From hdkim at stanford.edu Wed Sep 5 11:39:02 2001 From: hdkim at stanford.edu (Harold D. Kim) Date: Wed, 5 Sep 2001 11:39:02 -0700 Subject: Fab shutdown Aug 25 Message-ID: Major fab shutdown: The exhaust/scrubber system for the fab will be upgraded on Saturday, August 25. During the motor and controller changeout, most of the fab will be unavailable for use. Any equipment using exhaust air service or toxic or pyrophoric gases must be shut down. See attached list for details. The photolithography area is unaffected and can be used all day. All wet benches, furnaces, and etchers will be disabled. Hot pots will be turned off by midnight for cooling and draining. Gases will be turned off at 0700. Work on the exhaust fans should be completed by 1600. Gases will be turned on by 1700. Hot pots may be filled as soon as the exhaust sysytem is up. Check for a status posting at the fab entry door. Sorry for the inconvenience Dick -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From hdkim at stanford.edu Wed Sep 5 11:39:03 2001 From: hdkim at stanford.edu (Harold D. Kim) Date: Wed, 5 Sep 2001 11:39:03 -0700 Subject: [Fwd: Do you have ever made Making Mylar mask using AutoCad?] Message-ID: exe -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From hdkim at stanford.edu Wed Sep 5 11:39:14 2001 From: hdkim at stanford.edu (Harold D. Kim) Date: Wed, 5 Sep 2001 11:39:14 -0700 Subject: Fab shutdown Aug 25 Message-ID: Major fab shutdown: The exhaust/scrubber system for the fab will be upgraded on Saturday, August 25. During the motor and controller changeout, most of the fab will be unavailable for use. Any equipment using exhaust air service or toxic or pyrophoric gases must be shut down. See attached list for details. The photolithography area is unaffected and can be used all day. All wet benches, furnaces, and etchers will be disabled. Hot pots will be turned off by midnight for cooling and draining. Gases will be turned off at 0700. Work on the exhaust fans should be completed by 1600. Gases will be turned on by 1700. Hot pots may be filled as soon as the exhaust sysytem is up. Check for a status posting at the fab entry door. Sorry for the inconvenience Dick -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From hdkim at stanford.edu Wed Sep 5 11:39:15 2001 From: hdkim at stanford.edu (Harold D. Kim) Date: Wed, 5 Sep 2001 11:39:15 -0700 Subject: [Fwd: Do you have ever made Making Mylar mask using AutoCad?] Message-ID: -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From l.fama at bioprocessors.com Wed Sep 5 12:02:52 2001 From: l.fama at bioprocessors.com (Larry Fama) Date: Wed, 05 Sep 2001 19:02:52 +0000 Subject: [Fwd: shadowmask info] Message-ID: <008701c1363d$5ab23d20$0300a8c0@larry> Here is the attachment, I tried to send earlier. Sorry for the inconvenient, I am not sure what happened. I did get a copy of the email and mine was in there. mahnaz -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From h_d_kim at hotmail.com Wed Sep 5 12:12:25 2001 From: h_d_kim at hotmail.com (Harold Kim) Date: Wed, 05 Sep 2001 19:12:25 +0000 Subject: VIRUS ALERT! Message-ID: if you see emails sent from hdkim at stanford.edu with attachments, delete them immediately. they are infected with a nasty virus program called 'emanuel.exe'. it automatically sends emails to all the members on your personal mailing list. NEVER OPEN THE ATTACHMENT! i am very sorry about this. _________________________________________________________________ Get your FREE download of MSN Explorer at http://explorer.msn.com/intl.asp From l.fama at bioprocessors.com Wed Sep 5 12:08:24 2001 From: l.fama at bioprocessors.com (Larry Fama) Date: Wed, 05 Sep 2001 19:08:24 +0000 Subject: Fab shutdown Aug 25 Message-ID: <00a801c1363e$20208940$0300a8c0@larry> Major fab shutdown: The exhaust/scrubber system for the fab will be upgraded on Saturday, August 25. During the motor and controller changeout, most of the fab will be unavailable for use. Any equipment using exhaust air service or toxic or pyrophoric gases must be shut down. See attached list for details. The photolithography area is unaffected and can be used all day. All wet benches, furnaces, and etchers will be disabled. Hot pots will be turned off by midnight for cooling and draining. Gases will be turned off at 0700. Work on the exhaust fans should be completed by 1600. Gases will be turned on by 1700. Hot pots may be filled as soon as the exhaust sysytem is up. Check for a status posting at the fab entry door. Sorry for the inconvenience Dick -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From rcrane at snf.stanford.edu Wed Sep 5 13:10:41 2001 From: rcrane at snf.stanford.edu (Dick Crane) Date: Wed, 05 Sep 2001 13:10:41 -0700 Subject: Members meeting SEP 6, noon Message-ID: <3B9686C1.7E9100B2@snf.stanford.edu> Yes, it's that time again. The next Labmembers' meeting is scheduled for Thursday, September 6, at noon, in CISX 338. As before, it will be informal; however, we plan on covering the topics listed below. Lunch will be provided. Hope to see you there! Topics for Discussion: 1. SNF Affiliates Program. A new program directed at improvements for the community. 2. Annual Reports. Yes, it's close to that time of year: NNUN renewal. All projects/groups are expected to contribute. 