Anyone knows RIE agent for Mn, Ir and Pt?

Dong-Woon Shin dwshin at stanford.edu
Wed Jan 23 19:23:48 PST 2002


Dear Lab members

I was wondering if someone has information on  RIE agent (gas) for Mn, Ir
and Pt which does not include clorine (CL).  Preferrably, it should not
react with transition metal such as iron, nickel or cobalt.

If you know about it or can refer anyone in CIS who has some experience,
it would be greatly appreicaited.

Thank you very much.




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