LPCVD on 8" wafers

Dick Crane rcrane at snf.stanford.edu
Wed Jun 20 16:24:39 PDT 2001


You might try TFI in Fremont at www.tfiwafer.com, (510) 770-8700. They
have 8" LPCVD processes.

Dick

Jing Ni wrote:
> 
> Hello!
> 
> Does anyone happen to know any resource who can deposit amorphous silicon
> on glass?  I used to go to Strataglass for my 6" wafers with their LPCVD
> system.  But they won't be able to do it on 8" wafers.  If you know any
> place who can LPCVD silicon on glass, please drop me a line!
> 
> Any information will be appreciated.  Thanks ahead!
> 
> Jing Ni



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