3. Equipment wish list. What would you like to see in the lab? See you there, Dick From hdkim at stanford.edu Wed Sep 5 13:54:29 2001 From: hdkim at stanford.edu (Harold D. Kim) Date: Wed, 5 Sep 2001 13:54:29 -0700 Subject: Fab shutdown Aug 25 Message-ID: Major fab shutdown: The exhaust/scrubber system for the fab will be upgraded on Saturday, August 25. During the motor and controller changeout, most of the fab will be unavailable for use. Any equipment using exhaust air service or toxic or pyrophoric gases must be shut down. See attached list for details. The photolithography area is unaffected and can be used all day. All wet benches, furnaces, and etchers will be disabled. Hot pots will be turned off by midnight for cooling and draining. Gases will be turned off at 0700. Work on the exhaust fans should be completed by 1600. Gases will be turned on by 1700. Hot pots may be filled as soon as the exhaust sysytem is up. Check for a status posting at the fab entry door. Sorry for the inconvenience Dick -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From hdkim at stanford.edu Wed Sep 5 13:54:29 2001 From: hdkim at stanford.edu (Harold D. Kim) Date: Wed, 5 Sep 2001 13:54:29 -0700 Subject: [Fwd: Do you have ever made Making Mylar mask using AutoCad?] Message-ID: -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From hdkim at stanford.edu Wed Sep 5 13:54:38 2001 From: hdkim at stanford.edu (Harold D. Kim) Date: Wed, 5 Sep 2001 13:54:38 -0700 Subject: [Fwd: Do you have ever made Making Mylar mask using AutoCad?] Message-ID: -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From hdkim at stanford.edu Wed Sep 5 13:54:33 2001 From: hdkim at stanford.edu (Harold D. Kim) Date: Wed, 5 Sep 2001 13:54:33 -0700 Subject: Fab shutdown Aug 25 Message-ID: Major fab shutdown: The exhaust/scrubber system for the fab will be upgraded on Saturday, August 25. During the motor and controller changeout, most of the fab will be unavailable for use. Any equipment using exhaust air service or toxic or pyrophoric gases must be shut down. See attached list for details. The photolithography area is unaffected and can be used all day. All wet benches, furnaces, and etchers will be disabled. Hot pots will be turned off by midnight for cooling and draining. Gases will be turned off at 0700. Work on the exhaust fans should be completed by 1600. Gases will be turned on by 1700. Hot pots may be filled as soon as the exhaust sysytem is up. Check for a status posting at the fab entry door. Sorry for the inconvenience Dick -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From hdkim at stanford.edu Wed Sep 5 13:54:34 2001 From: hdkim at stanford.edu (Harold D. Kim) Date: Wed, 5 Sep 2001 13:54:34 -0700 Subject: [Fwd: Do you have ever made Making Mylar mask using AutoCad?] Message-ID: -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From hdkim at stanford.edu Wed Sep 5 13:54:38 2001 From: hdkim at stanford.edu (Harold D. Kim) Date: Wed, 5 Sep 2001 13:54:38 -0700 Subject: Fab shutdown Aug 25 Message-ID: Major fab shutdown: The exhaust/scrubber system for the fab will be upgraded on Saturday, August 25. During the motor and controller changeout, most of the fab will be unavailable for use. Any equipment using exhaust air service or toxic or pyrophoric gases must be shut down. See attached list for details. The photolithography area is unaffected and can be used all day. All wet benches, furnaces, and etchers will be disabled. Hot pots will be turned off by midnight for cooling and draining. Gases will be turned off at 0700. Work on the exhaust fans should be completed by 1600. Gases will be turned on by 1700. Hot pots may be filled as soon as the exhaust sysytem is up. Check for a status posting at the fab entry door. Sorry for the inconvenience Dick -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From hdkim at stanford.edu Wed Sep 5 13:54:53 2001 From: hdkim at stanford.edu (Harold D. Kim) Date: Wed, 5 Sep 2001 13:54:53 -0700 Subject: Fab shutdown Aug 25 Message-ID: Major fab shutdown: The exhaust/scrubber system for the fab will be upgraded on Saturday, August 25. During the motor and controller changeout, most of the fab will be unavailable for use. Any equipment using exhaust air service or toxic or pyrophoric gases must be shut down. See attached list for details. The photolithography area is unaffected and can be used all day. All wet benches, furnaces, and etchers will be disabled. Hot pots will be turned off by midnight for cooling and draining. Gases will be turned off at 0700. Work on the exhaust fans should be completed by 1600. Gases will be turned on by 1700. Hot pots may be filled as soon as the exhaust sysytem is up. Check for a status posting at the fab entry door. Sorry for the inconvenience Dick -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From hdkim at stanford.edu Wed Sep 5 13:54:43 2001 From: hdkim at stanford.edu (Harold D. Kim) Date: Wed, 5 Sep 2001 13:54:43 -0700 Subject: [Fwd: Do you have ever made Making Mylar mask using AutoCad?] Message-ID: -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From hdkim at stanford.edu Wed Sep 5 13:54:43 2001 From: hdkim at stanford.edu (Harold D. Kim) Date: Wed, 5 Sep 2001 13:54:43 -0700 Subject: Fab shutdown Aug 25 Message-ID: Major fab shutdown: The exhaust/scrubber system for the fab will be upgraded on Saturday, August 25. During the motor and controller changeout, most of the fab will be unavailable for use. Any equipment using exhaust air service or toxic or pyrophoric gases must be shut down. See attached list for details. The photolithography area is unaffected and can