Hard planarization layer

Srikanth Ganesan sganesan at stanford.edu
Tue Feb 5 10:45:13 PST 2002

Dear lab members,

I want to know if anyone of you have experience with planarization. I
would like the final thickness of the planarization layer to be about
50-60nm. (either direct spinning or spinning and etch back). The surface
has to be very smooth and the planarization layer has to be very very
hard( I want to scan a read head in contact with the surface). I would
really appreciate if you could help me with this. Or if you know of
someone who would be able to help, please let me know. Thanks


Srikanth Ganesan                       PH:(RES) 650-852 9989
2179 Williams St,                      Email:sganesan at leland.stanford.edu
Palo Alto, CA 94306-1417               PH:(OFF) 650-724 4582

More information about the labmembers mailing list