From aaronp at leland.stanford.edu Thu Mar 1 08:36:42 2001 From: aaronp at leland.stanford.edu (Aaron Partridge) Date: Thu, 1 Mar 2001 08:36:42 -0800 Subject: Reminder: Presentation Today: A new direct write alignment tool. Message-ID: Lab Members: Alexander Forozan, the Manager of Technical Sales & Marketing at Heidelberg Instruments, will be here to present an overview of his direct-to-wafer laser exposure tool, he will describe how it can be used with our work and answer our questions. The presentation will be today at 10:30 AM in the CISX Auditorium. Aaron From rcrane at snf.stanford.edu Thu Mar 1 13:28:08 2001 From: rcrane at snf.stanford.edu (Dick Crane) Date: Thu, 01 Mar 2001 13:28:08 -0800 Subject: Lab meeting 3/7/01 Message-ID: <3A9EBEE8.5A81438@snf.stanford.edu> SNF Labmembers Meeting All Labmembers are invited to attend the next Labmembers' meeting, which will be held on Wednesday, March 7, at 11 am, in the CISX 101 Auditorium. The agenda items are as follows: 1. About the SNF Faculty Advisory Committee -- Greg Kovacs 2. Labmember Survey results -- Greg Kovacs 3. State-of-the-Lab -- Dick Crane 4. New Lab Programs -- Dick Crane These meetings will be held from now on, on a monthly basis, usually the first Thursday in the calendar month. Check the website for dates. From jerabek at snf.stanford.edu Fri Mar 2 09:16:09 2001 From: jerabek at snf.stanford.edu (Paul Jerabek) Date: Fri, 2 Mar 2001 09:16:09 -0800 (PST) Subject: Laser mask writer Message-ID: Laser mask writer is finaly back on line.However I have a huge backlog of orders so it will take some time to work that down to normal.I am determined to catch up within one week. -Paul From mahnaz at snf.stanford.edu Fri Mar 2 15:14:26 2001 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Fri, 02 Mar 2001 15:14:26 -0800 Subject: clean up Message-ID: <3AA02952.27AF79EB@snf.stanford.edu> Hello all, Just a reminder to all the lab members that Our facility is a shared facility. We are all expected to clean up after our self and not miss use the lab and equipment. Today I cleaned up so many wafers left unattended for days, gloves, chemical left by the Head way with no hazardous sheet for few days. One more incident and I will start taking privileges away for at least one month at the time. To the person who broke a wafers in the Laurell system and left the mess for Mario and I to clean, Come and explain this to me by Monday morning, I am taking your name off from the system for month any way. You have damaged the chuck. Mahnaz -------------- next part -------------- An HTML attachment was scrubbed... URL: From kasnavi at stanford.edu Sun Mar 4 23:06:47 2001 From: kasnavi at stanford.edu (Reza Kasnavi) Date: Sun, 4 Mar 2001 23:06:47 -0800 (PST) Subject: Reminder: Reza Kasnavi's PhD Orals Message-ID: Special University Ph.D. Oral Seminar ------------------------------------- Arsenic Pile-up at the Si/SiO2 Interface and its Impact on Scaling Shallow Junctions Reza Kasnavi Integrated Circuits Laboratory Electrical Engineering Department 10:00 am Monday, March 5th, 2001 (Refreshments will be served at 9:45 am) Stanford University, EE Packard Building, Room 101 Scaling Metal-Oxide-Semiconductor (MOS) technology to the sub-0.1um regime faces many challenges. In front end processing, shrinking transistors requires more abrupt Source/Drain Extension (SDE) profiles with lower sheet resistances while decreasing junction depths at the same time. Ion implantation followed by a high temperature Rapid Thermal Anneal (RTA) has been and is projected to be the dominant technology to introduce and then activate dopants in silicon. A thin SiO2 film is usually used to prevent dopants from outgasing during the activation anneal. However, a stationary Si/SiO2 interface is capable of trapping a significant amount of an implanted arsenic dose during annealing. This dose loss affects the gate overlap capacitance, as well as the junction depth and the external resistance in the source/drain extensions of an MOS device. We have studied the transient behavior of arsenic pile-up at the Si/SiO2 interface. Using monolayer chemical etching and high resolution XPS, we have characterized the arsenic pile-up. We have investigated arsenic dose loss and diffusion in ultra low energy implants. An anomalous diffusion of 1 keV arsenic implants was observed. As a result of the trade off between junction depth and sheet resistance limits, 1 keV As implants and RTA anneals cannot meet the technology road map requirements beyond 2005. From king at snf.stanford.edu