be used all day. All wet benches, furnaces, and etchers will be disabled. Hot pots will be turned off by midnight for cooling and draining. Gases will be turned off at 0700. Work on the exhaust fans should be completed by 1600. Gases will be turned on by 1700. Hot pots may be filled as soon as the exhaust sysytem is up. Check for a status posting at the fab entry door. Sorry for the inconvenience Dick -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From hdkim at stanford.edu Wed Sep 5 13:54:47 2001 From: hdkim at stanford.edu (Harold D. Kim) Date: Wed, 5 Sep 2001 13:54:47 -0700 Subject: Fab shutdown Aug 25 Message-ID: Major fab shutdown: The exhaust/scrubber system for the fab will be upgraded on Saturday, August 25. During the motor and controller changeout, most of the fab will be unavailable for use. Any equipment using exhaust air service or toxic or pyrophoric gases must be shut down. See attached list for details. The photolithography area is unaffected and can be used all day. All wet benches, furnaces, and etchers will be disabled. Hot pots will be turned off by midnight for cooling and draining. Gases will be turned off at 0700. Work on the exhaust fans should be completed by 1600. Gases will be turned on by 1700. Hot pots may be filled as soon as the exhaust sysytem is up. Check for a status posting at the fab entry door. Sorry for the inconvenience Dick -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From hdkim at stanford.edu Wed Sep 5 13:54:49 2001 From: hdkim at stanford.edu (Harold D. Kim) Date: Wed, 5 Sep 2001 13:54:49 -0700 Subject: [Fwd: Do you have ever made Making Mylar mask using AutoCad?] Message-ID: -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From hdkim at stanford.edu Wed Sep 5 13:54:55 2001 From: hdkim at stanford.edu (Harold D. Kim) Date: Wed, 5 Sep 2001 13:54:55 -0700 Subject: [Fwd: Do you have ever made Making Mylar mask using AutoCad?] Message-ID: -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From hdkim at stanford.edu Wed Sep 5 13:55:06 2001 From: hdkim at stanford.edu (Harold D. Kim) Date: Wed, 5 Sep 2001 13:55:06 -0700 Subject: Fab shutdown Aug 25 Message-ID: Major fab shutdown: The exhaust/scrubber system for the fab will be upgraded on Saturday, August 25. During the motor and controller changeout, most of the fab will be unavailable for use. Any equipment using exhaust air service or toxic or pyrophoric gases must be shut down. See attached list for details. The photolithography area is unaffected and can be used all day. All wet benches, furnaces, and etchers will be disabled. Hot pots will be turned off by midnight for cooling and draining. Gases will be turned off at 0700. Work on the exhaust fans should be completed by 1600. Gases will be turned on by 1700. Hot pots may be filled as soon as the exhaust sysytem is up. Check for a status posting at the fab entry door. Sorry for the inconvenience Dick -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From hdkim at stanford.edu Wed Sep 5 13:55:10 2001 From: hdkim at stanford.edu (Harold D. Kim) Date: Wed, 5 Sep 2001 13:55:10 -0700 Subject: Fab shutdown Aug 25 Message-ID: Major fab shutdown: The exhaust/scrubber system for the fab will be upgraded on Saturday, August 25. During the motor and controller changeout, most of the fab will be unavailable for use. Any equipment using exhaust air service or toxic or pyrophoric gases must be shut down. See attached list for details. The photolithography area is unaffected and can be used all day. All wet benches, furnaces, and etchers will be disabled. Hot pots will be turned off by midnight for cooling and draining. Gases will be turned off at 0700. Work on the exhaust fans should be completed by 1600. Gases will be turned on by 1700. Hot pots may be filled as soon as the exhaust sysytem is up. Check for a status posting at the fab entry door. Sorry for the inconvenience Dick -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From hdkim at stanford.edu Wed Sep 5 13:55:15 2001 From: hdkim at stanford.edu (Harold D. Kim) Date: Wed, 5 Sep 2001 13:55:15 -0700 Subject: Fab shutdown Aug 25 Message-ID: Major fab shutdown: The exhaust/scrubber system for the fab will be upgraded on Saturday, August 25. During the motor and controller changeout, most of the fab will be unavailable for use. Any equipment using exhaust air service or toxic or pyrophoric gases must be shut down. See attached list for details. The photolithography area is unaffected and can be used all day. All wet benches, furnaces, and etchers will be disabled. Hot pots will be turned off by midnight for cooling and draining. Gases will be turned off at 0700. Work on the exhaust fans should be completed by 1600. Gases will be turned on by 1700. Hot pots may be filled as soon as the exhaust sysytem is up. Check for a status posting at the fab entry door. Sorry for the inconvenience Dick -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From hdkim at stanford.edu Wed Sep 5 13:55:20 2001 From: hdkim at stanford.edu (Harold D. Kim) Date: Wed, 5 Sep 2001 13:55:20 -0700 Subject: [Fwd: Do you have ever made Making Mylar mask using AutoCad?] Message-ID: -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From hdkim at stanford.edu Wed Sep 5 13:55:00 2001 From: hdkim at stanford.edu (Harold D. Kim) Date: Wed, 5 Sep 2001 13:55:00 -0700 Subject: Fab shutdown Aug 25 Message-ID: Major fab shutdown: The exhaust/scrubber system for the fab will be upgraded on