if your wafers are spun before this time continue processing but I
strongly suggest no resist spinning and if you feel that the temp. is
out no Ultratech exposure.
Sorry for any inconvenience this may cause.


mahnaz



From mahnaz at snf.stanford.edu  Thu Jun 28 08:22:29 2001
From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour)
Date: Thu, 28 Jun 2001 08:22:29 -0700
Subject: Air Conditioning
Message-ID: <3B3B4BB5.438E5999@snf.stanford.edu>


Hello all,

The Air conditioning is up and running business as usual.

mahnaz



From beckwith at snf.stanford.edu  Thu Jun 28 11:23:05 2001
From: beckwith at snf.stanford.edu (Sharleen Beckwith)
Date: Thu, 28 Jun 2001 11:23:05 -0700 (PDT)
Subject: ag4108 floppy disk...do you have it?????
Message-ID: <Pine.LNX.4.04.10106281121040.3294-100000@snf.stanford.edu>


if so, please return it to the ag4108...just put it in the disk 
drive, you can do this when no one is looking so you will be totally
annonymous. We need it back!

Thanks.

Sharleen



From dhelqaq at hotmail.com  Thu Jun 28 16:26:10 2001
From: dhelqaq at hotmail.com (Deirdre Heyde Elqaq)
Date: Thu, 28 Jun 2001 16:26:10 -0700
Subject: Metal Sputtering Vendors
Message-ID: <F302sZKxt8zPdqJL94700002fe2@hotmail.com>

Hello,

I am looking for some metal sputtering vendors and was hoping that you could 
email me some possibilities. I would need Ti, TiN and AlCu.
Please let me know asap.

Thank you in advance,
Deirdre Heyde Elqaq
_________________________________________________________________
Get your FREE download of MSN Explorer at http://explorer.msn.com



From mrolandi at stanford.edu  Thu Jun 28 16:32:25 2001
From: mrolandi at stanford.edu (Marco Rolandi)
Date: Thu, 28 Jun 2001 16:32:25 -0700 (PDT)
Subject: Metal Sputtering Vendors
In-Reply-To: <F302sZKxt8zPdqJL94700002fe2@hotmail.com>
Message-ID: <Pine.GSO.4.31.0106281630580.2288-100000@epic7.Stanford.EDU>

Try kurt J lesker

www.lesker.com

I bought Moly and W, I do not know if they have what you need

marco


On Thu, 28 Jun 2001, Deirdre Heyde Elqaq wrote:

> Hello,
>
> I am looking for some metal sputtering vendors and was hoping that you could
> email me some possibilities. I would need Ti, TiN and AlCu.
> Please let me know asap.
>
> Thank you in advance,
> Deirdre Heyde Elqaq
> _________________________________________________________________
> Get your FREE download of MSN Explorer at http://explorer.msn.com
>
>

-------------------------------------------------------------------------------
Marco Rolandi
Graduate Student Department of Applied Physics

Dai Group
Department of Chemistry
Stanford University
Stanford, 94305
phone: (650) 725-9156
fax  : (650) 725-9793