Mon Mar 5 12:21:52 2001 From: king at snf.stanford.edu (Robin King) Date: Mon, 5 Mar 2001 12:21:52 -0800 (PST) Subject: Lab Etiquette Message-ID: Dear lab users, This is a reminder to please return items you use to their normal locations after you're through. This isn't hard- it's just part of cleaning up after yourselves when you've finished a process. This also includes filling out logbooks, writing equipment comments, throwing away old lab wipes, etc. When things aren't returned, staff has to waste time searching in the lab- a major pain. That time gets charged to your account and causes more delays. We only have three process staff members so obviously we're "a little busy" right now. Thanks for helping, Robin From mtang at snf.stanford.edu Wed Mar 7 08:30:33 2001 From: mtang at snf.stanford.edu (Mary Tang) Date: Wed, 07 Mar 2001 08:30:33 -0800 Subject: Labmembers' Meeting Message-ID: <3AA66229.E4282F64@snf.stanford.edu> Greetings! Just a reminder of the Labmembers' Meeting today (Wednesday) at 11 am, in the CISX Auditorium. >From Greg Kovacs: An intro to the SNF Faculty Advisory Committee and the results of the recent Labmembers' Survey. >From Dick Crane: The State-of-the-Lab and the new Community Service Program. "Be there or be unaware." Mary -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu From ajmiller at HEP.Stanford.EDU Wed Mar 7 09:04:26 2001 From: ajmiller at HEP.Stanford.EDU (Aaron Miller) Date: Wed, 07 Mar 2001 09:04:26 -0800 Subject: SOI Wafer Source? Message-ID: <3AA66A1A.81981C2F@hep.stanford.edu> Hello, Does anyone have a source for 4" SOI wafers? Thanks, Aaron Miller ------------------------------------------------------------------------------ Aaron J. Miller Email : millera at stanford.edu Physics Department Web : http://www.stanford.edu/~millera Stanford University Office: (650) 723-4307 Lab: 725-2332 ------------------------------------------------------------------------------ From ajmiller at HEP.Stanford.EDU Wed Mar 7 12:15:17 2001 From: ajmiller at HEP.Stanford.EDU (Aaron Miller) Date: Wed, 07 Mar 2001 12:15:17 -0800 Subject: summary of SOI responses. Message-ID: <3AA696D5.B7592836@hep.stanford.edu> Thanks to everyone for all of the prompt responses on SOI sources. Below is a summary of the responses I got back. It looks like people use BCO and IBIS most frequently. Thanks again for the great response. -Aaron Cindra Opalsky: >For $500 per you can get 4" wafers with 2800A silicon over 3800A buried >oxide overnight from Wafer World (561 842 4441). SOITEC (soitec.com) has >1.5 microns silicon over 3 microns oxide, but the lead time is longer and >the minimum order was 25 wafers. Polishing Corporation of America >(pcasilicon.com) in Santa Clara says that the can make them - you get thick >silicon (40 microns) over a couple microns of oxide. Qian WANG: >You can connect with Nancy Dunlop, Senior Account Manager of Silicon Valley >Microelectronics, Inc. >1150 Campbell Avenue >San Jose, CA 95126 >Phone: 408-985-5109 >Fax: 408-244-6075 >E-mail: nancy at svmi.com >Web Site: www.svmi.com > >I recently made an order for some SOI wafers from the company. The price is >about $325/piece, at least 25 pieces Jonathon Goldman: >I think Sigen (www.sigen.com) and (Ibis) www.ibis.com sell >4" SOI wafers. JScalf: >I usually order them from WaferNet, a wafer broker. The representative with >whom I have dealt in the past is Hilda Brock. > >Hilda Brock >Phone: (408) 437-9747 x214 >Fax: (408)437-8912 >E-mail: hbrock at wafenet.com > >I believe you can also order them from BCO (www.bco-technologies.com), SEH >(www.sehamerica.com), and SOITEC (www.soitec.com). Nick Lindert: >Our group has bought 4" SOI wafers from IBIS and SOITEC. The IBIS >wafers were SIMOX wafers and the SOITEC wafers were smartcut. I believe >in each case the wafers cost around $300 if we ordered about 100 of them. >The order generally takes 6 months to get. Hope that helps. ------------------------------------------------------------------------------ Aaron J. Miller Email : millera at stanford.edu Physics Department Web : http://www.stanford.edu/~millera Stanford University Office: (650) 723-4307 Lab: 725-2332 ------------------------------------------------------------------------------ From beckwith at snf.stanford.edu Wed Mar 7 12:19:36 2001 From: beckwith at snf.stanford.edu (Sharleen Beckwith) Date: Wed, 7 Mar 2001 12:19:36 -0800 Subject: wire bonding Message-ID: Hi All: It seems the person who does wire bonding in Ginzton is on an extended vacation (until April) and we need to have some devices bonded. Does anyone have an outside source for wire bonding they can recommend? Thanks. Sharleen From lindaw at sunray.snffab.stanford.edu Wed Mar 7 13:02:41 2001 From: lindaw at sunray.snffab.stanford.edu (Linda Whittelsey) Date: Wed, 7 Mar 2001 13:02:41 -0800 (PST) Subject: wire bonding Message-ID: <200103072102.NAA27278@sunray.snffab.stanford.edu> ------------- Begin Forwarded Message ------------- Date: Wed, 7 Mar 2001 13:00:22 -0800 (PST) From: Linda Whittelsey Subject: wire bonding To: labusers at snf.stanford.edu Mime-Version: 1.0 Content-MD5: QIJKs5vflrieSTA5U+gxdA== Hybrid Circuits in sunnyvale does wirebonding services. 