Fab shutdown Aug 25
Harold D. Kim
hdkim at stanford.edu
Wed Sep 5 13:54:53 PDT 2001
Major fab shutdown: The exhaust/scrubber system for the fab will be
upgraded on Saturday, August 25. During the motor and controller
changeout, most of the fab will be unavailable for use. Any equipment
using exhaust air service or toxic or pyrophoric gases must be shut
down. See attached list for details. The photolithography area is
unaffected and can be used all day.
All wet benches, furnaces, and etchers will be disabled. Hot pots will
be turned off by midnight for cooling and draining. Gases will be turned
off at 0700. Work on the exhaust fans should be completed by 1600. Gases
will be turned on by 1700. Hot pots may be filled as soon as the exhaust
sysytem is up. Check for a status posting at the fab entry door.
Sorry for the inconvenience
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