1x10 micron trenches in Si

Samuel_B_Schaevitz SamS at LSInc.biz
Mon Oct 7 14:43:10 PDT 2002

Hey All,

I would like to etch 10 micron deep, 1 micron wide trenches into a wafer.
Has anyone done anything like this before?

Samuel B. Schaevitz
Lilliputian Systems, Inc.
6 Keenan Drive
Winchester, MA 01890

E-Mail: SamS at LSInc.biz
Mobile: (617) 543-5875

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