592 E. Weddell Dr, Sunnyvale, CA (408) 744-9080 Linda W. ------------- End Forwarded Message ------------- From mbadi at relgyro.Stanford.EDU Wed Mar 7 13:30:48 2001 From: mbadi at relgyro.Stanford.EDU (Mohammed H. Badi) Date: Wed, 7 Mar 2001 13:30:48 -0800 (PST) Subject: Laser Sawing Message-ID: Hi all, I was wondering if anyone knew of a laser saw on campus or in the area that I could get access to. Could you please let me know? Thanks. moe. -------- Mohammed H. Badi 650-906-0663 From beckwith at snf.stanford.edu Thu Mar 8 16:22:02 2001 From: beckwith at snf.stanford.edu (Sharleen Beckwith) Date: Thu, 8 Mar 2001 16:22:02 -0800 Subject: Geballe Laboratory for Advanced Materials (GLAM) will be offering FREE demonstration sessions Message-ID: >Mime-Version: 1.0 >X-Sender: turgut at turgut.pobox.stanford.edu >Date: Thu, 8 Mar 2001 16:05:02 -0800 >To: Recipient List Suppressed:; >From: Turgut Gur >Subject: FREE Demonstrations for GLAM Central Facilities > >Dear Friends, > >The Central Facilities of the Geballe Laboratory for Advanced Materials >(GLAM) will be offering FREE demonstration sessions for Stanford >researchers to help them learn about new analytical tools and techniques >for materials characterization. Please encourage your co-workers, >colleagues and students to take up on this opportunity. Feel free to pass >on the word to others who may be interested. The schedule is attached as a >Word 98 document. > >Please bring your samples and find out what you can learn about them. > >See you in our laboratories. > >Thank you > >Turgut Gur >===================================================== >Turgut M. Gur, Ph.D. >Technical Director >Geballe Laboratory for Advanced Materials >McCullough Building Rm. 135 >476 Lomita Mall >Stanford University >Stanford, CA 94305-4045 >Tel: (650) 723-6597 >Fax: (650) 723-3044 >turgut at stanford.edu >http://www-lam.stanford.edu/bios/gur.html -------------- next part -------------- A non-text attachment was scrubbed... Name: GLAM-CF=Free_Demo_schedule.doc Type: application/msword Size: 36864 bytes Desc: not available URL: From amol at stanford.edu Fri Mar 9 08:20:53 2001 From: amol at stanford.edu (Amol Joshi) Date: Fri, 9 Mar 2001 08:20:53 -0800 (PST) Subject: chemicals storage Message-ID: Hi, Today I found two full bottles of H2O2 (sealed in plastic bag) on the top shelf of chemicals cabinet. Those space are meant for empty bottles and hazardous waste containers. So please don't keep bottles with chemicals in them. Since the bottles are sealed in a plastic bag and don't have hazardous waste label, I kept them back in peroxide spaces. Can a staff member remove seals on HF bottles before placing them in chemicals cabinet? It is almost impossible to do so with several layers of gloves on. Also, why not get HCl bottles with bigger handle? Thanks, - Amol From shott at snf.stanford.edu Mon Mar 12 15:19:09 2001 From: shott at snf.stanford.edu (John Shott) Date: Mon, 12 Mar 2001 15:19:09 -0800 Subject: CIS Door Card Readers ... Software Upgrade Message-ID: <3AAD596D.EA9CEB47@snf.stanford.edu> CIS Building Occupants and SNF Lab Members: Tomorrow morning, Tuesday, March 13, from approximately 8 a.m. to 10 a.m., field service will be upgrading the EPROMs in the Proximity Card Readers that control access to the building and several labs within the building. While doors will not respond to cards during the actual EPROM changeover, field service will have a person stationed at each door during the time that it is inactive to let people in. As a result, nobody should be inconvenienced by this upgrade ... but I wanted to let you know that this will be happening. Please let me know if you encounter any problems during this time. Thanks, John From mahnaz at snf.stanford.edu Tue Mar 13 08:25:15 2001 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Tue, 13 Mar 2001 08:25:15 -0800 Subject: Reservation Message-ID: <3AAE49EB.A9064416@snf.stanford.edu> Hello all, This is a kind reminder that the reservation rule for litho is 2 hours only and that will be 4 slot on the sun ray reservation. mahnaz -------------- next part -------------- An HTML attachment was scrubbed... URL: From king at snf.stanford.edu Tue Mar 13 09:57:07 2001 From: king at snf.stanford.edu (Robin King) Date: Tue, 13 Mar 2001 09:57:07 -0800 (PST) Subject: Brownie Points Message-ID: I'd like to extend a note of appreciation to several people who have contributed to the lab recently: Yesterday Jien Cao and Matt Hopcroft helped me thoroughly clean all the Tylan oxidation and LPCVD guide tracks and helped wipe down the rest of the surfaces. We had found some metal flaking and corrosion which could contaminate these tubes and everyone's wafers. Ray Semour and Mike Dicky jumped right on the problem and have already made some great improvements. Linda Whittelsey organized the table behind the wetbench general, making some sense of the jumble of beakers, cassettes and other items. She always keeps an eye on that bench and has been a big help. And, Marilu Serrano has given me a list of lab users' names with the account names (for some reason it's a little hard to remember the account names of 450 lab users...). Now we can contact you a little more easily and make sure your correct account name gets added to those equipment qualified user lists. I will make a clean room copy and put it in the lab by the Tycom. Thanks to all, Robin King From kovacs at cis.Stanford.EDU Tue Mar 13 08:57:44 2001 From: kovacs at cis.Stanford.EDU (Greg Kovacs) Date: Tue, 13 Mar 2001 09:57:44 -0700 Subject: Brownie Points Message-ID: <200103131746.JAA17008@cis.Stanford.EDU> Robin, Now that's true community service! May I propose (at my expense) that we buy each of these heroic volunteers a case of beer? Best, Greg > > >I'd like to extend a note of appreciation to several people who have >contributed to the lab recently: > >Yesterday Jien Cao and Matt Hopcroft helped me thoroughly clean all >the Tylan oxidation and LPCVD guide tracks and helped wipe down the >rest of the surfaces. We had found some metal flaking and corrosion >which could contaminate these tubes and everyone's wafers. Ray Semour >and Mike Dicky jumped right on the problem and have already made some >great improvements. > >Linda Whittelsey organized the table behind the wetbench general, >making some sense of the jumble of beakers, cassettes and other items. >She always keeps an eye on that bench and has been a big help. > >And, Marilu Serrano has given me a list of lab users' names with the >account names (for some reason it's a little hard to remember the >account names of 450 lab users...). Now we can contact you a little >more easily and make sure your correct account name gets added to those >equipment qualified user lists. I will make a clean room copy and put it >in the lab by the Tycom. > >Thanks to all, >Robin King > > From shott at snf.stanford.edu Wed Mar 14 17:32:49 2001 From: shott at snf.stanford.edu (John Shott) Date: Wed, 14 Mar 2001 17:32:49 -0800 Subject: Coral Back Up ... Message-ID: <3AB01BC1.90953396@snf.stanford.edu> SNF lab members: Our network problems have been repaired and Coral is back on the air. We did purge the database of any enable entries at the time of the shutdown so nobody will be charged for extended periods of usage. Please enable all equipment in your name. Equipment "ON" lights will show for most pieces of equipment as a residual of our manual "All On" command. Please don't use equipment without enabling it in Coral ... that would be cheating, plus nobody else would be aware that you are using it. Thanks for your continued support, John From crichter at protogene.com Wed Mar 14 19:34:04 2001 From: crichter at protogene.com (Claudia Richter) Date: Wed, 14 Mar 2001 19:34:04 -0800 Subject: Etching Silicon With KOH Message-ID: I'm trying to etch large wells (1.5-3mm) in silicon at 100 microns deep. When I used 30% KOH at 80?C, I noticed that the bottom of the wells were grainy and not smooth. I found worse results using TMAH. Has this happened to anyone else and know of a way to minimize or eliminate this? Thanks in advance! -Claudia From amol at stanford.edu Thu Mar 15 08:49:34 2001 From: amol at stanford.edu (Amol Joshi) Date: Thu, 15 Mar 2001 08:49:34 -0800 (PST) Subject: vacuum wand usage Message-ID: Dear labusers, There are designated vacuum wands for different tylan furnaces. Today I found that someone had used the tylansige wand for tylan 5-7. This person