SOI wafer vendor
maxy at stanford.edu
Thu Dec 12 10:40:25 PST 2002
I'm trying to buy 4~5 SOI wafers with the following specs.
But some vendors have a minimum number of wafers to order, such as 10.
Does anyone know a good vendor I can contact?
Specs of SOI wafers I'm looking for are .....
Device layer: 80 microns
Thermal Oxide: 1~1.5 microns
Si under Thermal Oxide: 500 microns
Dopant: either N or P type, resistivity ~10 ohm-cm
Thank you in advance for any advice.
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