diffusion barrier for Cu on Si

Shi, Frank F. fshi at SLAC.Stanford.EDU
Thu Nov 8 21:09:28 PST 2001


Typically one can use Ta or TaN as barrier layers. But I don't think CIS can do Ta or TaN, can they? Good luck.

-----Original Message-----
From: Yu-Ju Lin [mailto:yjlin at Stanford.EDU]
Sent: Thursday, November 08, 2001 8:18 PM
To: labmembers at snf.stanford.edu
Subject: diffusion barrier for Cu on Si


Hi all,

I wonder if anybody is processing Cu on Si? I would like to know the
diffusion barrier for that. Is the Cu diffusion into SiO2 also comparable
to that into Si?

Thanks!

Yu-ju



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