V-groove etching

KCheng8988 at aol.com KCheng8988 at aol.com
Mon Sep 24 17:29:00 PDT 2001


Dear All,

I am working on the width control of V-groove etching on (100) Si wafer after KOH etching. The width alwayse gets wider (6% variation) after the etching. Please advise any suggestion that can solve this problem. Thanks.

ken cheng



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