did not shut the vacuum off after use. In case you didn't know, tylan 5, 6, 7 and 8 (aka tylansige) have separate wands. Tylansige wand is placed near wbdiff spin dryer side at the top and the other three wands are on the furnace side. This had been done to prevent accidental use of tylansige wand and it had worked well so far. Hitherto this wand had not been labelled. Now I have put clear labels on the wand handle. Please do not use tylansige wand for any other furnace and please pay attention to your actions in the lab. Your mistakes can cause irreversible damage to someone's work of several months. Thanks, - Amol From rcrane at snf.stanford.edu Thu Mar 15 15:58:19 2001 From: rcrane at snf.stanford.edu (Dick Crane) Date: Thu, 15 Mar 2001 15:58:19 -0800 Subject: Chilled water shutdown Message-ID: <3AB1571B.DEEC43AE@snf.stanford.edu> Chilled water services to CIS (including the fab) and CISX will be interrupted on Monday, 3/19/01 from 8:00 PM to 8:00 AM, Tuesday, 3/20/01. In an effort to minimize the impact on the labs and building occupants, back up systems will be operating to provide alternate cooling. The fab will be running normally in all areas except litho, which will lose its humidity control. The HVAC shop will provide spot coolers for the computer rooms. Compressed dry air service will not be interrupted. For further information, contact Richard Souza @ 3-1300 or Dick Crane @ 5-3665. Thanks, Dick Crane From mahnaz at snf.stanford.edu Thu Mar 15 16:38:04 2001 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Thu, 15 Mar 2001 16:38:04 -0800 Subject: reservation Message-ID: <3AB1606C.34BC3921@snf.stanford.edu> Hello all, I like to let every one know that it is unacceptable to make reservation and not show up. Today 3/15 Karl suss was booked all day with the exception of one individual no one else showed up. You are responsible to cancel your reservation in a timely manner or notify me. In the future I will charge you for the amount of time you have reserved and not showed up. Also I like to remind you of 2 hours reservation rule in Litho area. From grupp at snow.stanford.edu Fri Mar 16 09:25:30 2001 From: grupp at snow.stanford.edu (Dan Grupp) Date: Fri, 16 Mar 2001 09:25:30 -0800 (PST) Subject: Eyeglasses found Message-ID: Found a pair of glasses by terminals outside cleanroom. black wire frames. will leave on counter in gowning room. --------------------------------------------------------------------------- Dr. Daniel Grupp, Visiting Scholar Center for Integrated Systems Stanford University Stanford, CA 94305 (650) 724-6911 FAX: 723-4659 --------------------------------------------------------------------------- From mahnaz at snf.stanford.edu Fri Mar 16 12:25:50 2001 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Fri, 16 Mar 2001 12:25:50 -0800 Subject: Vender visit Message-ID: <3AB276CE.F0D5E7AE@snf.stanford.edu> Hello all, Karl suss eng. will be here on Monday 3/19 to install BSA microscope and solve our focus problem on the system. He usually gets here between 9-10am. I will need to have the system when he gets here. Sorry for the short notice and any inconvenient this may cause. mahnaz From sjlee at snf.stanford.edu Fri Mar 16 16:04:43 2001 From: sjlee at snf.stanford.edu (sjlee at snf.stanford.edu) Date: Fri, 16 Mar 2001 16:04:43 -0800 Subject: clean bench Message-ID: Hello, I apologize for this broad inquiry, but does anyone know of "borrowable" clean bench space in the CIS building, or perhaps elsewhere on campus?...one of those laminar flow benches for keeping components clean without the need for a full cleanroom. The application involves assembly and testing of some micro motion components and our request would be to use the space for just a couple of days. The alternative would be some general-purpose bench space in a full clean room, but I wonder if that might be harder to arrange... Many thanks, -John From amol at stanford.edu Fri Mar 16 17:19:42 2001 From: amol at stanford.edu (Amol Joshi) Date: Fri, 16 Mar 2001 17:19:42 -0800 (PST) Subject: TCACLEAN in tylan oxidation furnaces Message-ID: Dear labusers, I will be running TCACLEAN in tylan 1-4 and tylan 7 until we have a staff member to take care of this job. TCACLEAN will be started at 4pm on Tuesdays and Thursdays every week. The process approximately takes 14 hours (till 6am next day). In STEP 70, you can safely terminate the TCACLEAN by pressing 'Alarm Ack'. However, it will take some time for the furnace to cool down to 750C. For next few weeks, I will try to reserve TCACLEAN time as early