LRS-18 maskwriter

Paul Jerabek jerabek at
Mon Dec 2 15:40:58 PST 2002

 To whom it may concern,
Laser maskwriter is down with a serious problem. The stage laser
interferometer reports X-interferometer signal low , movement inhibit or
no stage air. Micronic field service has been called. I will keep you
posted om a progress of repair.

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