si substrate etching

Casey Feinstein casey at reflectivity.com
Thu Feb 14 11:58:51 PST 2002


 Hi,

I'm planning a KOH or TMAH etch through a Si substrate, and I'm wondering
about potential frontside masking materials. Has anyone used BCB or black
wax to protect the front side during a long etch? If so, how do you address
the BCB edges and possible delamination?  Does anyone have other suggestions
for a good protective layer?

Thanks in advance for your help,

Casey Feinstein
Device Development Engineer
Reflectivity, Inc.
3910 Freedom Circle Suite 103
Santa Clara, CA 95054
(408)970-8881 x151                     
                         

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