as possible. Since the CORAL system does not allow me to reserve eqipment more than one week in advance, please assume that tylan oxidation furnaces are reserved for the time I mentioned above. Since someone had reserved tylan 1, 2 and 4 on Tuesday, March 20 I will run TCACLEAN in these furnaces on Sunday, March 18 from 8am to 10pm. This arrangement is only for this week. If you find that you cannot avoid running over TCACLEAN time, please notify me and start TCACLEAN only if no one else has reserved the furnace within next 14 hours. Your charges for TCACLEAN will be adjusted by the lab administration. Thanks, - Amol From beckwith at snf.stanford.edu Mon Mar 19 13:51:15 2001 From: beckwith at snf.stanford.edu (Sharleen Beckwith) Date: Mon, 19 Mar 2001 13:51:15 -0800 (PST) Subject: failure notice (fwd) Message-ID: I guess "labusers" is no longer politically correct... ---------- Forwarded message ---------- Date: 19 Mar 2001 19:16:26 -0000 From: MAILER-DAEMON at snf.stanford.edu To: beckwith at snf.stanford.edu Subject: failure notice Hi. This is the qmail-send program at snf.stanford.edu. I'm afraid I wasn't able to deliver your message to the following addresses. This is a permanent error; I've given up. Sorry it didn't work out. : Sorry, no mailbox here by that name. (#5.1.1) --- Below this line is a copy of the message. Return-Path: Received: (qmail 31974 invoked by uid 20039); 19 Mar 2001 19:16:26 -0000 Received: from localhost (sendmail-bs at 127.0.0.1) by localhost with SMTP; 19 Mar 2001 19:16:26 -0000 Date: Mon, 19 Mar 2001 11:16:26 -0800 (PST) From: Sharleen Beckwith To: labusers at snf.stanford.edu Subject: all day reservation on tylan2 tomorrow Message-ID: MIME-Version: 1.0 Content-Type: TEXT/PLAIN; charset=US-ASCII Dear labusers: Due to the untimely problem with wbdiff this morning, I am forced to do 3 oxidations tomorrow + a poly dep. Therefore, I have just broken a lab rule (one, I might add, that I am constantly complaining about when other people do this!) I will be using tylan2 all day tomorrow. I hope this does not inconvenience too many people...but just think of me, I will be here for 12 hours tomorrow. I am not looking forward to this at all. Sharleen From mtang at snf.stanford.edu Mon Mar 19 15:06:16 2001 From: mtang at snf.stanford.edu (Mary Tang) Date: Mon, 19 Mar 2001 15:06:16 -0800 Subject: wbdiff contamination Message-ID: <3AB690E8.3C8DEFE8@snf.stanford.edu> Dear labmembers -- There was an incident this morning where wafers containing silicides and photoresist were inadvertently cleaned at wbdiff instead of wbsilicide. The person responsible immediately recognized the mistake, took responsibility, and is now decontaminating the bench under the supervision of staff members. We will be considering retraining on both stations. Because of the open-ended nature of doing research it is impossible to put in fool-proof measures to prevent this kind of incident from recurring. And mistakes happen. Instead, we ask that everyone be very careful about their processing and respond quickly to mistakes and accidents. We are all part of the community: labmembers who act conscientiously will always be welcome here. New qualification procedures will be in effect at these stations: wbnonmetal, wbdiff, and wbsilicide. Qualification procedures will be more standardized and consist of demonstration of knowledge and a written test. New operating procedures for these stations will be posted in the next day or two. -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu From sanli at piezo.Stanford.EDU Tue Mar 20 12:06:12 2001 From: sanli at piezo.Stanford.EDU (Sanli Ergun) Date: Tue, 20 Mar 2001 12:06:12 -0800 (PST) Subject: photoresist removal Message-ID: Hi everybody, I had a high energy (90 kEV Phosphorus) ion implantation on my wafers. The resist thickness was 2.4 um. I have gone through matrix and wbnonmetal several times back and forth, but I can't get rid of some residues on the edges. Did any of you experience such a problem before, and figure out a way to solve it? Thanks, Sanli From king at snf.stanford.edu Wed Mar 21 19:18:12 2001 From: king at snf.stanford.edu (Robin King) Date: Wed, 21 Mar 2001 19:18:12 -0800 (PST) Subject: Another Farewell Message-ID: Dear Lab members and friends, After twenty one years here, I have accepted a position with another group. Tomorrow, Thursday March 22 is my last day working for SNF. I have enjoyed working with you and I'll miss interacting with you on many of your projects. Best wishes, Robin King PS- If you need help with