SOI measurement

Dan Grupp grupp at snowmass.Stanford.EDU
Mon Feb 25 18:11:02 PST 2002


program 52 on the Nanospec in photobay is best.
-Dan

On Mon, 25 Feb 2002, Alan Hsiung wrote:

> Dear Lab members,
> 	Has anybody had the experiences for measuring silicon thickness of SOI
> varying from 200 to 2000A?
> 	Is there a recipe or program that I can use on either the nanospec or
> ellipsometer?
> 	Your help is gratefully appreciated.
>
> Alan
>
>
>
>

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Dr. Daniel Grupp, Visiting Scholar
Center for Integrated Systems
Stanford University
Stanford, CA 94305
(650) 724-6911
FAX:  723-4659
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