SOI measurement

Alan Hsiung hsiung at snf.stanford.edu
Mon Feb 25 12:06:34 PST 2002


Dear Lab members,
	Has anybody had the experiences for measuring silicon thickness of SOI
varying from 200 to 2000A?
	Is there a recipe or program that I can use on either the nanospec or
ellipsometer?
	Your help is gratefully appreciated.

Alan






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