Thin film resistor
Hilmi Volkan Demir
volkan at stanford.edu
Thu Jun 7 09:13:03 PDT 2001
I am wondering if anyone has experience with thin film resistors.
I would like to get a thin layer of resistive metal (TaN, NiCr or any
other choice) deposited on my polymide-planarized wafer, and then to
pattern this metal layer into resistors next to my devices.
I would really appreciate any advice or suggestions you could give me.
Thanks for your help.
Hilmi Volkan DEMIR volkan at stanford.edu
Electrical Engineering Department Solid State & Photonics Lab
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