Anyone with polyimide experience?

Michael Wolfson mwolfson at exajoule.com
Mon Oct 7 11:41:22 PDT 2002


Howdy,

I'm trying to create a sacrificial layer for metal deposition.  I'll need to
be able to clear the sacrificial material from under a 2 um high, 11 um long
plate.  All indications point to polyimide, which I've never used before.
I'd appreciate hearing from anyone with experience spinning, patterning, and
removing it.

Thanks in advance,
  -- Michael Wolfson




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