LRS-18 mask writer

Paul Jerabek jerabek at snf.stanford.edu
Thu Dec 5 13:28:05 PST 2002


 I have spoken too soon.System is down again, but this time with entirely
different problem. It won't stay in focus. Normaly once properly
calibrated the system should stay in focus for months. It was calibrated
yesterday, but now just after about 24 hrs.it's out of focus.I have colled
Micronic field engineering to address the problem.
-Paul




More information about the labmembers mailing list