any of the following equipment please contact Dick Crane (rcrane at snf). Innotec Evaporator Metallica Sputterer Gryphon Sputterer Balzers Sputterer Epitaxial Reactor STS PECVD PWS PECVD Tylan Oxidation/Anneal Furnaces Tylan Doping Furnaces Ion Implanter AG4108 Rapid Thermal Annealer AG210 Rapid Thermal Annealers Drytek4 Etcher Wetbench General (see Mary Tang) Wetbench GaAs Acid Wetbench GaAs Solvent GaAs Furnaces #22, 23 Dektak Profilometers Gaertner Ellipsometer Rudolph Ellipsometers Prometrix 4 Pt Probe Hugle 4 Pt Probe Olympus Photo Microscope Stress Test From amol at stanford.edu Fri Mar 23 08:29:28 2001 From: amol at stanford.edu (Amol Joshi) Date: Fri, 23 Mar 2001 08:29:28 -0800 (PST) Subject: Unusual H2SO4 bottle Message-ID: Hi labusers, Today I found a partially used H2SO4 bottle which looked brownish instead of usual white. When I opened it at wbdiff I found that there was some dirt inside! I have labelled the bottle as hazardous waste and kept it in the cabinet for pickup. If you come across a contaminated bottle, please label it and keep in empty containers/hazardous waste cabinet so that it is not used by someone else. Thanks, - Amol From aaronp at stanford.edu Fri Mar 23 09:38:23 2001 From: aaronp at stanford.edu (Aaron Partridge) Date: Fri, 23 Mar 2001 09:38:23 -0800 Subject: Unusual H2SO4 bottle In-Reply-To: References: Message-ID: labusers, this is not a small problem. i think we should look into this. how did it get in with the new H2SO4? do we have a training problem or a very forgetful user? perhaps it was switched by accident in storage? what about the hasmat label? what else could get switched? solvent in an H2SO4 bottle would be a possible worst-case extension. in my six years at this lab i have never seen this before, we should not just let it slide. aaron. > Hi labusers, > > Today I found a partially used H2SO4 bottle which looked brownish >instead of usual white. When I opened it at wbdiff I found that there was >some dirt inside! I have labelled the bottle as hazardous waste and kept >it in the cabinet for pickup. If you come across a contaminated bottle, >please label it and keep in empty containers/hazardous waste cabinet so >that it is not used by someone else. > > > Thanks, > > - Amol From amol at stanford.edu Sun Mar 25 11:25:29 2001 From: amol at stanford.edu (Amol Joshi) Date: Sun, 25 Mar 2001 11:25:29 -0800 (PST) Subject: TCACLEAN schedule change Message-ID: Hi, Last week I got many requests for changing TCACLEAN schedule on tylan oxidation furnaces. Since the tylan furnaces are not being used much on weekends, I will now start TCACLEAN at about 4pm on Fridays instead of Thursdays. Tuesday runs will start at 4pm as before. - Amol From beckwith at snf.stanford.edu Mon Mar 26 17:49:39 2001 From: beckwith at snf.stanford.edu (Sharleen Beckwith) Date: Mon, 26 Mar 2001 17:49:39 -0800 Subject: tylan1 reservation will be removed for this evening Message-ID: I will remove my reservation from tylan1 before I leave today. I will be using tylan2 instead. Dave Hong said I could use his reservation. Sharleen From rcrane at snf.stanford.edu Mon Mar 26 18:35:28 2001 From: rcrane at snf.stanford.edu (Dick Crane) Date: Mon, 26 Mar 2001 18:35:28 -0800 Subject: Expectations Message-ID: <3ABFFC70.B135C7CB@snf.stanford.edu> Labmembers -- There have been a number of incidents just in this last week which are indicative of a general laxness in observing standard procedures. I want to remind everyone that we are part of a community of users. Everything anyone does in the lab has the potential to affect everyone else's work. Among the incidents: 1. A contaminated bottle of sulfuric acid. It is suspected that a labmember may have decided to use an empty sulfuric acid bottle as a waste container. This is not standard lab practice. Only decontaminated, defaced bottles (which are provided in the back of the lab) are acceptable as hazardous waste containers. These should be accompanied by the proper hazardous waste label and placed in the appropriate shelf of the chemicals pass-through. 2. A labmember using equipment for which he was not formally qualified. This is unacceptable, not to mention very unsafe. Unqualified labmembers and labmembers who enable equipment for them risk having their SNF accounts deactivated. This has happened in the recent past. 3. Tylan furnaces being left open for extended periods of time. Again, this is unacceptable, as it risks damaging and contaminating equipment, not to mention is inconsiderate to others who may wish to use the equipment. This violates standard, established operating procedures for these tools. Those who violate these procedures risk being disqualified on these tools. 