Saturday, August 25. During the motor and controller changeout, most of the fab will be unavailable for use. Any equipment using exhaust air service or toxic or pyrophoric gases must be shut down. See attached list for details. The photolithography area is unaffected and can be used all day. All wet benches, furnaces, and etchers will be disabled. Hot pots will be turned off by midnight for cooling and draining. Gases will be turned off at 0700. Work on the exhaust fans should be completed by 1600. Gases will be turned on by 1700. Hot pots may be filled as soon as the exhaust sysytem is up. Check for a status posting at the fab entry door. Sorry for the inconvenience Dick -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From hdkim at stanford.edu Wed Sep 5 13:55:01 2001 From: hdkim at stanford.edu (Harold D. Kim) Date: Wed, 5 Sep 2001 13:55:01 -0700 Subject: [Fwd: Do you have ever made Making Mylar mask using AutoCad?] Message-ID: -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From hdkim at stanford.edu Wed Sep 5 13:55:06 2001 From: hdkim at stanford.edu (Harold D. Kim) Date: Wed, 5 Sep 2001 13:55:06 -0700 Subject: [Fwd: Do you have ever made Making Mylar mask using AutoCad?] Message-ID: -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From hdkim at stanford.edu Wed Sep 5 13:55:26 2001 From: hdkim at stanford.edu (Harold D. Kim) Date: Wed, 5 Sep 2001 13:55:26 -0700 Subject: [Fwd: Do you have ever made Making Mylar mask using AutoCad?] Message-ID: -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From hdkim at stanford.edu Wed Sep 5 13:55:25 2001 From: hdkim at stanford.edu (Harold D. Kim) Date: Wed, 5 Sep 2001 13:55:25 -0700 Subject: Fab shutdown Aug 25 Message-ID: Major fab shutdown: The exhaust/scrubber system for the fab will be upgraded on Saturday, August 25. During the motor and controller changeout, most of the fab will be unavailable for use. Any equipment using exhaust air service or toxic or pyrophoric gases must be shut down. See attached list for details. The photolithography area is unaffected and can be used all day. All wet benches, furnaces, and etchers will be disabled. Hot pots will be turned off by midnight for cooling and draining. Gases will be turned off at 0700. Work on the exhaust fans should be completed by 1600. Gases will be turned on by 1700. Hot pots may be filled as soon as the exhaust sysytem is up. Check for a status posting at the fab entry door. Sorry for the inconvenience Dick -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From hdkim at stanford.edu Wed Sep 5 13:55:20 2001 From: hdkim at stanford.edu (Harold D. Kim) Date: Wed, 5 Sep 2001 13:55:20 -0700 Subject: Fab shutdown Aug 25 Message-ID: Major fab shutdown: The exhaust/scrubber system for the fab will be upgraded on Saturday, August 25. During the motor and controller changeout, most of the fab will be unavailable for use. Any equipment using exhaust air service or toxic or pyrophoric gases must be shut down. See attached list for details. The photolithography area is unaffected and can be used all day. All wet benches, furnaces, and etchers will be disabled. Hot pots will be turned off by midnight for cooling and draining. Gases will be turned off at 0700. Work on the exhaust fans should be completed by 1600. Gases will be turned on by 1700. Hot pots may be filled as soon as the exhaust sysytem is up. Check for a status posting at the fab entry door. Sorry for the inconvenience Dick -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From hdkim at stanford.edu Wed Sep 5 13:55:11 2001 From: hdkim at stanford.edu (Harold D. Kim) Date: Wed, 5 Sep 2001 13:55:11 -0700 Subject: [Fwd: Do you have ever made Making Mylar mask using AutoCad?] Message-ID: -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From hdkim at stanford.edu Wed Sep 5 13:55:16 2001 From: hdkim at stanford.edu (Harold D. Kim) Date: Wed, 5 Sep 2001 13:55:16 -0700 Subject: [Fwd: Do you have ever made Making Mylar mask using AutoCad?] Message-ID: -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From hdkim at stanford.edu Wed Sep 5 13:55:33 2001 From: hdkim at stanford.edu (Harold D. Kim) Date: Wed, 5 Sep 2001 13:55:33 -0700 Subject: Fab shutdown Aug 25 Message-ID: Major fab shutdown: The exhaust/scrubber system for the fab will be upgraded on Saturday, August 25. During the motor and controller changeout, most of the fab will be unavailable for use. Any equipment using exhaust air service or toxic or pyrophoric gases must be shut down. See attached list for details. The photolithography area is unaffected and can be used all day. All wet benches, furnaces, and etchers will be disabled. Hot pots will be turned off by midnight for cooling and draining. Gases will be turned off at 0700. Work on the exhaust fans should be completed by 1600. Gases will be turned on by 1700. Hot pots may be filled as soon as the exhaust sysytem is up. Check for a status posting at the fab entry door. Sorry for the inconvenience Dick -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From hdkim at stanford.edu Wed Sep 5 13:55:35 2001 From: hdkim at stanford.edu (Harold D. Kim) Date: Wed, 5 Sep 2001 13:55:35 -0700 Subject: [Fwd: Do you have ever made Making Mylar mask using AutoCad?] Message-ID: -------------- next part -------------- A non-text attachment was scrubbed... Name: Emanuel.exe Type: application/x-msdownload Size: 41984 bytes Desc: not available URL: From cclin at snow.stanford.edu Wed Sep 5 15:56:26 