si substrate etching

[Casey Feinstein]

 Hi,

I'm planning a KOH or TMAH etch through a Si substrate, and I'm wondering
about potential frontside masking materials. Has anyone used BCB or black
wax to protect the front side during a long etch? If so, how do you address
the BCB edges and possible delamination?  Does anyone have other suggestions
for a good protective layer?

Thanks in advance for your help,

Casey Feinstein
Device Development Engineer
Reflectivity, Inc.
3910 Freedom Circle Suite 103
Santa Clara, CA 95054
(408)970-8881 x151                     
                         

-------------- next part --------------
A non-text attachment was scrubbed...
Name: winmail.dat
Type: application/ms-tnef
Size: 1880 bytes
Desc: not available
URL: <http://snf.stanford.edu/pipermail/labmembers/attachments/20020214/6dd51c3d/attachment.bin>