mahnaz at snf.stanford.edu
Wed Jun 27 16:47:31 PDT 2001
The facility needs to work on the air condition to tomorrow morning 6/28
from 7 in the morning till 8:30. The temp. might vary in the litho area
if your wafers are spun before this time continue processing but I
strongly suggest no resist spinning and if you feel that the temp. is
out no Ultratech exposure.
Sorry for any inconvenience this may cause.
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