2001 From: cclin at snow.stanford.edu (Chien Chung Lin) Date: Wed, 5 Sep 2001 15:56:26 -0700 (PDT) Subject: silicon dioxide PECVD Message-ID: Dear colleagues: I am wondering if you have information about companies which will do silicon dioxide PECVD for general customers. Please send me emails if you have this. Thank you very much. Regards, Chien-chung Lin From h_d_kim at hotmail.com Wed Sep 5 16:54:36 2001 From: h_d_kim at hotmail.com (Harold Kim) Date: Wed, 05 Sep 2001 23:54:36 +0000 Subject: VIRUS ALERT(apology) Message-ID: Dear labmembers, if you have received a message titled 'fab sutdown' today with an attachment from hdkim at stanford.edu, delete it immediately. it is a virus program called 'emanuel.exe'. NEVER OPEN IT! it works with microsoft outlook and looks for any email message with one attachment in your inbox, replaces the attachment with the virus program and sends itself to the same recipients. you won't notice that you are spreading this virus because it sort of works in the background. anyway i apologize for this mess, and hope none of you are affected by this. in case you are infected, download the antivirus software from http://www.symantec.com/avcenter/venc/data/w32.navidad.16896.html _________________________________________________________________ Get your FREE download of MSN Explorer at http://explorer.msn.com/intl.asp From pelton at stanford.edu Thu Sep 6 19:58:44 2001 From: pelton at stanford.edu (Matthew A Pelton) Date: Thu, 6 Sep 2001 19:58:44 -0700 (PDT) Subject: Refractive index of GaAs and AlAs Message-ID: Does anybody have a source for accurate values of the refractive indices of GaAs and AlAs at low temperature -- around 4K -- at wavelengths around 875nm? Thanks for your help, -- Matt Pelton From mahnaz at snf.stanford.edu Fri Sep 7 08:48:08 2001 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Fri, 07 Sep 2001 08:48:08 -0700 Subject: Garments Message-ID: <3B98EC38.2BE71862@snf.stanford.edu> Hello all, This is a kind reminder that to put the Clear Ring around your hanger as early Monday morning we will bring the untaged ( no ring) hangers down. Failure to do so might end up with no garment because we will send them all out on Tuesday morning and will not get the clean ones back till following Tuesday. I will really appreciate as much help as I can get. mahnaz From hdkim at stanford.edu Fri Sep 7 13:07:03 2001 From: hdkim at stanford.edu (Harold D. Kim) Date: Fri, 7 Sep 2001 16:07:03 -0400 Subject: [Fwd: Do you have ever made Making Mylar mask using AutoCad?] Message-ID: <200109072007.QAA05539@zcars0mt.> A non-text attachment was scrubbed... Name: not available Type: multipart/mixed Size: 57139 bytes Desc: not available URL: From mahnaz at snf.stanford.edu Mon Sep 10 13:06:26 2001 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Mon, 10 Sep 2001 13:06:26 -0700 Subject: reboot disk Message-ID: <3B9D1D42.134CB11D@snf.stanford.edu> Hello all, who ever has the reboot diskette for nano tool in litho area, please bring it back as soon as possible. mahnaz From mahnaz at snf.stanford.edu Mon Sep 10 13:46:26 2001 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Mon, 10 Sep 2001 13:46:26 -0700 Subject: Tempreture Message-ID: <3B9D26A2.2E7B9203@snf.stanford.edu> Hello all, The temp. in litho has been around 63 since 10 in the morning apparently there is some work getting done on the steam engine. I was not aware of this and just found out. This will affect the resist process. My understanding is that we should be back in business around 3 in the afternoon. I am extremely sorry for any inconvenient this had/may cause mahnaz From beckwith at snf.stanford.edu Mon Sep 10 13:58:32 2001 From: beckwith at snf.stanford.edu (Sharleen Beckwith) Date: Mon, 10 Sep 2001 13:58:32 -0700 Subject: Fwd: reboot disk for the Nanospec in the litho room Message-ID: >Delivered-To: beckwith at snf.stanford.edu >Mailing-List: contact labmembers-help at snf.stanford.edu; run by ezmlm >X-No-Archive: yes >List-Post: >List-Help: >List-Unsubscribe: >List-Subscribe: >Delivered-To: mailing list labmembers at snf.stanford.edu >Date: Mon, 10 Sep 2001 13:06:26 -0700 >From: Mahnaz Mansourpour >Organization: Stanford University >X-Accept-Language: en >To: Lab >Subject: reboot disk > >Hello all, > >who ever has the reboot diskette for nano tool in litho area, please >bring it back as soon as possible. > >mahnaz I would like to add that the Nanospec is not usable at this time because it cannot be rebooted (the backup disk seems to be missing as well). I have no idea why anyone would take this disk, but you have managed to stop all of my work because I cannot use the other Nanospec. PLEASE RETURN THE DISK! From beckwith at snf.stanford.edu Mon Sep 10 16:04:21 2001 From: beckwith at snf.stanford.edu (Sharleen Beckwith) Date: Mon, 10 Sep 2001 16:04:21 -0700 (PDT) Subject: The Nanospec reboot disk has been returned... Message-ID: the machine is up and running. Sharleen From rcrane at snf.stanford.edu Tue Sep 11 10:01:36 2001 From: rcrane at snf.stanford.edu (Dick Crane) Date: Tue, 11 Sep 2001 10:01:36 -0700 Subject: Yes, we are open, sep 11 Message-ID: <3B9E4370.BC8ACCAA@snf.stanford.edu> In regard to the terrorist attacks this morning on the east coast, the University and Nanofabrication Facility will be open as usual. Dick From DWeaver at sirostech.com Thu Sep 13 14:42:45 2001 From: DWeaver at sirostech.com (Daniel Weaver) Date: Thu, 13 Sep 2001 14:42:45 -0700 Subject: Black Wax Message-ID: Does anyone have any black wax or Apiezon W wax that I could borrow? I need just a little bit until my order comes in. Thank you Daniel Weaver Process Development Engineer Siros Technologies 101 Daggett Drive San Jose, CA. 95134 Phone: 408-474-3381 Fax: 408-954-9300 dweaver at sirostech.