LPCVD on 8" wafers

Jing Ni jing.ni at am.apbiotech.com
Wed Jun 20 16:01:28 PDT 2001


Hello!

Does anyone happen to know any resource who can deposit amorphous silicon
on glass?  I used to go to Strataglass for my 6" wafers with their LPCVD
system.  But they won't be able to do it on 8" wafers.  If you know any
place who can LPCVD silicon on glass, please drop me a line!

Any information will be appreciated.  Thanks ahead!

Jing Ni





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