KOH etching.

Harshal Surangalikar s_harshal at yahoo.com
Thu Oct 24 14:55:18 PDT 2002

hello labmembers,

i wanted to know if anybody has worked with a common
plumber's grease kind of a material to mask a Si wafer
to do single side etching in KOH, as i was interested
by its chemically inert and temperature resistant
(180C) properties. Although i will be using a fixture
to do so, i just wanted to find out if there is an
easy way to mask a side and have the etching done on
the other.

any feedback on use of black wax would also be

thank  you.


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