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From mahnaz at snf.stanford.edu Fri Sep 21 10:59:06 2001 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Fri, 21 Sep 2001 10:59:06 -0700 Subject: clean up Message-ID: <3BAB7FEA.49896ED1@snf.stanford.edu> Hello all, The space under the monitor next to SVG coater if full of Tweezers, please look in there and pick up your item. I will clean it up next week. mahnaz From ESaw at InLightCom.com Fri Sep 21 11:41:22 2001 From: ESaw at InLightCom.com (Eaden Saw) Date: Fri, 21 Sep 2001 11:41:22 -0700 Subject: 7" Mask holder Message-ID: <41A148CCA64FD511854F00034787A3DE84BD@TIGER> HI Lab member, Do you know where to order inexpensive single 7" mask holders? Thanks Eaden From ESaw at InLightCom.com Fri Sep 21 11:43:11 2001 From: ESaw at InLightCom.com (Eaden Saw) Date: Fri, 21 Sep 2001 11:43:11 -0700 Subject: clean up Message-ID: <41A148CCA64FD511854F00034787A3DE84BE@TIGER> Do you know a good metrology lab for measuring critical dimensions on wafers? Thanks Eaden -----Original Message----- From: Mahnaz Mansourpour [mailto:mahnaz at snf.stanford.edu] Sent: Friday, September 21, 2001 10:59 AM To: Lab Subject: clean up Hello all, The space under the monitor next to SVG coater if full of Tweezers, please look in there and pick up your item. I will clean it up next week. mahnaz From shott at snf.stanford.edu Mon Sep 24 08:31:44 2001 From: shott at snf.stanford.edu (John Shott) Date: Mon, 24 Sep 2001 08:31:44 -0700 Subject: Contributions for annual reports .... Message-ID: <3BAF51E0.59717A49@snf.stanford.edu> SNF Lab Members: We are coming up on our annual review of the NNUN program at NSF and we need your help. In particular, we need a summary transparency from each of you describing your progress and exciting recent results. I've attached a PowerPoint file that should make it easy for you to provide us with the information that we need. You should provide us with the title of your project, a few bullet points highlighting your project and what you have achieved, one or two good pictures, and appropriate information related to the people who did the work, their affiliation, etc. One foil, that's all we ask! If you had sent us one of these in May and would rather update what you submitted then, you may get it from Lourdes Ventura (lventura at snf.stanford.edu). We need everyone's compliance in this activity. Why? This is one of the things that helps convince NSF that a lot of good research and development is being done as a result of their investment in the NNUN in general and in SNF specifically. If they don't see strong results, they are less likely to continue to support us. If that happens, the cost to academic users of working in this facility will jump dramatically and the ability of non-Stanford people to utilize this facility at all will be in great jeopardy. I need your submissions no later than Monday, October 8. Please send them to Lourdes Ventura (lventura at snf.stanford.edu). If you have been working in the lab only a short time (say, less than 3 months), you may be excluded from this reporting requirement ... but you need to send Lourdes an e-mail message indicating that you do not yet have results to report. This is important to us and ALL lab members are required to report their results! People not replying to this request will notice that their Coral accounts have been closed starting on October 15. If your Coral access gets turned off for failure to contribute a report, it will likely take us quite a while to turn it back on as we will be quite busy preparing for the annual meeting. Thanks for your assistance and cooperation, John -------------- next part -------------- A non-text attachment was scrubbed... Name: SNF_Template.ppt Type: application/vnd.ms-powerpoint Size: 117248 bytes Desc: not available URL: From casey at reflectivity.com Mon Sep 24 15:16:46 2001 From: casey at reflectivity.com (Casey Feinstein) Date: Mon, 24 Sep 2001 15:16:46 -0700 Subject: SHipley LOL 2000 Message-ID: Hi Everyone, I'm looking for advice on getting good removal of LOL2000. I've tried several processes and have had no real success. Any suggestions? Thanks. Casey -------------- next part -------------- A non-text attachment was scrubbed... Name: winmail.dat Type: application/ms-tnef Size: 1532 bytes Desc: not available URL: From flannery at stanford.edu Mon Sep 24 17:08:24 2001 From: flannery at stanford.edu (Anthony Flannery) Date: Mon, 24 Sep 2001 17:08:24 -0700 Subject: SHipley LOL 2000 References: Message-ID: <3BAFCAF8.54733C7D@stanford.edu> Hi, I've had no problem removing it in heated 9500 resist remover. Granted this is a visual check on glass and not a chemical surface analysis, but it "looks" like a clean removal. Tony Casey Feinstein wrote: > Hi Everyone, > > I'm looking for advice on getting good removal of LOL2000. I've tried > several processes and have had no real success. Any suggestions? > Thanks. > > Casey > > ------------------------------------------------------------------------ > Name: winmail.dat > winmail.dat Type: application/ms-tnef > Encoding: base64 From shott at snf.stanford.edu Mon Sep 24 17:09:29 2001 