4. Wafers which once contained metal were processed through wbdiff. We recognize that accidents do happen. Luckily, this was reported as soon as it occurred, so that decontamination procedures were performed before anyone else's material (and the furnaces) were put at risk. 5. General disregard for cleanroom practices. Dedicated wet station cassettes should be handled only with clean vinyl/flexigloves over latex or neoprene gloves. These cassettes should generally not be removed from their stations, or if so, transported inside the station-dedicated boxes. Microscopes, nanospecs, and other analytical tools are generally not considered "clean" -- thus, special precautions should be taken to protect "clean" materials from direct contact with microscope/nanospec stages. Tweezer cleanliness policies need to be scrupulously observed. With the loss of two process technicians in as many weeks, we are extremely short-handed. The process staff cannot (and indeed, should not) police everyday activities in the lab. We ask that all labmembers review lab policies and operating procedures for the equipment used, and to be especially conscientious about observing standard lab policies. Over the next few weeks, we will begin a program to heighten awareness about contamination issues in the lab. More details will be announced before the Labmembers' meeting on Thursday, April 5. Lastly, I want to also recognize certain labmembers who have gone above and beyond the call of duty in being exemplary citizens and supporting our staff: Brian Greene, Sharleen Beckwith, Eric P., Aaron P., Amol Joshi, and the others. Thanks for helping, Dick Crane From narya at stanford.edu Wed Mar 28 08:38:57 2001 From: narya at stanford.edu (Niranjan Anand Talwalkar) Date: Wed, 28 Mar 2001 08:38:57 -0800 (PST) Subject: Prometrix help.. Message-ID: Hi, I am trying to measure some wafer with resistivities of about 0.01 Ohm-cm and I am having trouble measuring those. The machine complains of compliance errors. I have not been able adjust the settings of the program appropriately. If someone has more experience with the Prometrix RS35C tool, could you please contact me? -Niranjan x5 2861 narya at leland From rcrane at snf.stanford.edu Fri Mar 30 10:03:56 2001 From: rcrane at snf.stanford.edu (Dick Crane) Date: Fri, 30 Mar 2001 10:03:56 -0800 Subject: Labmember's Meeting Apr 5 Message-ID: <3AC4CA8C.456D39F9@snf.stanford.edu> I wish to invite the members of the SNF community to the Labmember's meeting on Thursday, April 5, at 10:00. The agenda will include: 1.) A 30 minute presentation by Prof. Saraswat on "Cleanliness and Contamination". 2.) A review of wetbench use protocol. 3.) Details of the SNF Community Service Plan. I would also like to take this opportunity to welcome on board a new member of our process staff, Ulrike (Uli) Thumser. Uli has worked as a research technician at the Fraunhofer Institute and Daimler Benz in Germany. More recently, Uli was with HP labs and Onix Microsystems. She will be starting in the Photo area. Welcome to the group Uli. Thanks, see you on Thursday. Dick Crane From mahnaz at snf.stanford.edu Fri Mar 30 14:59:22 2001 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Fri, 30 Mar 2001 14:59:22 -0800 Subject: EV bonder Message-ID: <3AC50FCA.E84F67F@snf.stanford.edu> Hello all, I like to let you know that Chad Brubaker an staff engineer from electronic vision will be here On Thursday April 5th. we will spend most of the morning in the lab try to cover both EV aligner and bonder as far as the equipment and running it goes. Chad is brining a 3" shadow masking tool for show and tell. chad needs to leave early in the afternoon so we will get together after lunch and then there will be a presentation at 1:30 in the CIS 101 conference room. The schedule might slightly change as of I am not sure of his exact time of leaving. People new to the bonding process are encouraged to come to the presentation with all their questions. Comments and suggestions are welcome. mahnaz From jerabek at snf.stanford.edu Fri Mar 30 15:42:26 2001 From: jerabek at snf.stanford.edu (Paul Jerabek) Date: Fri, 30 Mar 2001 15:42:26 -0800 (PST) Subject: finished masks Message-ID: The people who want to pick up their finished masks should see Mahnaz Mansourpour.She will let you in my office.All the masks have your name on it. -Paul P.S. I will be out of town from 4/2 to 4/6 ..