Thin film resistor

Hilmi Volkan Demir volkan at
Thu Jun 7 09:13:03 PDT 2001


I am wondering if anyone has experience with thin film resistors.
I would like to get a thin layer of resistive metal (TaN, NiCr or any
other choice) deposited on my polymide-planarized wafer, and then  to
pattern this metal layer into resistors next to my devices.

I would really appreciate any advice or suggestions you could give me.

Thanks for your help.


Hilmi Volkan DEMIR			    volkan at

Electrical Engineering Department           Solid State & Photonics Lab
Stanford University 			    Ginzton Lab AP-227
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