From: shott at snf.stanford.edu (John Shott) Date: Mon, 24 Sep 2001 17:09:29 -0700 Subject: New release of Coral ... Message-ID: <3BAFCB39.74C0BCAF@snf.stanford.edu> SNF Lab Members: We are pleased to announce that we have installed a new version of Coral that, among other things, addresses some minor features that have been requested. Those features include: 1. The ability to enable a piece of equipment that is enabled by someone else. This will allow you to terminate someone else's use of a piece of equipment (and terminate their charges for a piece of equipment) and begin to charge it under your name. This will pop up a window that warns you "Machine x is already enabled by y. Do you still want to enable?" ... in case, you didn't actually want to enable that equipment. Also, when doing this, it doesn't physically disable the hardware interlock ... that stays on all of the time. This, we hope, will eliminate the problems of changing from one person to another. 2. A warning message if you are about to disable a piece of equipment that has been enabled by someone else. In this case you will receive a warning: "Machine x is already enabled by y. Do you still want to disable?" While you can still disable it ... this warns you and allows you to say no in case you were about to accidently disable a piece of equipment. 3. Default equipment history includes today. Previously, equiment history showed equipment usage through midnight of last night. Today's equipment history had to be shown using the "Forward" menu item. We have changed this so the default window now includes equipment usage for today. Remember, however, that equipment that is still enabled doesn't show up in history at all ... even if it has been enabled for a long time. Equipment usage doesn't become history until the equipment has been disabled. There are a variety of "under the covers" changes that, we believe, will contribute to the overall performance and stability of the Coral system ... but we won't bore you with those details. One project, however, that is a work in progress and deserves an update is Remote Coral access for people that are behind firewalls. Previously, people behind firewalls would get the message: "Unable to access equipment information" ... and then never got a functional Coral window. We have made a number of changes to eliminate this problem ... but have not yet been able to fully test them because we don't have an independent firewall from behind which we can conduct our own testing. Accordingly, we are looking for a couple of volunteers to help us to test and debug Remote Coral from behind a firewall. If you think that you are in this group and would like to help, please let us know. What we would like you to do is: 1. Check your Java Web Start installation to make sure that you are logging errors to a file that you can find ... this is found under the "Advanced" tab of the "Preferences" window. 2. Download and run the latest version of Remote Coral. 3. Tell us what happens on your screen. 4. Send us the log file that is generated. Note: the version that is out there may not work ... we are trying to debug those changes to make it work. We are looking for a couple of folks who are willing (and have the patience) to try this a two or three times as we try to get this capability fully functional. If you want to help to debug the "behind a firewall" problem, please send e-mail to coral at snf.stanford.edu ... Final note: people not behind a firewall should not be affected by these changes. Thanks, Your Coral Development Team From KCheng8988 at aol.com Mon Sep 24 17:29:00 2001 From: KCheng8988 at aol.com (KCheng8988 at aol.com) Date: Mon, 24 Sep 2001 20:29:00 EDT Subject: V-groove etching Message-ID: <10c.5f6d589.28e129cd@aol.com> Dear All, I am working on the width control of V-groove etching on (100) Si wafer after KOH etching. The width alwayse gets wider (6% variation) after the etching. Please advise any suggestion that can solve this problem. Thanks. ken cheng From shott at snf.stanford.edu Tue Sep 25 13:05:35 2001 From: shott at snf.stanford.edu (John Shott) Date: Tue, 25 Sep 2001 13:05:35 -0700 Subject: User Evaluation Survey Message-ID: <3BB0E38F.6A5065@snf.stanford.edu> SNF Lab Members: Each year the National Science Foundations asks us to survey all of the people making use of the Stanford Nanofabrication Facility as a means of measuring the effectivness of our program. Please take a minute and complete the following form and return it to feedback at snf.stanford.edu. (Note: to avoid sending your response to everyone on this mailing list, please make sure that you have removed "labmembers at snf.stanford.edu" from your reply.) Alternatively, we will place hard copies of this form near the lab entrance that you may fill out and drop in the nearby box. Thanks for your cooperation in this matter. John Shott NNUN User Evaluation Form NNUN Site: SNF Name: Coral login name: User Institution: Principal Investigator: Dates of Use (e.g. January 98 thru October 99): On-site { } or Remote (someone at the site did the work for you) { } Affiliation: Stanford { } Non-Stanford Academic { } Government { } Foreign { } Industrial { } Number of times you have used site (external users only. Number of discrete visits.): For the topics below please enter the most appropriate rating (5 is excellent. 