Image Reversal using AZ5214

Ching-Hsiang Cheng cheng1 at stanford.edu
Wed Feb 13 12:20:38 PST 2002


Dear Lab members,

  Have anyone been using AZ5214 to do image reversal?  Could you please
tell me what is the flood exposure time you use on either evalign or
karlsuss?  What is the spinned photoresist thickness also?  Thanks a lot ^^

Ching-Hsiang




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