LPCVD on 8" wafers
Dick Crane
rcrane at snf.stanford.edu
Wed Jun 20 16:24:39 PDT 2001
You might try TFI in Fremont at www.tfiwafer.com, (510) 770-8700. They
have 8" LPCVD processes.
Dick
Jing Ni wrote:
>
> Hello!
>
> Does anyone happen to know any resource who can deposit amorphous silicon
> on glass? I used to go to Strataglass for my 6" wafers with their LPCVD
> system. But they won't be able to do it on 8" wafers. If you know any
> place who can LPCVD silicon on glass, please drop me a line!
>
> Any information will be appreciated. Thanks ahead!
>
> Jing Ni
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