Ge ATR crystal with SiO2

Lance Kam lkam at STANFORD.EDU
Thu Oct 17 11:50:18 PDT 2002


Hello all-
Can anyone share experience on coating germanium with SiO2? The trick
here is that this structure has to be stable under water; no strong
acids or bases, but salts on the order of 100-200 mM.
>From hunting around the literature, my best guess at a process is to, in
a PECVD:
1) remove the native Ge oxide using a hydrogen etch
2) deposit a thin layer (~1nm) of Si
3) deposit SiO2 (~20nm)
Aside from not being able to do a hydrogen plasma etch at the SNF, are
there other pitfalls and/or alternatives that come to mind?

Thanks in advance,
Lance




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