1 is poor.): Facility preparation for your visit: Staff support: Adequacy of training: Quality of Equipment: Adequacy of the equipment for your needs: Accessibility of equipment: Achievement of your expectations: Value received for your expense: Overall effectiveness of the program: Specific comments: From grupp at snow.stanford.edu Tue Sep 25 13:18:53 2001 From: grupp at snow.stanford.edu (Dan Grupp) Date: Tue, 25 Sep 2001 13:18:53 -0700 (PDT) Subject: V-groove etching In-Reply-To: <10c.5f6d589.28e129cd@aol.com> Message-ID: Widening can be due to undercut. Undercut is due to misalignment of the 100 direction with the mask. If you look in SEM should see vertical ridges in groove. Spacing of ridges tells degree of misalignment (I may have photos of this). Solution: run a test patch on part of wafer with many grooves rotated by fractions of degree. Pick best one, then use it for alignment (or input a rotation). -Dan By the way, if you have misalignment, etch may not be self-limiting, keeps going but slowly. On Mon, 24 Sep 2001 KCheng8988 at aol.com wrote: > Dear All, > > I am working on the width control of V-groove etching on (100) Si wafer after KOH etching. The width alwayse gets wider (6% variation) after the etching. Please advise any suggestion that can solve this problem. Thanks. > > ken cheng > --------------------------------------------------------------------------- Dr. Daniel Grupp, Visiting Scholar Center for Integrated Systems Stanford University Stanford, CA 94305 (650) 724-6911 FAX: 723-4659 --------------------------------------------------------------------------- From jhsim at stanford.edu Wed Sep 26 19:47:37 2001 From: jhsim at stanford.edu (Jae Hoon Sim) Date: Wed, 26 Sep 2001 19:47:37 -0700 Subject: STS etching res cancelled at 2:00~4:00 am on Tursday Message-ID: <002f01c146fe$c4b02440$41a00c80@Stanford.EDU> -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtang at snf.stanford.edu Fri Sep 28 15:09:57 2001 From: mtang at snf.stanford.edu (Mary Tang) Date: Fri, 28 Sep 2001 15:09:57 -0700 Subject: Process Techs & Engineers Message-ID: <3BB4F535.E9C08884@snf.stanford.edu> Hello labmembers -- Through various channels, we've received a number of resumes in recent weeks from very experienced and qualified process technicians and engineers who are looking for new opportunities. If you or your labs would be interested, please contact me. Mary -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu From skollengode at megasense.com Fri Sep 28 17:09:05 2001 From: skollengode at megasense.com (S. Kollengode) Date: Fri, 28 Sep 2001 17:09:05 -0700 Subject: FW: Process Techs & Engineers Message-ID: Hello Mary, Nina Tikhomirova forwarded to my attention your email to her. Since I handle the recruiting function at MegaSense,please do route to my attention the resumes that you have gotten from interested process engineers and technicians. Thanks. Best Regards, ~~~~~~~~~~~~~~~~~~~~~~~~ Sara Kollengode Sr. Technical Recruiter MegaSense Inc. 1215 Bordeaux Drive Sunnyvale, CA 94089 T: 408-400-9707 M: 408-930-1374 ~~~~~~~~~~~~~~~~~~~~~~~~ -----Original Message----- From: Nina Tikhomirova [mailto:ntikho at megasense.com] Sent: Friday, September 28, 2001 4:38 PM To: skollengode at megasense.com Subject: Fwd: Process Techs & Engineers ---------- From: Mary Tang Date: Fri, 28 Sep 2001 15:09:57 -0700 To: labmembers at snf.stanford.edu Subject: Process Techs & Engineers Hello labmembers -- Through various channels, we've received a number of resumes in recent weeks from very experienced and qualified process technicians and engineers who are looking for new opportunities. If you or your labs would be interested, please contact me. Mary -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu From mtang at snf.stanford.edu Fri Sep 28 17:40:39 2001 From: mtang at snf.stanford.edu (Mary Tang) Date: Fri, 28 Sep 2001 17:40:39 -0700 Subject: Process Techs & Engineers Message-ID: <3BB51887.317E07BC@snf.stanford.edu> Hello again -- Goodness, you would think that we are nowhere near the brink of recession, given the flurry of responses from people who are hiring! To stave off further email requests, please note that I am not in the recruiting/job placement business -- it's just that we seem to have some good quality resumes and I did not want them to go to waste -- I think they'd make good labmembers. (Please don't ask me to forward your company info, to send just the "etch" people, or the ones from Berkeley Microlab -- Berkeley!?) Sadly, most all the resumes are hard copies, so I can't email them. Moreover, I don't want to just give resumes out -- I have specific permission to do so from a few, but others are unsolicited, and I do want to respect the privileged nature of this information. If you could stop by to look at them, and copy only the ones that are of interest to you, then I think that would not be inappropriate. I'm either in or around the office or lab (ha!) most of the time, so stop on by, or give me a call beforehand to make sure I'm in. Mary -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu From chion at stanford.edu Sat Sep 29 11:35:02 2001 From: chion at stanford.edu (Chi On Chui) Date: Sat, 29 Sep 2001 11:35:02 -0700 (PDT) Subject: Ge wafer source/vendor enquiry Message-ID: Dear SNF lab members, My name is Chi On, a grad student from Prof. Saraswat's Group. I am looking for wafer vendors selling pure Ge crystalline wafers. Could be you please kindly drop me a line if you have any contact with any wafer vendor (for either Si or Ge or else)? Thanks a lot! /Chi On