Boron etch stop for KOH/TMAH etching

Juan Ferrera ferrera at snf.stanford.edu
Thu Feb 7 18:49:50 PST 2002


Dear lab members,

I need to fabricate 3 um-thick Si membranes, and plan to use a highly
boron-doped (>1E20 /cm^3) layer as an etch stop. If anyone has a process
to use diffusion or epi to get a similar etch stop layer, I'd love to
hear about it.

				Juan




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