Looking for dry resist process veondors

John Das Jdas at activeoptical.com
Tue Oct 29 14:41:01 PST 2002


We have not experienced much success trying to get an uniform resit
coat/exposure process using the conventional methods on our 4 inch
wafers with DRIE etched deep trenches.

We are looking for a vendor who can help us with maybe some 'Riston'
type dry resist coat/expose/develop process.

Thank you for your help.


John Das, AON

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