Dry etch oxide

cshen at briontech.com cshen at briontech.com
Wed Dec 18 15:15:34 PST 2002


Dear labmembers,
Does anybody know how to etch SiOx in Drytek1? I tryied CF4 and SF6,
neither worked. The SiOx was deposited using sputtering.Thank you for
your help.
Chongfei






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